Ultraviolet laser photolysis of hydrocarbons for nondiamond carbon suppression in chemical vapor deposition of diamond films

Li-Sha Fan; Loic Constantin; Da-wei Li; Lei Liu; Kamran Keramatnejad; Clio Azina; Xi Huang; Hossein Rabiee Golgir; Yao Lu; Zahra Ahmadi; Fei Wang; Jeffrey Shield; Bai Cui; Jean-Francois Silvain; Yong-Feng Lu

doi:10.1038/lsa.2017.177

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Ultraviolet laser photolysis of hydrocarbons for nondiamond carbon suppression in chemical vapor deposition of diamond films

Original Articles

- Ultraviolet laser photolysis of hydrocarbons for nondiamond carbon suppression in chemical vapor deposition of diamond films
- Light: Science & Applications Vol. 7, Issue 3, (2018)
- Affiliations：
  
  1.Department of Electrical and Computer Engineering, University of Nebraska-Lincoln, Lincoln, NE 68588, USA
  2.Institut de Chimie de la Matière Condensée de Bordeaux-ICMCB-CNRS 87, Pessac, 33608, France
  3.Department of Mechanical and Materials Engineering, University of Nebraska-Lincoln, Lincoln, NE 68588, USA
- Author bio：
  
  YF Lu, Email: ylu2@unl.edu
- Funds：
- DOI：10.1038/lsa.2017.177
  CLC：
- Published：2018，
  
  Published Online：06 April 2018，
  
  Received：15 November 2017，
  
  Revised：20 December 2017，
  
  Accepted：20 December 2017
- Accepted：
Scan QR Code
Fan, L. S. et al. Ultraviolet laser photolysis of hydrocarbons for nondiamond carbon suppression in chemical vapor deposition of diamond films. Light: Science & Applications, 7, 17177 (2018).
DOI：

Fan, L. S. et al. Ultraviolet laser photolysis of hydrocarbons for nondiamond carbon suppression in chemical vapor deposition of diamond films. Light: Science & Applications, 7, 17177 (2018). DOI： 10.1038/lsa.2017.177.

摘要

Abstract

In this work

we demonstrate that ultraviolet (UV) laser photolysis of hydrocarbon species alters the flame chemistry such that it promotes the diamond growth rate and film quality. Optical emission spectroscopy and laser-induced fluorescence demonstrate that direct UV laser irradiation of a diamond-forming combustion flame produces a large amount of reactive species that play critical roles in diamond growth

thereby leading to enhanced diamond growth. The diamond growth rate is more than doubled

and diamond quality is improved by 4.2%. Investigation of the diamond nucleation process suggests that the diamond nucleation time is significantly shortened and nondiamond carbon accumulation is greatly suppressed with UV laser irradiation of the combustion flame in a laser-parallel-to-substrate geometry. A narrow amorphous carbon transition zone

averaging 4 nm in thickness

is identified at the film–substrate interface area using transmission electron microscopy

confirming the suppression effect of UV laser irradiation on nondiamond carbon formation. The discovery of the advantages of UV photochemistry in diamond growth is of great significance for vastly improving the synthesis of a broad range of technically important materials.

关键词

Keywords

combustion chemical vapor depositiondiamondphotolysisultraviolet laser

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