In-channel integration of designable microoptical devices using flat scaffold-supported femtosecond-laser microfabrication for coupling-free optofluidic cell counting

Dong Wu; Jian Xu; Li-Gang Niu; Si-Zhu Wu; Katsumi Midorikawa; Koji Sugioka

doi:10.1038/lsa.2015.1

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In-channel integration of designable microoptical devices using flat scaffold-supported femtosecond-laser microfabrication for coupling-free optofluidic cell counting

Original Articles

- In-channel integration of designable microoptical devices using flat scaffold-supported femtosecond-laser microfabrication for coupling-free optofluidic cell counting
- Light: Science & Applications Vol. 4, Issue 1, (2015)
- Affiliations：
  
  1.Laser Technology Laboratory, RIKEN, Saitama 351-0198, Japan
  2.State Key Laboratory on Integrated Optoelectronics, College of Electronic Science and Engineering, Jilin University, Changchun 130012, China
- Author bio：
  
  K Sugioka, Laser Technology Laboratory, RIKEN, 2-1 Hirosawa, Wako, Saitama 351-0198, Japan E-mail: ksugioka@riken.jp
- Funds：
- DOI：10.1038/lsa.2015.1
  CLC：
- Published：2015-03，
  
  Published Online：07 November 2014，
  
  Received：09 June 2014，
  
  Revised：23 September 2014，
  
  Accepted：08 October 2014
- Accepted：
Scan QR Code
Wu, D. et al. In-channel integration of designable microoptical devices using flat scaffold-supported femtosecond-laser microfabrication for coupling-free optofluidic cell counting. Light: Science & Applications, 4, e228 (2015).
DOI：

Wu, D. et al. In-channel integration of designable microoptical devices using flat scaffold-supported femtosecond-laser microfabrication for coupling-free optofluidic cell counting. Light: Science & Applications, 4, e228 (2015). DOI： 10.1038/lsa.2015.1.

摘要

Abstract

The high-precision integration of three-dimensional (3D) microoptical components into microfluidics in a customizable manner is crucial for optical sensing

fluorescence analysis

and cell detection in optofluidic applications; however

it remains challenging for current microfabrication technologies. This paper reports the in-channel integration of flexible two-dimensional (2D) and 3D polymer microoptical devices into glass microfluidics by developing a novel technique: flat scaffold-supported hybrid femtosecond laser microfabrication (FSS-HFLM). The scaffold with an optimal thickness of 1–5 µm is fabricated on the lower internal surface of a microfluidic channel to improve the integration of high-precision microoptical devices on the scaffold by eliminating any undulated internal channel surface caused by wet etching. As a proof of demonstration

two types of typical microoptical devices

namely

2D Fresnel zone plates (FZPs) and 3D refractive microlens arrays (MLAs)

are integrated. These devices exhibit multicolor focal spots

elongated (> three times) focal length and imaging of the characters 'RIKEN' in a liquid channel. The resulting optofluidic chips are further used for coupling-free white-light cell counting with a success rate as high as 93%. An optofluidic system with two MLAs and a W-filter is also designed and fabricated for more advanced cell filtering/counting applications.

关键词

Keywords

cell counting3D optofluidic chipshybrid femtosecond laser microfabricationmicrolens arraystwo-photon polymerization

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