Solving the inverse grating problem by white light interference Fourier scatterometry

Valeriano Ferreras Paz; Sandy Peterhänsel; Karsten Frenner; Wolfgang Osten

doi:10.1038/lsa.2012.36

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Solving the inverse grating problem by white light interference Fourier scatterometry

Original Article

- Solving the inverse grating problem by white light interference Fourier scatterometry
- Light: Science & Applications Vol. 1, Issue 1, (2012)
- Affiliations：
  
  1.Institute of Applied Optics, Stuttgart University, 70569 Stuttgart, Germany
  2.SCoPE—Stuttgart Research Center of Photonic Engineering, Stuttgart University, Stuttgart, Germany
- Author bio：
  
  Professor V Ferreras Paz, Institute of Applied Optics, Stuttgart University, Pfaffenwaldring 9, 70569 Stuttgart, Germany. E-mail: ferreras@ito.uni-stuttgart.de
  Professor W Osten, Institute of Applied Optics, Stuttgart University, Pfaffenwaldring 9, 70569 Stuttgart, Germany. E-mail: osten@ito.uni-stuttgart.de
- Funds：
- DOI：10.1038/lsa.2012.36
  CLC：
- Published：2012-03，
  
  Published Online：09 November 2012，
  
  Received：24 April 2012，
  
  Revised：10 July 2012，
  
  Accepted：17 July 2012
- Accepted：
Scan QR Code
Paz, V. F. et al. Solving the inverse grating problem by white light interference Fourier scatterometry. Light: Science & Applications, 1, e36 (2012).
DOI：

Paz, V. F. et al. Solving the inverse grating problem by white light interference Fourier scatterometry. Light: Science & Applications, 1, e36 (2012). DOI： 10.1038/lsa.2012.36.

摘要

Abstract

Scatterometry is a well-established

fast and precise optical metrology method used for the characterization of sub-lambda periodic features. The Fourier scatterometry method

by analyzing the Fourier plane

makes it possible to collect the angle-resolved diffraction spectrum without any mechanical scanning. To improve the depth sensitivity of this method

we combine it with white light interferometry. We show the exemplary application of the method on a silicon line grating. To characterize the sub-lambda features of the grating structures

we apply a model-based reconstruction approach by comparing simulated and measured spectra. All simulations are based on the rigorous coupled-wave analysis method.

关键词

Keywords

Fourier scatterometryinverse problemoptical sub-lambda metrologyRCWAwhite light interference

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