High-finesse Fabry–Perot cavities with bidimensional Si<sub>3</sub>N<sub>4</sub> photonic-crystal slabs

Xu Chen; Clément Chardin; Kevin Makles; Charles Caër; Sheon Chua; Rémy Braive; Isabelle Robert-Philip; Tristan Briant; Pierre-François Cohadon; Antoine Heidmann; Thibaut Jacqmin; Samuel Deléglise

doi:10.1038/lsa.2016.190

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High-finesse Fabry–Perot cavities with bidimensional Si₃N₄ photonic-crystal slabs

Original Articles

- High-finesse Fabry–Perot cavities with bidimensional Si₃N₄ photonic-crystal slabs
- Light: Science & Applications Vol. 6, Issue 1, (2017)
- Affiliations：
  
  1.Laboratoire Kastler Brossel, UPMC-Sorbonne Universités, CNRS, ENS-PSL Research University, Collège de France, 4 place Jussieu, Case 74, F75252 Paris, France
  2.Current address: IBM Research - Zürich, Säumerstrasse 4, 8803 Rüschlikon, Switzerland
  3.Laboratoire de Photonique et de Nanostructures LPN-CNRS/CNRS, Route de Nozay, 91460 Marcoussis, France
  4.Université Paris Diderot, Sorbonne Paris Cité, 75207 Paris, France
- Author bio：
  
  T Jacqmin, Email: thibaut.jacqmin@lkb.upmc.fr
- Funds：
- DOI：10.1038/lsa.2016.190
  CLC：
- Published：2017-03，
  
  Published Online：18 July 2016，
  
  Received：23 March 2016，
  
  Revised：16 June 2016，
  
  Accepted：13 July 2016
- Accepted：
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Chen, X. et al. High-finesse Fabry–Perot cavities with bidimensional Si₃N₄ photonic-crystal slabs. Light: Science & Applications, 6, e16190 (2017).
DOI：

Chen, X. et al. High-finesse Fabry–Perot cavities with bidimensional Si₃N₄ photonic-crystal slabs. Light: Science & Applications, 6, e16190 (2017). DOI： 10.1038/lsa.2016.190.

摘要

Abstract

Light scattering by a two-dimensional phot

onic-crystal slab (PCS) can result in marked interference effects associated with Fano resonances. Such devices offer appealing alternatives to distributed Bragg reflectors and filters for various applications

such as optical wavelength and polarization filters

reflectors

semiconductor lasers

photodetectors

bio-sensors and non-linear optical components. Suspended PCS also have natural applications in the field of optomechanics

where the mechanical modes of a suspended slab interact via radiation pressure with the optical field of a high-finesse cavity. The reflectivity and transmission properties of a defect-free suspended PCS around normal incidence can be used to couple out-of-plane mechanical modes to an optical field by integrating it in a free-space cavity. Here we demonstrate the successful implementation of a PCS reflector on a high-tensile stress Si

nanomembrane. We illustrate the physical process underlying the high reflectivity by measuring the photonic-crystal band diagram. Moreover

we introduce a clear theoretical description of the membrane scattering properties in the presence of optical losses. By embedding the PCS inside a high-finesse cavity

we fully characterize its optical properties. The spectrally

angular- and polarization-resolved measurements demonstrate the wide tunability of the membrane's reflectivity

from nearly 0 to 99.9470±0.0025%

and show that material absorption is not the main source of optical loss. Moreover

the cavity storage time demonstrated in this work exceeds the mechanical period of low-order mechanical drum modes. This so-called resolved-sideband condition is a prerequisite to achieve quantum control of the mechanical resonator with light.

关键词

Keywords

Fano resonancehigh-reflectivity membranelow-loss optical reflectornanomembrane resonatorphotonic-crystal slabquantum optomechanics

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⁰

High-finesse Fabry–Perot cavities with bidimensional Si3N4 photonic-crystal slabs

DOI：10.1038/lsa.2016.190

摘要

Abstract

关键词

Keywords

references

High-finesse Fabry–Perot cavities with bidimensional Si₃N₄ photonic-crystal slabs