Interferometric scattering for optical tomoslicing of transparent solids

Yuan Chai; Hong-Hua Fang; Zhen-Ze Li; Tian-Wei Wang; Shao-Feng Liu; Hong-Ren Chen; Shu-Chang Li; Xiao-Yan Li; Jia-Ming Lyu; Hong-Bo Sun

doi:10.1038/s41377-026-02344-z

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Interferometric scattering for optical tomoslicing of transparent solids

Original Articles

- Interferometric scattering for optical tomoslicing of transparent solids
- Interferometric scattering for optical tomoslicing of transparent solids
- Light: Science & Applications 2026年15卷第8期页码：2524-2533
- Affiliations：
  
  1.State Key Laboratory of Precision Measurement Technology and Instruments, Department of Precision Instrument, Tsinghua University, Beijing 100084, China
  2.Key Laboratory of Advanced Light Conversion Materials and Biophotonics, School of Chemistry and Life Resources, Renmin University of China, Beijing 100872, China
  3.Mechano-X Institute, Applied Mechanics Laboratory, Department of Engineering Mechanics, Tsinghua University, Beijing 100084, China
- Author bio：
  
  Hong-Hua Fang (hfang@ruc.edu.cn)
  Jia-Ming Lyu (20252758@bistu.edu.cn)
  Hong-Bo Sun (hbsun@tsinghua.edu.cn)
- Funds：
- DOI：10.1038/s41377-026-02344-z
  中图分类号：
- 收稿：2026-01-06，
  
  修回：2026-04-16，
  
  录用：2026-05-11，
  
  网络首发：2026-06-30，
  
  纸质出版：2026-08-31
- Accepted：
Scan QR Code
Yuan Chai, Hong-Hua Fang, Zhen-Ze Li, 等. Interferometric scattering for optical tomoslicing of transparent solids[J]. Light: Science & Applications, 2026,15(8):2524-2533.

Chai, Y. et al. Interferometric scattering for optical tomoslicing of transparent solids. Light: Science & Applications, 15, 2524-2533 (2026).
Yuan Chai, Hong-Hua Fang, Zhen-Ze Li, 等. Interferometric scattering for optical tomoslicing of transparent solids[J]. Light: Science & Applications, 2026,15(8):2524-2533. DOI： 10.1038/s41377-026-02344-z.

Chai, Y. et al. Interferometric scattering for optical tomoslicing of transparent solids. Light: Science & Applications, 15, 2524-2533 (2026). DOI： 10.1038/s41377-026-02344-z.

摘要

Abstract

While light scattering is widely utilized in optical metrology and measurement

it has long been regarded as detrimental in laser-material processing. Here

we report an interferometric scattering effect that overturns this conventional view by resolving the six-decade challenge of axial resolution in optical manufacturing. This breakthrough elevates the axial resolution from micrometers

e.g.

~2 µm in transparent solids slicing

to the sub-10 nm level. The underlying mechanism involves the controlled sequential generation of nano-scatterers through interference between the incident laser and deliberately seeded scattering centers. Based on this phenomenon

we developed an interferometric scattering-based optical tomoslicing technology (

-SOT)

achieving kerf widths as narrow as 7 nm under an industrial standard efficiency of up to 400 mm

/s. This unprecedented axial resolution enables nearly lossless laser wafering from ingots—reducing mass loss from ~30% to below 1% — with transformative potential for manufacturing laser crystals

photovoltaics

and microelectronic chips.

关键词

Keywords

references

Raman, C. V. & Krishnan, K. S. A new type of secondary radiation. Nature 121 , 501–502, https://doi.org/10.1038/121501c0 (1928)..

Min, W., Cheng, J.-X. & Ozeki, Y. Theory, innovations and applications of stimulated Raman scattering microscopy. Nat. Photonics 19 , 803–816, https://doi.org/10.1038/s41566-025-01707-z (2025)..

Hémonnot, C. Y. J. & Köster, S. Imaging of Biological Materials and Cells by X-ray Scattering and Diffraction. ACS Nano 11 , 8542–8559, https://doi.org/10.1021/acsnano.7b03447 (2017)..

May, M. A. et al. Fast holographic scattering compensation for deep tissue biological imaging. Nat. Commun. 12 , 4340, https://doi.org/10.1038/s41467-021-24666-9 (2021)..

Schechner, Y. Y., Narasimhan, S. G. & Nayar, S. K. Polarization-based vision through haze. Appl. Opt. 42 , 511–525, https://doi.org/10.1364/AO.42.000511 (2003)..

Gibson, A. J. & Sandford, M. C. W. Daytime laser radar measurements of the atmospheric sodium layer. Nature 239 , 509–511, https://doi.org/10.1038/239509a0 (1972)..

Bowman, M. R., Gibson, A. J. & Sandford, M. C. W. Atmospheric sodium measured by a tuned laser radar. Nature 221 , 456–457, https://doi.org/10.1038/221456a0 (1969)..

Schermelleh, L. et al. Subdiffraction Multicolor Imaging of the Nuclear Periphery with 3D Structured Illumination Microscopy. Science 320 , 1332–1336, https://doi.org/10.1126/science.1156947 (2008)..

Willig, K. I., Rizzoli, S. O., Westphal, V., Jahn, R. & Hell, S. W. STED microscopy reveals that synaptotagmin remains clustered after synaptic vesicle exocytosis. Nature 440 , 935–939, https://doi.org/10.1038/nature04592 (2006)..

Kawata, S., Sun, H.-B., Tanaka, T. & Tak ada, K. Finer features for functional microdevices. Nature 412 , 697–698, https://doi.org/10.1038/35089130 (2001)..

Li, Z. Z. et al. O-FIB: far-field-induced near-field breakdown for direct nanowriting in an atmospheric environment. Light Sci. Appl 9 , 41, https://doi.org/10.1038/s41377-020-0275-2 (2020)..

Saha, S. K. et al. Scalable submicrometer additive manufacturing. Science 366 , 105–109, https://doi.org/10.1126/science.aax8760 (2019)..

Han, F. et al. Three-dimensional nanofabrication via ultrafast laser patterning and kinetically regulated material assembly. Science 378 , 1325–1331, https://doi.org/10.1126/science.abm8420 (2022)..

Han, S. et al. Laser slicing of 4H-SiC wafers based on picosecond laser-induced micro-explosion via multiphoton processes. Optics Laser Technol. 154 , https://doi.org/10.1016/j.optlastec.2022.108323 (2022)..

Xiangfu, L. & Minghui, H. Heat-assisted pulsed laser processing induced nano-cracks for low kerf-loss and high-surface quality SiC wafer slicing. Optics Laser Technol. 189 , https://doi.org/10.1016/j.optlastec.2025.113040 (2025)..

Swoboda, M., Beyer, C., Rieske, R., Drescher, W. & Richter, J. Laser assisted SiC wafering using COLD SPLIT. Mater. Sci. Forum 897 , 403–406, www.scientific.net/MSF.897.403 http://www.scientific.net/MSF.897.403 (2017)..

Ródenas, A. et al. Three-dimensional femtosecond laser nanolithography of crystals. Nat. Photonics 13 , 105–109, https://doi.org/10.1038/s41566-018-0327-9 (2018)..

Tokel, O. et al. In-chip microstructures and photonic devices fabricated by nonlinear laser lithography deep inside silicon. Nat. Photonics 11 , 639–645, https://doi.org/10.1038/s41566-017-0004-4 (2017)..

Yang, W., Kazansky, P. G. & Svirko, Y. P. Non-reciprocal ultrafast laser writing. Nat. Photonics 2 , 99–104, https://doi.org/10.1038/nphoton.2007.276 (2008)..

Gattass, R. R. & Mazur, E. Femtosecond laser micromachining in transparent materials. Nat. Photonics 2 , 219–225, https://doi.org/10.1038/nphoton.2008.47 (2008)..

Wei, D. et al. Experimental demonstration of a three-dimensional lithium niobate nonlinear photonic crystal. Nat. Photonics 12 , 596–600, https://doi.org/10.1038/s41566-018-0240-2 (2018)..

Sakakura, M., Lei, Y., Wang, L., Yu, Y.-H. & Kazansky, P. G. Ultralow-loss geometric phase and polarization shaping by ultrafast laser writing in silica glass. Light Sci. Appl. 9, https://doi.org/10.1038/s41377-020-0250-y (2020).

Lancry, M. et al. Ultrafast nanoporous silica formation driven by femtosecond laser irradiation. Laser Photonics Rev. 7 , 953–962, https://doi.org/10.1002/lpor.201300043 (2013)..

Nemilentsau, A. M. Scattering of the near field of an electric dipole by a single-wall carbon nanotube. J. Nanophoton. 4, https://doi.org/10.1117/1.3416909 (2010).

Li, Z.-Z. et al. Super-stealth dicing of transparent solids with nanometric precision. Nat. Photon. https://doi.org/10.1038/s41566-024-01437-8 (2024).

Liu, S.-F. et al. 3D nanoprinting of semiconductor quantum dots by photoexcitation-induced chemical bonding. Science 377 , 1112–1116, https://doi.org/10.1126/science.abo5345 (2022)..

Li, F. et al. 3D printing of inorganic nanomaterials by photochemically bonding colloidal nanocrystals. Science 381 , 1468–1474, https://doi.org/10.1126/science.adg6681 (2023)..

Gissibl, T., Thiele, S., Herkommer, A. & Giessen, H. Two-photon direct laser writing of ultracompact multi-lens objectives. Nat. Photonics 10 , 554–560, https://doi.org/10.1038/nphoton.2016.121 (2016)..

Stavrou, M. et al. Direct measurement of two-photon absorption and refraction properties of SZ2080TM-based resists at 515 nm: insights into 3D printing. Nanophotonics https://doi.org/10.1515/nanoph-2025-0066 (2025).

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