Monolithically integrated stretchable photonics

Lan Li; Hongtao Lin; Shutao Qiao; Yi-Zhong Huang; Jun-Ying Li; Jérôme Michon; Tian Gu; Carlos Alosno-Ramos; Laurent Vivien; Anupama Yadav; Kathleen Richardson; Nanshu Lu; Juejun Hu

doi:10.1038/lsa.2017.138

Go to Nature Website

Your Location：

Home >

Browse articles >

Monolithically integrated stretchable photonics

Original Articles

- Monolithically integrated stretchable photonics
- Light: Science & Applications Vol. 7, Issue 1, (2018)
- Affiliations：
  
  1.Department of Materials Science & Engineering, Massachusetts Institute of Technology, Cambridge, Massachusetts, USA
  2.Department of Aerospace Engineering and Engineering Mechanics, University of Texas at Austin, Austin, Texas, USA
  3.Department of Electronic Engineering, Xiamen University, Xiamen, China
  4.Key Laboratory of Optoelectronic Technology & System, Education Ministry of China, College of Opto-Electronic Engineering, Chongqing University, Chongqing, China
  5.Centre for Nanoscience and Nanotechnology, CNRS, Univ. Paris-Sud, Universite Paris-Saclay, Orsay, C2N—Orsay, France
  6.The College of Optics & Photonics, University of Central Florida, Orlando, Florida, USA
- Author bio：
  
  L Li, Email: lanli1@mit.edu
  J Hu, Email: hujuejun@mit.edu
- Funds：
- DOI：10.1038/lsa.2017.138
  CLC：
- Published：2018，
  
  Published Online：09 February 2018，
  
  Received：15 June 2017，
  
  Revised：06 October 2017，
  
  Accepted：06 October 2017
- Accepted：
Scan QR Code
Li, L. et al. Monolithically integrated stretchable photonics. Light: Science & Applications, 1, 17138 (2018).
DOI：

Li, L. et al. Monolithically integrated stretchable photonics. Light: Science & Applications, 1, 17138 (2018). DOI： 10.1038/lsa.2017.138.

摘要

Abstract

Mechanically stretchable photonics provides a new geometric degree of freedom for photonic system design and foresees applications ranging from artificial skins to soft wearable electronics. Here we describe the design and experimental realization of the first single-mode stretchable photonic devices. These devices

made of chalcogenide glass and epoxy polymer materials

are monolithically integrated on elastomer substrates. To impart mechanical stretching capability to devices built using these intrinsically brittle materials

our design strategy involves local substrate stiffening to minimize shape deformation of critical photonic components

and interconnecting optical waveguides assuming a meandering Euler spiral geometry to mitigate radiative optical loss. Devices fabricated following such design can sustain 41% nominal tensile strain and 3000 stretching cycles without measurable degradation in optical performance. In addition

we present a rigorous analytical model to quantitatively predict stress-optical coupling behavior in waveguide devices of arbitrary geometry without using a single fitting parameter.

关键词

Keywords

chalcogenide glassintegrated photonicsoptical resonatorstrain-optical couplingstretchable photonics

references

Hu JJ, Li L, Lin HT, Zhang P, Zhou WDet al. Flexible integrated photonics: where materials, mechanics and optics meet [Invited].Opt Mater Express2013;3: 1313–1331..

Li L, Lin HT, Michon J, Huang YZ, Li JYet al. A new twist on glass: a brittle material enabling flexible integrated photonics.Int J Appl Glass Sci2017;8: 61–68..

Dangel R, Horst F, Jubin D, Meier N, Weiss Jet al. Development of versatile polymer waveguide flex technology for use in optical interconnects.J Lightwave Technol2013;31: 3915–3926..

Swatowski BW, Amb CM, Breed SK, Deshazer DJ, Weidner WKet al. Flexible, stable, and easily processable optical silicones for low loss polymer waveguides.Proc SPIE2013;8622: 862205..

Li L, Zou Y, Lin HT, Hu JJ, Sun XCet al. A fully-integrated flexible photonic platform for chip-to-chip optical interconnects.J Lightwave Technol2013;31: 4080–4086..

Choi C, Lin L, Liu YJ, Choi J, Wang Let al. Flexible optical waveguide film fabrications and optoelectronic devices integration for fully embedded board-level optical interconnects.J Lightwave Technol2004;22: 2168–2176..

Shibata T, Takahashi A. Flexible opto-electronic circuit board for in-device interconnection.58th Electronic Components and Technology Conference, 27-30 May 2008; Lake Buena Vista, FL, USA. IEEE: New York, NY, USA, 2008, pp261–pp267.

Bosman E, van Steenberge G, van Hoe B, Missinne J, Vanfleteren Jet al. Highly reliable flexible active optical links.IEEE Photonics Technol Lett2010;22: 287–289..

Chen Y, Li H, Li M. Flexible and tunable silicon photonic circuits on plastic substrates.Sci Rep2012;2: 622..

Zhu L, Kapraun J, Ferrara J, Chang-Hasnain CJ. Flexible photonic metastructures for tunable coloration.Optica2015;2: 255–258..

Zou Y, Moreel L, Lin HT, Zhou J, Li Let al. Solution processing and resist-free nanoimprint fabrication of thin film chalcogenide glass devices: inorganic-organic hybrid photonic integration.Adv Opt Mater2014;2: 759–764..

Gao L, Zhang YH, Malyarchuk V, Jia L, Jang KIet al. Epidermal photonic devices for quantitative imaging of temperature and thermal transport characteristics of the skin.Nat Commun2014;5: 4938..

Fan L, Varghese LT, Xuan Y, Wang J, Niu Bet al. Direct fabrication of silicon photonic devices on a flexible platform and its application for strain sensing.Opt Express2012;20: 20564–20575..

Kamali SM, Arbabi A, Arbabi E, Horie Y, Faraon A. Decoupling optical function and geometrical form using conformal flexible dielectric metasurfaces.Nat Commun2016;7: 11618..

Zhou WD, Ma ZQ. Breakthroughs in photonics 2012: breakthroughs in nanomembranes and nanomembrane lasers.IEEE Photonics J2013;5: 0700707..

Li L, Lin HT, Qiao ST, Zou Y, Danto Set al. Integrated flexible chalcogenide glass photonic devices.Nat Photonics2014;8: 643–649..

Zou Y, Zhang DN, Lin HT, Liu L, Moreel Let al. High-performance, high-index-contrast chalcogenide glass photonics on silicon and unconventional non-planar substrates.Adv Opt Mater2014;2: 478–486..

Li L, Zhang P, Wang WM, Lin HT, Zerdoum ABet al. Foldable andcytocompatible sol-gel TiO2photonics.Sci Rep2015;5: 13832..

Arumugam V, Naresh MD, Sanjeevi R. Effect of strain rate on the fracture behaviour of skin.J Biosci1994;19: 307–313..

Missinne J, Kalathimekkad S, van Hoe B, Bosman E, Vanfleteren Jet al. Stretchable optical waveguides.Opt Express2014;22: 4168–4179..

Zhao HC, O'Brien K, Li S, Shepherd RF. Optoelectronically innervated soft prosthetic hand via stretchable optical waveguides.Sci Rob2016;1: eaai7529..

Yu CL, Kim H, de Leon N, Frank IW, Robinson JTet al. Stretchable photonic crystal cavity with wide frequency tunability.Nano Lett2013;13: 248–252..

Gutruf P, Zou CJ, Withayachumnankul W, Bhaskaran M, Sriram Set al. Mechanically tunable dielectric resonator metasurfaces at visible frequencies.ACS Nano2016;10: 133–141..

Ee HS, Agarwal R. Tunable metasurface and flat optical zoom lens on a stretchable substrate.Nano Lett2016;16: 2818–2823..

Chen WQ, Lam RH, Fu JP. Photolithographic surface micromachining of polydimethylsiloxane (PDMS).Lab Chip2012;12: 391–395..

Chou N, Kim Y, Kim S. A method to pattern silver nanowires directly on wafer-scale PDMS substrate and its applications.ACS Appl Mater Interfaces2016;8: 6269–6276..

Tinku S, Collini C, Lorenzelli L, Dahiya RS. Smart contact lens using passive structures.2014 IEEE SENSORS, 2-5 November 2014; Valencia, Spain Valencia, Spain. IEEE: New York, NY, USA, 2014, pp2107–pp2110.

Jung SW, Koo JB, Park CW, Na BS, Oh JYet al. Flexible organic thin-film transistors fabricated on polydimethylsiloxane elastomer substrates.J Nanosci Nanotechnol2015;15: 7513–7517..

Romeo A, Liu QH, Suo ZG, Lacour SP. Elastomeric substrates with embedded stiff platforms for stretchable electronics.Appl Phys Lett2013;102: 131904..

Gray DS, Tien J, Chen CS. High-conductivity elastomeric electronics.Adv Mater2004;16: 393–397..

Kim DH, Lu NS, Ghaffari R, Kim YS, Lee SPet al. Materials for multifunctional balloon catheters with capabilities in cardiac electrophysiological mapping and ablation therapy.Nat Mater2011;10: 316–323..

Verplancke R, Bossuyt F, Cuypers D, Vanfleteren J. Thin-film stretchable electronics technology based on meandering interconnections: fabrication and mechanical performance.J Micromech Microeng2011;22: 015002..

Kim DH, Ghaffari R, Lu NS, Rogers JA. Flexible and stretchable electronics for biointegrated devices.Annu Rev Biomed Eng2012;14: 113–128..

Huang M. Stress effects on the performance of optical waveguides.Int J Solids Struct2003;40: 1615–1632..

Ye WN, Xu DX, Janz S, Cheben P, Picard MJet al. Birefringence control using stress engineering in silicon-on-insulator (SOI) waveguides.J Lightwave Technol2005;23: 1308–1318..

Hu JJ, Tarasov V, Agarwal A, Kimerling L, Carlie Net al. Fabrication and testing of planar chalcogenide waveguide integrated microfluidic sensor.Opt Express2007;15: 2307–2314..

Musgraves J, Carlie N, Hu J, Petit L, Agarwal Aet al. Comparison of the optical, thermal and structural properties of Ge-Sb-S thin films deposited using thermal evaporation and pulsed laser deposition techniques.Acta Mater2011;59: 5032–5039..

Du QY, Huang YZ, Li JY, Kita D, Michon Jet al. Low-loss photonic device in Ge-Sb-S chalcogenide glass.Opt Lett2016;41: 3090–3093..

Carlie NA.A Solution-based Approach to the Fabrication of Novel Chalcogenide Glass Materials and Structures. PhD dissertation, Clemson University, Clemson, USA, 2010.

Gonzalez M, Axisa F, Bulcke MV, Brosteaux D, Vandevelde Bet al. Design of metal interconnects for stretchable electronic circuits.Microelectron Reliab2008;48: 825–832..

Klein S, Barsella A, Leblond H, Bulou H, Fort Aet al. One-step waveguide and optical circuit writing in photopolymerizable materials processed by two-photon absorption.Appl Phys Lett2005;86: 211118..

Cherchi M, Ylinen S, Harjanne M, Kapulainen M, Aalto T. Dramatic size reduction of waveguide bends on a micron-scale silicon photonic platform.Opt Express2013;21: 17814–17823..

Rabiei P, Steier WH, Zhang C, Dalton LR. Polymer micro-ring filters and modulators.J Lightwave Technol2002;20: 1968–1975..

Girault P, Lorrain N, Poffo L, Guendouz M, Lemaitre Jet al. Integrated polymer micro-ring resonators for optical sensing applications.J Appl Phys2015;117: 104504..

Poon JKS, Huang YY, Paloczi GT, Yariv A. Soft lithography replica molding of critically coupled polymer microring resonators.IEEE Photonics Technol Lett2004;16: 2496–2498..

Jin L, Fu X, Yang B, Shi YC, Dai DX. Optical bistability in a high-Qracetrack resonator based on small SU-8 ridge waveguides.Opt Lett2013;38: 2134–2136..

De Brabander GN, Boyd JT, Beheim G. Integrated optical ring resonator with micromechanical diaphragms for pressure sensing.IEEE Photonics Technol Lett1994;6: 671–673..

Westerveld WJ, Leinders SM, Muilwijk PM, Pozo J, van den Dool TCet al. Characterization of integrated optical strain sensors based on silicon waveguides.IEEE J Sel Top Quant Electron2014;20: 5900110..

Bhola B, Song HC, Tazawa H, Steier WH. Polymer microresonator strain sensors.IEEE Photonics Technol Lett2005;17: 867–869..

Tsukiji M, Kowa H, Muraki K, Umeda N, Imoto Ket al. Measurement system for very small photoelastic constant of polymer films.Macromol Symp2006;242: 235–240..

Hossain MF, Chan HP, Uddin MA. Simultaneous measurement of thermo-optic and stress-optic coefficients of polymer thin films using prism coupler technique.Appl Opt2010;49: 403–408..

Views

Downloads

CSCD

Alert me when the article has been cited

Submit

Tools

Publicity Resources

Octave-spanning coherent supercontinuum generation in silicon on insulator from 1.06 μm to beyond 2.4 μm

Related Author

Neetesh Singh

Ming Xin

Diedrik Vermeulen

Katia Shtyrkova

Nanxi Li

Patrick T Callahan

Emir Salih Magden

Alfonso Ruocco

Related Institution

Research Laboratory of Electronics, Massachusetts Institute of Technology

John A. Paulson School of Engineering and Applied Science, Harvard University

College of Nanoscale Science and Engineering, SUNY Polytechnic Institute

Department of Electrical and Computer Engineering, University of California San Diego, La Jolla

Centre for Free Electron Laser Science (CFEL)-DESY and University of Hamburg

⁰