Deep subwavelength nanometric image reconstruction using Fourier domain optical normalization

Jing Qin; Richard M Silver; Bryan M Barnes; Hui Zhou; Ronald G Dixson; Mark-Alexander Henn

doi:10.1038/lsa.2016.38

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Deep subwavelength nanometric image reconstruction using Fourier domain optical normalization

Original Articles

- Deep subwavelength nanometric image reconstruction using Fourier domain optical normalization
- Light: Science & Applications Vol. 5, Issue 1, (2016)
- Affiliations：
  
  Engineering Physics Division, Physical Measurement Laboratory, National Institute of Standards and Technology, 100 Bureau Dr MS 8212, Gaithersburg, MD 20899-8212, USA
- Author bio：
  
  RM Silver, Email: silver@nist.gov
- Funds：
- DOI：10.1038/lsa.2016.38
  CLC：
- Published：2016-03，
  
  Published Online：05 November 2015，
  
  Received：24 April 2015，
  
  Revised：29 October 2015，
  
  Accepted：04 November 2015
- Accepted：
Scan QR Code
Qin, J. et al. Deep subwavelength nanometric image reconstruction using Fourier domain optical normalization. Light: Science & Applications, 5, e16038 (2016).
DOI：

Qin, J. et al. Deep subwavelength nanometric image reconstruction using Fourier domain optical normalization. Light: Science & Applications, 5, e16038 (2016). DOI： 10.1038/lsa.2016.38.

摘要

Abstract

Quantitative optical measurements of deep subwavelength

three-dimensional (3D)

nanometric structures with sensitivity to sub-nanometer details address a ubiquitous measurement challenge. A Fourier domain normalization approach is used in the Fourier optical imaging code to simulate the full 3D scattered light field of nominally 15 nm-sized structures

accurately replicating the light field as a function of the focus position. Using the full 3D light field

nanometer scale details such as a 2 nm thin conformal oxide and nanometer topography are rigorously fitted for features less than one-thirtieth of the wavelength in size. The densely packed structures are positioned nearly an order of magnitude closer than the conventional Rayleigh resolution limit and can be measured with sub-nanometer parametric uncertainties. This approach enables a practical measurement sensitivity to size variations of only a few atoms in size using a high-throughput optical configuration with broad application in measuring nanometric structures and nanoelectronic devices.

关键词

Keywords

computational microscopylight scatteringmetrologyquantitative nanoscale microscopysub-nanometer uncertainties

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