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1.State Key Laboratory of Materials for Integrated Circuits, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, 865 Changning Road, Shanghai 200050, China
2.Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing 100049, China
3.Department of Physics, The Chinese University of Hong Kong, Hong Kong 999077, China
4.Hefei National Research Center for Physical Sciences, the Microscale and School of Physical Sciences, University of Science and Technology of China, Hefei 230026, China
5.Shanghai Research Center for Quantum Science and CAS Center for Excellence in Quantum Information and Quantum Physics, University of Science and Technology of China, Shanghai 201315, China
Yongheng Huo (yongheng@ustc.edu.cn)
Xin Ou (ouxin@mail.sim.ac.cn)
Jiaxiang Zhang (jiaxiang.zhang@mail.sim.ac.cn)
Received:01 May 2024,
Revised:25 October 2024,
Accepted:2024-10-28,
Published Online:14 February 2025,
Published:30 April 2025
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Zhu, Y. F. et al. A hybrid single quantum dot coupled cavity on a CMOS-compatible SiC photonic chip for Purcell-enhanced deterministic single-photon emission. Light: Science & Applications, 14, 948-958 (2025).
Zhu, Y. F. et al. A hybrid single quantum dot coupled cavity on a CMOS-compatible SiC photonic chip for Purcell-enhanced deterministic single-photon emission. Light: Science & Applications, 14, 948-958 (2025). DOI: 10.1038/s41377-024-01676-y.
The ability to control nonclassical light emission from a single quantum emitter by an integrated cavity may unleash new perspectives for integrated photonic quantum applications. However
coupling a single quantum emitter to cavity within photonic circuitry towards creation of the Purcell-enhanced single-photon emission is elusive due to the complexity of integrating active devices in low-loss photonic circuits. Here we demonstrate a hybrid micro-ring resonator (HMRR) coupled with self-assembled quantum dots (QDs) for cavity-enhanced deterministic single-photon emission. The HMRR
cavity supports whispering-gallery modes with quality factors up to 7.8×10
3
. By further introducing a micro-heater
we show that the photon emission of QDs can be locally and dynamically tuned over one free spectral ranges of the HMRR (~ 4 nm). This allows precise tuning of individual QDs in resonance with the cavity modes
thereby enhancing single-photon emission with a Purcell factor of about 4.9. Our results on the hybrid integrated cavities coupled with two-level quantum emitters emerge as promising devices for chip-based scalable photonic quantum applications.
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