Wafer-scale fabricated thermo-pneumatically tunable microlenses

Wei Zhang; Hans Zappe; Andreas Seifert

doi:10.1038/lsa.2014.26

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Wafer-scale fabricated thermo-pneumatically tunable microlenses

Original Articles

- Wafer-scale fabricated thermo-pneumatically tunable microlenses
- Light: Science & Applications Vol. 3, Issue 1, (2014)
- Affiliations：
  
  Department of Microsystems Engineering, University of Freiburg, 79110 Freiburg, Germany
- Author bio：
  
  Dr W Zhang, H Zappe, Department of Microsystems Engineering, University of Freiburg, Georges-Koehler-Allee 102, 79110 Freiburg, Germany E-mail: zhangwei0105@gmail.com; zappe@imtek.uni-freiburg.de
- Funds：
- DOI：10.1038/lsa.2014.26
  CLC：
- Published：2014-03，
  
  Published Online：28 February 2014，
  
  Received：01 August 2013，
  
  Revised：03 October 2013，
  
  Accepted：15 October 2013
- Accepted：
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Zhang, W., Zappe, H. & Seifert, A. Wafer-scale fabricated thermo-pneumatically tunable microlenses. Light: Science & Applications, 3, e145 (2014).
DOI：

Zhang, W., Zappe, H. & Seifert, A. Wafer-scale fabricated thermo-pneumatically tunable microlenses. Light: Science & Applications, 3, e145 (2014). DOI： 10.1038/lsa.2014.26.

摘要

Abstract

We have developed a self-contained

liquid tunable microlens based on polyacrylate membranes integrated with compact on-chip thermo-pneumatic actuation fabricated using full-wafer processing. Silicone oil is used as the optical liquid

which is pushed or pulled into the lens cavity

via

an extended microfluidic channel structure without any pumps

valves or other mechanical means. The heat

load generated by the thermal actuator is physically isolated from the lens chamber. The back focal length may be tuned from infinity to 4 mm with a maximum power consumption of 300 mW. The principal application is fine tuning of the back focal length

for which tuning time constants as small as 100 ms are suitable.

关键词

Keywords

optofluidicsthermo-pneumatic actuationtunable microlenswafer-scale fabrication

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