Ultrafast laser processing of materials: from science to industry

Mangirdas Malinauskas; Albertas Žukauskas; Satoshi Hasegawa; Yoshio Hayasaki; Vygantas Mizeikis; Ričardas Buividas; Saulius Juodkazis

doi:10.1038/lsa.2016.133

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Ultrafast laser processing of materials: from science to industry

Review

- Ultrafast laser processing of materials: from science to industry
- Light: Science & Applications Vol. 5, Issue 3, (2016)
- Affiliations：
  
  1.Laser Research Centre, Department of Quantum Electronics, Physics Faculty, Vilnius University, Saulėtekio Ave. 10, LT-10223 Vilnius, Lithuania
  2.Center for Optical Research and Education (CORE), Utsunomiya University, 7-1-2 Yoto, Utsunomiya 321-8585, Japan
  3.Research Institute of Electronics, Shizuoka University, 3-5-3-1 Johoku, Naka-ku, Hamamatsu 432-8561, Japan
  4.Centre for Micro-Photonics, Faculty of Science, Engineering and Technology, Swinburne University of Technology, Hawthorn, VIC 3122, Australia
  5.Melbourne Centre for Nanofabrication, ANFF, 151 Wellington Road, Clayton, VIC 3168, Australia
  6.Center of Nanotechnology, King Abdulaziz University, Jeddah 21589, Saudi Arabia
- Author bio：
  
  M Malinauskas, Email: mangirdas.malinauskas@ff.vu.lt
  S Juodkazis, Email: sjuodkazis@swin.edu.au
- Funds：
- DOI：10.1038/lsa.2016.133
  CLC：
- Published：2016-09，
  
  Published Online：14 March 2016，
  
  Received：07 January 2015，
  
  Revised：04 March 2016，
  
  Accepted：09 March 2016
- Accepted：
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Malinauskas, M. et al. Ultrafast laser processing of materials: from science to industry. Light: Science & Applications, 5, e16133 (2016).
DOI：

Malinauskas, M. et al. Ultrafast laser processing of materials: from science to industry. Light: Science & Applications, 5, e16133 (2016). DOI： 10.1038/lsa.2016.133.

摘要

Abstract

Processing of materials by ultrashort laser pulses has evolved significantly over the last decade and is starting to reveal its scientific

technological and industrial potential. In ultrafast laser manufacturing

optical energy of tightly focused femtosecond or picosecond laser pulses can be delivered to precisely defined positions in the bulk of materials via two-/multi-photon excitation on a timescale much faster than thermal energy exchange between photoexcited electrons and lattice ions. Control of photo-ionization and thermal processes with the highest precision

inducing local photomodification in sub-100-nm-sized regions has been achieved. State-of-the-art ultrashort laser processing techniques exploit high 0.1–1 μm spatial resolution and almost unrestricted three-dimensional structuring capability. Adjustable pulse duration

spatiotemporal chirp

phase front tilt and polarization allow control of photomodification via uniquely wide parameter space. Mature opto-electrical/mechanical technologies have enabled laser processing speeds approaching meters-per-second

leading to a fast lab-to-fab transfer. The key aspects and latest achievements are reviewed with an emphasis on the fundamental relation between spatial resolution and total fabrication throughput. Emerging biomedical applications implementing micrometer feature precision over centimeter-scale scaffolds and photonic wire bonding in telecommunications are highlighted.

关键词

Keywords

biomedical applicationsdirect laser writingfunctional microdevicesmaterial processingnonlinear light–matter interaction3D structuringultrashort laser pulses

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