High-aspect 3D two-photon polymerization structuring with widened objective working range (WOW-2PP)

Kotaro Obata; Ayman El-Tamer; Lothar Koch; Ulf Hinze; Boris N Chichkov

doi:10.1038/lsa.2013.72

Go to Nature Website

Your Location：

Home >

Browse articles >

High-aspect 3D two-photon polymerization structuring with widened objective working range (WOW-2PP)

Original Articles

- High-aspect 3D two-photon polymerization structuring with widened objective working range (WOW-2PP)
- Light: Science & Applications Vol. 2, Issue 3-4, (2013)
- Affiliations：
  
  Laser Zentrum Hannover e.V., 30419 Hannover, Germany
- Author bio：
  
  Dr BN Chichkov, Laser Zentrum Hannover e.V., Hollerithallee 8, 30419 Hannover, Germany E-mail: b.chichkov@lzh.de
- Funds：
- DOI：10.1038/lsa.2013.72
  CLC：
- Published：2013-12，
  
  Published Online：06 December 2013，
  
  Received：01 February 2013，
  
  Revised：27 May 2013，
  
  Accepted：19 August 2013
- Accepted：
Scan QR Code
Obata, K. et al. High-aspect 3D two-photon polymerization structuring with widened objective working range (WOW-2PP). Light: Science & Applications, 2, e116 (2013).
DOI：

Obata, K. et al. High-aspect 3D two-photon polymerization structuring with widened objective working range (WOW-2PP). Light: Science & Applications, 2, e116 (2013). DOI： 10.1038/lsa.2013.72.

摘要

Abstract

We developed a novel two-photon polymerization (2PP) configuration for fabrication of high-aspect three-dimensional (3D) structures

with an overall height larger than working distance of the microscope objective used for laser beam focusing into a photosensitive material. This method is based on a modified optical 2PP setup

where a microscope objective (100× high N.A.)

immersion oil and cover glass can be moved together into the photosensitive material

resulting in an effective higher and wider objective working range (WOW-2PP). The proposed technique enables the fabrication of high-aspect structures with sub-micrometer process resolution. 3D structures with a height of 7 mm are demonstrated

which could hardly be built with the conventional 2PP set-up due to refractive index mismatch and laser beam disturbances.

关键词

Keywords

femtosecond laserlarge-scale structuringlaser material processingphotochemistrytwo-photon polymerization

references

Du D, Liu X, Korn G, Mourou G. Laser-induced breakdown by impact ionization in SiO2with pulse widths from 7 ns to 150 fs.Appl Phys Lett1994;64: 3071–3073..

Kumagai H, Midorikawa K, Toyoda K, Nakamura S, Okamoto Tet al. Ablation of polymer films by a femtosecond high-peak-power Ti: sapphire laser at 798 nm.Appl Phys Lett1994;65: 1850–1852..

Chichkov BN, Momma C, Nolte S, Alvensleben F, Tünnermann A. Femtosecond, picosecond and nanosecond laser ablation of solids.Appl Phys A1996;63: 109–115..

Davis KM, Miura K, Sugimoto N, Hirao K. Writing waveguides in glass with a femtosecond laser.Opt Lett1996;21: 1729–1731..

Glezer EN, Milosavljevic M, Juang L, Finlay RJ, Her THet al. Three-dimensional optical storage inside transparent materials.Opt Lett1996;21: 2023–2025..

Will M, Nolte S, Chichkov BN, Tüennermann A. Optical properties of waveguides fabricated in fused silica by femtosecond laser pulses.Appl Opt2002;41: 4360–4364..

Maruo S, Nakamura O, Kawata S. Three-dimensional microfabrication with two-photon-absorbed photopolymerization.Opt Lett1997;22: 132–134..

Sun HB, Matsuo S, Misawa H. Three-dimensional photonic crystal structures achieved with two-photon-absorption photopolymerization of resin.Appl Phys Lett1999;74: 786–788..

Cumpston BH, Ananthavel SP, Barlow S, Dyer DL, Ehrlich JEet al. Two-photon polymerization initiators for three-dimensional optical data storage and microfabrication.Nature1999;398: 51–54..

Kawata S, Sun HB, Tanaka T, Takada K. Finer features for functional microdevices.Nature2001;412: 697–698..

Serbin J, Ovsianikov A, Chichkov B. Fabrication of woodpile structures by two-photon polymerization and investigation of their optical properties.Opt Express2004;12: 5221–5228..

Guo R, Xiao S, Zhai X, Li J, Xia Aet al. Micro lens fabrication by means of femtosecond two photon photopolymerization.Opt Express2006;14: 810–816..

Reinhardt C, Passinger S, Chichkov BN, Marquart C, Radko IPet al. Laser-fabricated dielectric optical components for surface plasmon polaritons.Opt Lett2006;31: 1307–1309..

Schlie S, Ngezahayo A, Ovsianikov A, Fabian T, Kolb HAet al. Three-dimensional cell growth on structures fabricated from ORMOCER®by two-photon polymerization technique.J Biomater Appl2007;22: 275–287..

Ovsianikov A, Schlie S, Ngezahayo A, Haverich A, Chichkov BN. Two-photon polymerization technique for microfabrication of CAD-designed 3D scaffolds from commercially available photosensitive materials.J Tissue Eng Regen Med2007;1: 443–449..

Takada K, Sun HB, Kawata S. Improved spatial resolution and surface roughness in photopolymerization-based laser nanowriting.Appl Phys Lett2006;86: 071122..

Seet KK, Juodkazis S, Jarutis V, Misawa H. Feature-size reduction of photopolymerized structures by femtosecond optical curing of SU-8.Appl Phys Lett2006;89: 024106..

Haske W, Chen VW, Hales JM, Dong W, Barlow Set al. 65 nm feature sizes using visible wavelength 3-D multiphoton lithography.Opt Express2007;15: 3426–3436..

Tan D, Li Y, Qi F, Yang H, Gong Q. Reduction in feature size of two-photon polymerization using SCR500.Appl Phys Lett2007;90: 071106..

Emons M, Obata K, Binhammer T, Ovsianikov A, Chichkov BNet al. Two-photon polymerization technique with sub-50 nm resolution by sub-10 fs laser pulses.Opt Mater Express2012;2: 942–947..

Dip-In Laser Lithography: DILL (http://www.nanoscribe.de/de/technologie/dillhttp://www.nanoscribe.de/de/technologie/dill).

Obata K, Koch J, Hinze U, Chichkov BN. Multi-focus two-photon polymerization technique based on individually controlled phase modulation.Opt Express2010;18: 17193–17200..

Gittard SD, Nguyen A, Obata K, Koroleva A, Narayan RJet al. Fabrication of microscale medical devices by two-photon polymerization with multiple fociviaa spatial light modulator.Biomed Opt Express2011;2: 3167–3178..

Views

Downloads

CSCD

Alert me when the article has been cited

Submit

Tools

Publicity Resources

Ultrafast z-scanning for high-efficiency laser micro-machining

Electrons dynamics control by shaping femtosecond laser pulses in micro/nanofabrication: modeling, method, measurement and application

Four-dimensional light shaping: manipulating ultrafast spatiotemporal foci in space and time

Direct visualization of the complete evolution of femtosecond laser-induced surface structural dynamics of metals

In-channel integration of designable microoptical devices using flat scaffold-supported femtosecond-laser microfabrication for coupling-free optofluidic cell counting

Related Author

Craig B Arnold

Romain Fardel

Ting-Hsuan Chen

Yong-Feng Lu

Tian-Hong Cui

Bo Li

Lan Jiang

An-Dong Wang

Related Institution

Department of Mechanical and Aerospace Engineering, and Princeton Institute for the Science and Technology of Materials, Princeton University, Princeton

Laser Micro/Nano-Fabrication Laboratory, School of Mechanical Engineering, Beijing Institute of Technology

Department of Mechanical Engineering, University of Minnesota

Department of Electrical Engineering, University of Nebraska-, Lincoln

Institute of Photonic Technologies, Friedrich-Alexander-University ErlangenNuremberg, Konrad-Zuse-Strasse 3/5, Erlangen

⁰