Nanoscale multi-beam lithography of photonic crystals with ultrafast laser

Jiaqun Li; Jianfeng Yan; Lan Jiang; Jiachen Yu; Heng Guo; Liangti Qu

doi:10.1038/s41377-023-01178-3

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Nanoscale multi-beam lithography of photonic crystals with ultrafast laser

Original Articles

- Nanoscale multi-beam lithography of photonic crystals with ultrafast laser
- Light: Science & Applications Vol. 12, Issue 8, Pages: 1604-1615(2023)
- Affiliations：
  
  1.State Key Laboratory of Tribology in Advanced Equipment, Department of Mechanical Engineering, Tsinghua University, Beijing 100084, China
  2.School of Mechanical Engineering, Beijing Institute of Technology, Beijing 100081, China
  3.Department of Chemistry, Tsinghua University, Beijing 100084, China
- Author bio：
  
  Lan Jiang (jianglan@bit.edu.cn)
- Funds：
- DOI：10.1038/s41377-023-01178-3
  CLC：
- Published：31 August 2023，
  
  Published Online：04 July 2023，
  
  Received：19 December 2022，
  
  Revised：26 April 2023，
  
  Accepted：06 May 2023
- Accepted：
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Li, J. Q. et al. Nanoscale multi-beam lithography of photonic crystals with ultrafast laser. Light: Science & Applications, 12, 1604-1615 (2023).
DOI：

Li, J. Q. et al. Nanoscale multi-beam lithography of photonic crystals with ultrafast laser. Light: Science & Applications, 12, 1604-1615 (2023). DOI： 10.1038/s41377-023-01178-3.

摘要

Abstract

Photonic crystals are utilized in many noteworthy applications like optical communications

light flow control

and quantum optics. Photonic crystal with nanoscale structure is important for the manipulation of light propagation in visible and near-infrared range. Herein

we propose a novel multi beam lithography method to fabricate photonic crystal with nanoscale structure without cracking. Using multi-beam ultrafast laser processing and etching

parallel channels with subwavelength gap are obtained in yttrium aluminum garnet crystal. Combining optical simulation based on Debye diffraction

we experimentally show the gap width of parallel channels can be controlled at nanoscale by changing phase holograms. With the superimposed phase hologram designing

functional structures of complicated channel arrays distribution can be created in crystal. Optical gratings of different periods are fabricated

which can diffract incident light in particular ways. This approach can efficiently manufacture nanostructures with controllable gap

and offer an alternative to the fabrication of complex photonic crystal for integrated photonics applications.

关键词

Keywords

references

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