Plasmonic nano-printing: large-area nanoscale energy deposition for efficient surface texturing

Lei Wang; Qi-Dai Chen; Xiao-Wen Cao; Ričardas Buividas; Xuewen Wang; Saulius Juodkazis; Hong-Bo Sun

doi:10.1038/lsa.2017.112

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Plasmonic nano-printing: large-area nanoscale energy deposition for efficient surface texturing

Original Articles

- Plasmonic nano-printing: large-area nanoscale energy deposition for efficient surface texturing
- Light: Science & Applications Vol. 6, Issue 4, (2017)
- Affiliations：
  
  1.State Key Laboratory on Integrated Optoelectronics, College of Electronic Science and Engineering, Jilin University, 2699 Qianjin Street, Changchun 130012, China
  2.Centre for Micro-Photonics, Faculty of Science, Engineering and Technology, Swinburne University of Technology, Hawthorn, VIC 3122, Australia
  3.Melbourne Centre for Nanofabrication, ANFF, 151 Wellington Road, Clayton, VIC 3168, Australia
- Author bio：
  
  QD Chen, Email: chenqd@jlu.edu.cn
- Funds：
- DOI：10.1038/lsa.2017.112
  CLC：
- Published：2017-12，
  
  Published Online：27 July 2017，
  
  Received：28 December 2016，
  
  Revised：24 July 2017，
  
  Accepted：25 July 2017
- Accepted：
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Wang, L. et al. Plasmonic nano-printing: large-area nanoscale energy deposition for efficient surface texturing. Light: Science & Applications, 6, e17112 (2017).
DOI：

Wang, L. et al. Plasmonic nano-printing: large-area nanoscale energy deposition for efficient surface texturing. Light: Science & Applications, 6, e17112 (2017). DOI： 10.1038/lsa.2017.112.

摘要

Abstract

The lossy nature of plasmonic wave due to absorption is shown to become an advantage for scaling-up a large area surface nanotexturing of transparent dielectrics and semiconductors by a self-organized sub-wavelength energy deposition leading to an ablation pattern—ripples—using this plasmonic nano-printing. Irreversible nanoscale modifications are delivered by surface plasmon polariton (SPP) using: (ⅰ) fast scan and (ⅱ) cylindrical focusing of femtosecond laser pulses for a high patterning throughput. The mechanism of ripple formation on ZnS dielectric is experimentally proven to occur via surface wave at the substrate–plasma interface. The line focusing increase the ordering quality of ripples and facilitates fabrication over wafer-sized areas within a practical time span. Nanoprinting using SPP is expected to open new applications in photo-catalysis

tribology

and solar light harvesting via localized energy deposition rather scattering used in photonic and sensing applications based on re-scattering of SPP modes into far-field modes.

关键词

Keywords

deep-subwavelength structureslaser induced periodic structureslarge-area fabricationplasmonicsubwavelength structures

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