Two-photon states meet polarization-gradient metasurfaces for nanometric, low-dose lateral-displacement metrology

Qian-Mei Deng; Jun-Hao Zeng; Feng-Jun Li; Zi-Lan Deng

doi:10.1038/s41377-026-02223-7

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Two-photon states meet polarization-gradient metasurfaces for nanometric, low-dose lateral-displacement metrology

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- Two-photon states meet polarization-gradient metasurfaces for nanometric, low-dose lateral-displacement metrology
- Two-photon states meet polarization-gradient metasurfaces for nanometric, low-dose lateral-displacement metrology
- Light: Science & Applications 2026年15卷第8期页码：2503-2505
- Affiliations：
  
  Guangdong Provincial Key Laboratory of Optical Fiber Sensing and Communications, Institute of Photonics Technology, College of Physics & Optoelectronic Engineering, Jinan University, Guangzhou 510632, China
- Author bio：
  
  Zi-Lan Deng (zilandeng@jnu.edn.cn)
- Funds：
- DOI：10.1038/s41377-026-02223-7
  中图分类号：
- 网络首发：2026-05-21，
  
  纸质出版：2026-08-31
- Accepted：
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Qian-Mei Deng, Jun-Hao Zeng, Feng-Jun Li, 等. Two-photon states meet polarization-gradient metasurfaces for nanometric, low-dose lateral-displacement metrology[J]. Light: Science & Applications, 2026,15(8):2503-2505.

Deng, Q. M. et al. Two-photon states meet polarization-gradient metasurfaces for nanometric, low-dose lateral-displacement metrology. Light: Science & Applications, 15, 2503-2505 (2026).
Qian-Mei Deng, Jun-Hao Zeng, Feng-Jun Li, 等. Two-photon states meet polarization-gradient metasurfaces for nanometric, low-dose lateral-displacement metrology[J]. Light: Science & Applications, 2026,15(8):2503-2505. DOI： 10.1038/s41377-026-02223-7.

Deng, Q. M. et al. Two-photon states meet polarization-gradient metasurfaces for nanometric, low-dose lateral-displacement metrology. Light: Science & Applications, 15, 2503-2505 (2026). DOI： 10.1038/s41377-026-02223-7.

摘要

Abstract

Accurate displacement sensing is indispensable in advanced semiconductor lithography. Conventional coherent-light-based approaches are hindered by photon budget limitations

slowing down in-situ measurements. In a recent study

Chen et al. introduced a polarization-gradient metasurface integrated with two-photon quantum interference to achieve equivalent precision with only ~3% of the photons required by classical methods. This work represents a decisive step in merging metasurfaces with quantum resources

paving the way for high-speed

low-noise

and integration-ready displacement metrology.

关键词

Keywords

references

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