Quantized structuring of transparent films with femtosecond laser interference

Kitty Kumar; Kenneth KC Lee; Jianzhao Li; Jun Nogami; Nazir P Kherani; Peter R Herman

doi:10.1038/lsa.2014.38

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Quantized structuring of transparent films with femtosecond laser interference

Original Articles

- Quantized structuring of transparent films with femtosecond laser interference
- Light: Science & Applications Vol. 3, Issue 2, (2014)
- Affiliations：
  
  1.Department of Materials Science and Engineering, University of Toronto, Toronto, Canada
  2.Department of Electrical and Computer Engineering, University of Toronto, Toronto, Canada
- Author bio：
  
  Dr PR Herman, Department of Electrical and Computer Engineering, University of Toronto, Toronto, Canada Email: p.herman@utoronto.ca
- Funds：
- DOI：10.1038/lsa.2014.38
  CLC：
- Published：2014-06，
  
  Published Online：14 March 2014，
  
  Received：23 September 2013，
  
  Revised：27 November 2013，
  
  Accepted：01 December 2013
- Accepted：
Scan QR Code
Kumar, K. et al. Quantized structuring of transparent films with femtosecond laser interference. Light: Science & Applications, 3, e157 (2014).
DOI：

Kumar, K. et al. Quantized structuring of transparent films with femtosecond laser interference. Light: Science & Applications, 3, e157 (2014). DOI： 10.1038/lsa.2014.38.

摘要

Abstract

The confinement of laser interactions inside transparent materials assisted by tight optical focusing and short-pulsed nonlinear interactions has driven many high-resolution patterning and probing applications in science and technology. In thin transparent films

laser interactions confined to the film/substrate interface have underpinned blistering and ejection processes for nanofluidic channel fabrication

film patterning and cell catapulting. Here

we harness femtosecond lasers to drive nonlinear interactions within Fabry–Perot interference fringes to define narrow nanolength scale zones for highly resolved internal structuring of a film of refractive index

film

at fringe maxima separated by

film

. This novel interaction internally cleaves the film to open subwavelength internal cavities and form thin membranes at single or multiple depths from which follow significant opportunities for writing multilevel nanofluidic channels inside the film

as well as ejecting nanodisks at quantized film depths for coloring and three-dimensional surface patterning that promise new compact types of lab-in-film devices.

关键词

Keywords

blisteringdielectricslaser processingquantized etchingsubwavelength processingthin films

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