
1.State Key Laboratory of Functional Materials for Informatics, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, 200050 Shanghai, China
2.The Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, 100049 Beijing, China
3.The Extreme Optoelectromechanics Laboratory (XXL), School of Physics and Electronic Science, East China Normal University, 200241 Shanghai, China
4.State Key Laboratory of High Field Laser Physics and CAS Center for Excellence in Ultra-intense Laser Science, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, 201800 Shanghai, China
Jiaxiang Zhang (jiaxiang.zhang@mail.sim.ac.cn)
Ya Cheng (ya.cheng@siom.ac.cn)
Xin Ou (ouxin@mail.sim.ac.cn)
Published:31 August 2021,
Published Online:05 July 2021,
Received:17 May 2021,
Revised:23 June 2021,
Accepted:24 June 2021
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Wang, C. L. et al. High-Q microresonators on 4H-silicon-carbide-on-insulator platform for nonlinear photonics. Light: Science & Applications, 10, 1474-1484 (2021).
Wang, C. L. et al. High-Q microresonators on 4H-silicon-carbide-on-insulator platform for nonlinear photonics. Light: Science & Applications, 10, 1474-1484 (2021). DOI: 10.1038/s41377-021-00584-9.
The realization of high-quality (Q) resonators regardless of the underpinning material platforms has been a ceaseless pursuit
because the high-Q resonators provide an extreme environment for confining light to enable observations of many nonlinear optical phenomenon with high efficiencies. Here
photonic microresonators with a mean Q factor of 6.75 × 10
6
were demonstrated on a 4H-silicon-carbide-on-insulator (4H-SiCOI) platform
as determined by a statistical analysis of tens of resonances. Using these devices
broadband frequency conversions
including second-
third-
and fourth-harmonic generations have been observed. Cascaded Raman lasing has also been demonstrated in our SiC microresonator for the first time
to the best of our knowledge. Meanwhile
by engineering the dispersion properties of the SiC microresonator
we have achieved broadband Kerr frequency combs covering from 1300 to 1700 nm. Our demonstration represents a significant milestone in the development of SiC photonic integrated devices.
Vahala, K. J. Optical microcavities.Nature424, 839-846 (2003)..
Aoki, T. et al. Observation of strong coupling between one atom and a monolithic microresonator.Nature443, 671-674 (2006)..
Guggenheim, J. A. et al. Ultrasensitive plano-concave optical microresonators for ultrasound sensing.Nat. Photonics11, 714-719 (2017)..
Feng, S. et al. Silicon photonics: from a microresonator perspective.Laser Photonics Rev.6, 145-177 (2012)..
Liu, J. Q. et al. High-yield, wafer-scale fabrication of ultralow-loss, dispersion-engineered silicon nitride photonic circuits.Nat. Commun.12, 2236 (2021)..
Liu, J. Q. et al. Photonic microwave generation in the X- and K-band using integrated soliton microcombs.Nat. Photonics14, 486-491 (2020)..
Shen, B. Q. et al. Integrated turnkey soliton microcombs.Nature582, 365-369 (2020)..
Dietrich, C. P. et al. GaAs integrated quantum photonics: towards compact and multi-functional quantum photonic integrated circuits.Laser Photonics Rev.10, 870-894 (2016)..
Lin, J. T. et al. Advances in on-chip photonic devices based on lithium niobate on insulator.Photonics Res.8, 1910-1936 (2020)..
Jia, Y. C., Wang, L.&Chen, F. Ion-cut lithium niobate on insulator technology: recent advances and perspectives.Appl. Phys. Rev.8, 011307 (2021)..
Zhu, D. et al. Integrated photonics on thin-film lithium niobate.Adv. Opt. Photonics13, 242-352 (2021)..
Wang, S. C. et al. 4H-SiC: a new nonlinear material for midinfrared lasers.Laser Photonics Rev.7, 831-838 (2013)..
Francis, A. M. et al. Towards standard component parts in silicon carbide CMOS. inProc. 2015 IEEE Aerospace Conference. (IEEE, 2015).
Adair, R., Chase, L. L.&Payne, S. A. Nonlinear refractive index of optical crystals.Phys. Rev. B39, 3337-3350 (1989)..
Fan, T. Y. et al. Racetrack microresonator based electro-optic phase shifters on a 3C silicon-carbide-on-insulator platform.Opt. Lett.46, 2135-2138 (2021)..
Koehl, W. F. et al. Room temperature coherent control of defect spin qubits in silicon carbide.Nature479, 84-87 (2011)..
Lukin, D. M. et al. 4H-silicon-carbide-on-insulator for integrated quantum and nonlinear photonics.Nat. Photonics14, 330-334 (2020)..
Lukin, D. M., Guidry, M. A.&Vučković, J. Integrated quantum photonics with silicon carbide: challenges and prospects.PRX Quantum1, 020102 (2020)..
Yamada, S. et al. Silicon carbide-based photonic crystal nanocavities for ultra-broadband operation from infrared to visible wavelengths.Appl. Phys. Lett.99, 201102 (2011)..
Lu, X. Y. et al. Silicon carbide microdisk resonator.Opt. Lett.38, 1304-1306 (2013)..
Lu, X. Y. et al. High Q silicon carbide microdisk resonator.Appl. Phys. Lett.104, 181103 (2014)..
Powell, K. et al. High-Q suspended optical resonators in 3C silicon carbide obtained by thermal annealing.Opt. Express28, 4938-4949 (2020)..
Guidry, M. A. et al. Optical parametric oscillation in silicon carbide nanophotonics.Optica7, 1139-1142 (2020)..
Zheng, Y. et al. High-quality factor, high-confinement microring resonators in 4H-silicon carbide-on-insulator.Opt. Express27, 13053-13060 (2019)..
Song, B. S. et al. Ultrahigh-Q photonic crystal nanocavities based on 4H silicon carbide.Optica6, 991-995 (2019)..
Yi, A. L. et al. Wafer-scale 4H-silicon carbide-on-insulator (4H-SiCOI) platform for nonlinear integrated optical devices.Optical Mater.107, 109990 (2020)..
Fan, T. R. et al. High-quality integrated microdisk resonators in the visible-to-near-infrared wavelength range on a 3C-silicon carbide-on-insulator platform.Opt. Lett.45, 153-156 (2020)..
Wettlin, T. et al. Comparison of PAM formats for 200 Gb/sshort reach transmission systems. inProc. Optical Fiber Communication Conference 2020. (Optical Society of America, 2020).
Wu, R. B. et al. Lithium niobate micro-disk resonators of quality factors above 107.Opt. Lett.43, 4116-4119 (2018)..
Fang, Z. W. et al. Real-time electrical tuning of an optical spring on a monolithically integrated ultrahigh Q lithium nibote microresonator.Opt. Lett.44, 1214-1217 (2019)..
Okawachi, Y. et al. Competition between Raman and Kerr effects in microresonator comb generation.Opt. Lett.42, 2786-2789 (2017)..
Savchenkov, A. A. et al. Enhancement of photorefraction in whispering gallery mode resonators.Phys. Rev. B74, 245119 (2006)..
Sun, X. et al. Nonlinear optical oscillation dynamics in high-Q lithium niobate microresonators.Opt. Express25, 13504-13516 (2017)..
Jiang, H. W. et al. Fast response of photorefraction in lithium niobate microresonators.Opt. Lett.42, 3267-3270 (2017)..
Boyd, R. W.Nonlinear Optics(Academic Press, 1992).
Lin, J. T. et al. Broadband quasi-phase-matched harmonic generation in an on-chip monocrystalline lithium niobate microdisk resonator.Phys. Rev. Lett.122, 173903 (2019)..
Levy, J. S. et al. Harmonic generation in silicon nitride ring resonators.Opt. Express19, 11415-11421 (2011)..
Bi, Z. F. et al. High-efficiency second-harmonic generation in doubly-resonant χ(2) microring resonators.Opt. Express20, 7526-7543 (2012)..
Chikvaidze, G. et al. Investigation of silicon carbide polytypes by Raman spectroscopy.Latvian J. Phys. Tech. Sci.51, 51-57 (2014)..
Rong, H. S. et al. A cascaded silicon Raman laser.Nat. Photonics2, 170-174 (2008)..
Min, B., Kippenberg, T. J.&Vahala, K. J. Compact, fiber-compatible, cascaded Raman laser.Opt. Lett.28, 1507-1509 (2003)..
Del'Haye, P. et al. Optical frequency comb generation from a monolithic microresonator.Nature450, 1214-1217 (2007)..
Fujii, S.&Tanabe, T. Dispersion engineering and measurement of whispering gallery mode microresonator for Kerr frequency comb generation.Nanophotonics9, 1087-1104 (2020)..
Pu, M. H. et al. Efficient frequency comb generation in AlGaAs-on-insulator.Optica3, 823-826 (2016)..
Matsko, A. B. et al. Optical hyperparametric oscillations in a whispering-gallery-mode resonator: threshold and phase diffusion.Phys. Rev. A71, 033804 (2005)..
Min, B., Yang, L.&Vahala, K. Controlled transition between parametric and Raman oscillations in ultrahigh-Q silica toroidal microcavities.Appl. Phys. Lett.87, 181109 (2005)..
Herr, T. et al. Temporal solitons in optical microresonators.Nat. Photonics8, 145-152 (2014)..
Yi, X. et al. Imaging soliton dynamics in optical microcavities.Nat. Commun.9, 3565 (2018)..
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