Simultaneous additive and subtractive three-dimensional nanofabrication using integrated two-photon polymerization and multiphoton ablation

Wei Xiong; Yun Shen Zhou; Xiang Nan He; Yang Gao; Masoud Mahjouri-Samani; Lan Jiang; Tommaso Baldacchini; Yong Feng Lu

doi:10.1038/lsa.2012.6

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Simultaneous additive and subtractive three-dimensional nanofabrication using integrated two-photon polymerization and multiphoton ablation

Original Article

- Simultaneous additive and subtractive three-dimensional nanofabrication using integrated two-photon polymerization and multiphoton ablation
- Light: Science & Applications Vol. 1, Issue 1, (2012)
- Affiliations：
  
  1.Department of Electrical Engineering, University of Nebraska-Lincoln, Lincoln, NE 68588-0511, USA
  2.Department of Mechanical and Automation Engineering, Beijing Institute of Technology, Beijing 100081, China
  3.Technology and Applications Center, Newport Corporation, Irvine, CA 92606, USA
- Author bio：
  
  Professor YF Lu, Department of Electrical Engineering, University of Nebraska-Lincoln, Lincoln, NE 68588-0511, USA E-mail: ylu2@unl.edu
- Funds：
- DOI：10.1038/lsa.2012.6
  CLC：
- Published：2012-03，
  
  Published Online：13 April 2012，
  
  Received：01 January 2012，
  
  Accepted：05 March 2012
- Accepted：
Scan QR Code
Xiong, W. et al. Simultaneous additive and subtractive three-dimensional nanofabrication using integrated two-photon polymerization and multiphoton ablation. Light: Science & Applications, 1, e6 (2012).
DOI：

Xiong, W. et al. Simultaneous additive and subtractive three-dimensional nanofabrication using integrated two-photon polymerization and multiphoton ablation. Light: Science & Applications, 1, e6 (2012). DOI： 10.1038/lsa.2012.6.

摘要

Abstract

Modern three-dimensional nanofabrication requires both additive and subtractive processes. However

both processes are largely isolated and generally regarded as incompatible with each other. In this study

we developed simultaneous additive and subtractive fabrication processes using two-photon polymerization followed by femtosecond (fs) laser multiphoton ablation. To demonstrate the new capability

submicrometer polymer fibers containing periodic holes of 500-nm diameter and microfluidic channels of 1-µm diameter were successfully fabricated. This method combining both two-photon polymerization and fs laser ablation improves the nanofabrication efficiency and enables the fabrication of complex three-dimensional micro-/nanostructures

promising for a wide range of applications in integrated optics

microfluidics and microelectromechanical systems.

关键词

Keywords

femtosecond laser direct writingfemtosecond laser multiphoton ablationmicro-/nanofabricationtwo-photon polymerization

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