Precise mode control of laser-written waveguides for broadband, low-dispersion 3D integrated optics

Yuying Wang; Lijing Zhong; Kuen Yao Lau; Xuhu Han; Yi Yang; Jiacheng Hu; Sergei Firstov; Zhi Chen; Zhijun Ma; Limin Tong; Kin Seng Chiang; Dezhi Tan; Jianrong Qiu

doi:10.1038/s41377-024-01473-7

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Precise mode control of laser-written waveguides for broadband, low-dispersion 3D integrated optics

Original Articles

- Precise mode control of laser-written waveguides for broadband, low-dispersion 3D integrated optics
- Light: Science & Applications Vol. 13, Issue 6, Pages: 1186-1195(2024)
- Affiliations：
  
  1.College of Optical Science and Engineering, Zhejiang University, 310027 Hangzhou, China
  2.Institute of Light+X Science and Technology, College of Information Science and Engineering, Ningbo University, 315211 Ningbo, China
  3.School of Optoelectronic Science and Engineering & Collaborative Innovation Center of Suzhou Nano Science and Technology, Soochow University, 215006 Suzhou, China
  4.Prokhorov General Physics Institute of the Russian Academy of Sciences, Dianov Fiber Optics Research Center, 38 Vavilov str., Moscow 119333, Russia
  5.Zhejiang Lab, 311121 Hangzhou, China
  6.College of Materials Science and Engineering, Key Laboratory of Advanced Materials of Yunnan Province, Kunming University of Science and Technology, 650093 Kunming, Yunnan, China
  7.Department of Electrical Engineering, City University of Hong Kong, 83 Tat Chee Avenue, Kowloon, Hong Kong SAR, China
  8.School of Materials Science and Engineering, Zhejiang University, 310027 Hangzhou, China
- Author bio：
  
  Lijing Zhong (zhonglijing@nbu.edu.cn)
  Zhi Chen (zhichen@zhejianglab.edu.cn)
  Zhijun Ma (zhijma@zhejianglab.com)
  Dezhi Tan (wctdz@zju.edu.cn)
  Jianrong Qiu (qjr@zju.edu.cn)
- Funds：
- DOI：10.1038/s41377-024-01473-7
  CLC：
- Received：24 October 2023，
  
  Revised：25 April 2024，
  
  Accepted：2024-05-08，
  
  Published Online：04 June 2024，
  
  Published：30 June 2024
- Accepted：
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Wang, Y. Y. et al. Precise mode control of laser-written waveguides for broadband, low-dispersion 3D integrated optics.,Light: Science & Applications, 13, 1186-1195 (2024).
DOI：

Wang, Y. Y. et al. Precise mode control of laser-written waveguides for broadband, low-dispersion 3D integrated optics.,Light: Science & Applications, 13, 1186-1195 (2024). DOI： 10.1038/s41377-024-01473-7.

摘要

Abstract

Three-dimensional (3D) glass chips are promising waveguide platforms for building hybrid 3D photonic circuits due to their 3D topological capabilities

large transparent windows

and low coupling dispersion. At present

the key challenge in scaling down a benchtop optical system to a glass chip is the lack of precise methods for controlling the mode field and optical coupling of 3D waveguide circuits. Here

we propose an overlap-controlled multi-scan (OCMS) method based on laser-direct lithography that allows customizing the refractive index profile of 3D waveguides with high spatial precision in a variety of glasses. On the basis of this method

we achieve variable mode-field distribution

robust and broadband coupling

and thereby demonstrate dispersionless LP

-mode conversion of supercontinuum pulses with the largest deviation of

0.1 dB in coupling ratios on 210 nm broadband. This approach provides a route to achieve ultra-broadband and low-dispersion coupling in 3D photonic circuits

with overwhelming advantages over conventional planar waveguide-optic platforms for on-chip transmission and manipulation of ultrashort laser pulses and broadband supercontinuum.

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Keywords

references

Saleh, B. E. A. & Teich, M. C. Fundamentals of Photonics 3rd edn (Wiley, 2019).

Wu, Q., Turpin, J. P. & Werner, D. H. Integrated photonic systems based on transformation optics enabled gradient index devices. Light Sci. Appl. 1 , e38 (2012)..

Cheben, P. et al. Subwavelength integrated photonics. Nature 560 , 565–e572 (2018)..

Chen, F., Wang, X. L. & Wang, K. M. Development of ion-implanted optical waveguides in optical materials: a review. Opt. Mater. 29 , 1523–1542 (2007)..

Dong, J. L., Chiang, K. S. & Jin, W. Compact three-dimensional polymer waveguide mode multiplexer. J. Lightwave Technol. 33 , 4580–4588 (2015)..

Davis, K. M. et al. Writing waveguides in glass with a femtosecond laser. Opt. Lett. 21 , 1729–1731 (1996)..

Miura, K. et al. Photowritten optical waveguides i n various glasses with ultrashort pulse laser. Appl. Phys. Lett. 71 , 3329–3331 (1997)..

Lee, T. et al. Low bend loss femtosecond laser written waveguides exploiting integrated microcrack. Sci. Rep. 11 , 23770 (2021)..

Sun, B. S. et al. On-chip beam rotators, adiabatic mode converters, and waveplates through low-loss waveguides with variable cross-sections. Light Sci. Appl. 11 , 214 (2022)..

Schaffer, C. B., García, J. F. & Mazur, E. Bulk heating of transparent materials using a high-repetition-rate femtosecond laser. Appl. Phys. A 76 , 351–354 (2003)..

Eaton, S. M. et al. Heat accumulation effects in femtosecond laser-written waveguides with variable repetition rate. Opt. Express 13 , 4708–4716 (2005)..

Schaffer, C. B., Jamison, A. O. & Mazur, E. Morphology of femtosecond laser-induced structural changes in bulk transparent materials. Appl. Phys. Lett. 84 , 1441–1443 (2004)..

Gattass, R. R. & Mazur, E. Femtosecond laser micromachining in transparent materials. Nat. Photonics 2 , 219– 225 (2008)..

Thiel, M., Flachenecker, G. & Schade, W. Femtosecond laser writing of Bragg grating waveguide bundles in bulk glass. Opt. Lett. 40 , 1266–1269 (2015)..

Wang, Y. Y. et al. Photonic lattice-like waveguides in glass directly written by femtosecond laser for on-chip mode conversion. Chin. Opt. Lett. 20 , 031406 (2022)..

Nasu, Y., Kohtoku, M. & Hibino, Y. Low-loss waveguides written with a femtosecond laser for flexible interconnection in a planar light-wave circuit. Opt. Lett. 30 , 723–725 (2005)..

Tan, D. Z., Zhang, B. & Qiu, J. R. Ultrafast laser direct writing in glass: thermal accumulation engineering and applications. Laser Photonics Rev. 15 , 2000455 (2021)..

Zhong, L. J. et al. Toward 3D integration of highly see-through photonic circuits in glass. Laser Photonics Rev. 17 , 2200767 (2023)..

Sun, K. et al. Three-dimensional direct lithography of stable perovskite nanocrystals in glass. Science 375 , 307–310 (2022)..

Ams, M. et al. Slit beam shaping method for femtosecond laser direct-write fabrication of symmetric waveguides in bulk glasses. Opt. Express 13 , 5676–5681 (2005)..

Lapointe, J. et al. Modified astigmatic beam technique for laser writing. Appl. Opt. 61 , 2+333–2337 (2022)..

Huang, L. et al. Aberration correction for direct laser written waveguides in a transverse geometry. Opt. Express 24 , 10565–10574 (2016)..

Hodgson, N. & Weber, H. Laser Resonators and Beam Propagation: Fundamentals, Advanced Concepts, Applications 2nd edn (Springer, 2005).

Ngcobo, S. et al. A digital laser for on-demand laser modes. Nat. Commun. 4 , 2289 (2013)..

Barwicz, T. & Haus, H. A. Three-dimensional analysis of scattering losses due to sidewall roughness in microphotonic waveguides. J. Lightwave Technol. 23 , 2719–2732 (2005)..

Feit, M. D. & Fleck, J. A. Light propagation in graded-index optical fibers. Appl. Opt. 17 , 3990–3998 (1978)..

Thomson, R. R. et al. in Femtosecond Laser Micromachining: Photonic and Microfluidic Devices in Transparent Materials (eds Osellame, R., Cerullo, G. & Ramponi, R. ) 93–125 (Springer, 2012).

Doerr, C. R. Silicon photonic integration in telecommunications. Front. Phys. 3 , 37 (2015)..

Ling, Q. et al. On-chip optical matrix-vector multiplier based on mode division multiplexing. Chip 2 , 100061 (2023)..

Saitoh, K. et al. PLC-based mode multi/demultiplexers for mode division multiplexing. Opt. Fiber Technol. 35 , 80–92 (2017)..

Wu, Y. F. & Chiang, K. S. Ultra-broadband mode multiplexers based on three-dimensional asymmetric waveguide branches. Opt. Lett. 42 , 407–410 (2017)..

Huang, Q. D. & Chiang, K. S. Polarization-insensitive ultra-broadband mode filter based on a 3D graphene structure buried in an optical waveguide. Optica 7 , 744–745 (2020)..

Huang, Q. D. et al. Mode multiplexer with cascaded vertical asymmetric waveguide directional couplers. J. Lightwave Technol. 36 , 2903–2911 (2018)..

Ocier, C. R. et al. Direct laser writing of volumetric gradient index lenses and waveguides. Light Sci. Appl. 9 , 196 (2020)..

Riesen, N. et al. Femtosecond direct-written integrated mode couplers. Opt. Express 22 , 29855–29861 (2014)..

Corrielli, G. et al. Symmetric polarization-insensitive directional couplers fabricated by femtosecond laser writing. Opt. Express 26 , 15101–15109 (2018)..

Le Camus, A. et al. Direct-laser-written integrated mid-IR directional couplers in a BGG glass. Opt. Express 29 , 8531–8541 (2021)..

Li,Z. Z. et al. Photon propagation control on laser-written photonic chips enabled by composite waveguides. Photonics Res. 11 , 829–838 (2023)..

Gross, S. et al. Three-dimensional ultra-broadband integrated tapered mode multiplexers. Laser Photonics Rev. 8 , L81–L85 (2014)..

Li, Z. Z. et al. Three-dimensional on-chip mode converter. Opt. Lett. 48 , 1140–1143 (2023)..

Wang, J. et al. Tailoring light on three-dimensional photonic chips: a platform for versatile OAM mode optical interconnects. Adv. Photonics 5 , 036004 (2023)..

Li, K. et al. Handling mode and polarization in fiber by fs-laser inscribed (de)multiplexer and silicon switch array. PhotoniX 4 , 14 (2023)..

Gross, S. & Withford, M. J. Ultrafast-laser-inscribed 3D integrated photonics: challenges and emerging applications. Nanophotonics 4 , 332–352 (2015)..

Riesen, N., Love, J. D. & Arkwright, J. W. Few-core spatial-mode multiplexers/demultiplexers based on evanescent coupling. IEEE Photonics Technol. Lett. 25 , 1324–1327 (2013)..

Jiang, S. L. et al. Ultra-low-loss broadband all-fiber mode selective couplers for MIMO-less MDM transmission. J. Lightwave Technol. 38 , 2376–2382 (2020)..

Elshaari, A. W. et al. Hybrid integrated quantum photonic circuits. Nat. Photonics 14 , 285–298 (2020)..

Song, W. G. et al. Dispersionless coupling among optical waveguides by artificial gauge field. Phys. Rev. Lett. 129 , 053901 (2022)..

Yun, H. et al. 2×2 adiabatic 3-dB coupler on silicon-on-insulator rib waveguides. In Proc. SPIE 8919, Photonics North 2013 (SPIE, 2013).

Mrejen, M. et al. Adiabatic elimination-based coupling control in densely packed subwavelength waveguides. Nat. Commun. 6 , 7565 (2015)..

Lu, Z. Q. et al. Broadband silicon photonic directional coupler using asymmetric-waveguide based phase control. Opt. Express 23 , 3795–3808 (2015)..

Chen, S. T. et al. Low-loss and broadband 2×2 silicon thermo-optic Mach–Zehnder switch with bent directional couplers. Opt. Lett. 41 , 836–839 (2016)..

Chen, G. F. R. et al. Broadband silicon-on-insulator directional couplers using a combination of straight and curved waveguide sections. Sci. Rep. 7 , 7246 (2017)..

Halir, R. et al. Colorless directional coupler with dispersion engineered sub-wavelength structure. Opt. Express 20 , 13470–13477 (2012)..

Wang, Y. et al. Compact broadband directional couplers using subwavelength gratings. IEEE Photonics J. 8 , 7101408 (2016)..

Song, W. G. et al. Robust and broadband optical coupling by topological waveguide arrays. Laser Photonics Rev. 14 , 1900193 (2020)..

Li, D. H. et al. Broadband silicon nitride power splitter based on bent directional couplers with low thermal sensitivity. Micromachines 13 , 559 (2022)..

Bhandari, B. et al. Highly efficient broadband silicon nitride polarization beam splitter incorporating serially cascaded asymmetric directional couplers. Opt. Lett. 45 , 5974–5977 (2020)..

Chen, Y. et al. Experimental demonstration of an apodized-imaging chip-fiber grating coupler for Si 3 N 4 waveguides. Opt. Lett. 42 , 3566–3569 (2017)..

Sacher, W. D. et al. Polarization rotator-splitters and controllers in a Si 3 N 4 -on-SOI integrated photonics platform. Opt. Express 22 , 11167–11174 (2014)..

Sun, X., Aitchison, J. S. & Mojahedi, M. Realization of an ultra-compact polarization beam splitter using asymmetric MMI based on silicon nitride/silicon-on-insulator platform. Opt. Express 25 , 8296–8305 (2017)..

Zhang, L. et al. Compact, broadband and low-loss polarization beam splitter on lithium-niobate-on-insulator using a silicon nanowire assisted waveguide. IEEE Photonics J. 12 , 6601906 (2020)..

Chen, B. et al. Two-dimensional grating coupler on an X-cut lithium niobate thin-film. Opt. Express 29 , 1289–1295 (2021)..

Pohl, D. et al. An integrated broadband spectrometer on thin-film lithium niobate. Nat. Photonics 14 , 24–29 (2020)..

Agrawal, G. P. in Nonlinear Science at the Dawn of the 21st Century (eds Christiansen, P. L., Sørensen, M. P. & Scott, A. C. ) 195–211 (Springer, 2000).

Sharma, T. et al. Review of recent progress on silicon nitride-based photonic integrated circuits. IEEE Access 8 , 195 436–195446 (2020)..

Chen, G. Y. et al. Advances in lithium niobate photonics: development status and perspectives. Adv. Photonics 4 , 034003 (2022)..

Lin, Y. D. et al. Monolithically integrated, broadband, high-efficiency silicon nitride-on-silicon waveguide photodetectors in a visible-light integrated photonics platform. Nat. Commun. 13 , 6362 (2022)..

Niffenegger, R. J. et al. Integrated multi-wavelength control of an ion qubit. Nature 586 , 538–542 (2020)..

Mukherjee, S. & Rechtsman, M. C. Observation of unidirectional solitonlike edge states in nonlinear floquet topological insulators. Phys. Rev. X 11 , 041057 (2021)..

Mukherjee, S. & Rechtsman, M. C. Observation of Floquet solitons in a topological bandgap. Science 368 , 856–859 (2020)..

Tian, Z. N. et al. On-chip single-photon chirality encircling exceptional points. Chip 2 , 100066 (2023)..

Arriola, A. et al. Lo w bend loss waveguides enable compact, efficient 3D photonic chips. Opt. Express 21 , 2978–2986 (2013)..

Shah, L. et al. Waveguide writing in fused silica with a femtosecond fiber laser at 522 nm and 1 MHz repetition rate. Opt. Express 13 , 1999–2006 (2005)..

Xiao, Y. et al. Laguerre-Gaussian mode expansion for arbitrary optical fields using a subspace projection method. Opt. Lett. 44 , 1615–1618 (2019)..

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