Using light to image millimeter wave based on stacked meta-MEMS chip

Han Wang; Zhigang Wang; Cheng Gong; Xinyu Li; Tiansheng Cui; Huiqi Jiang; Minghui Deng; Bo Yan; Weiwei Liu

doi:10.1038/s41377-024-01733-6

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Using light to image millimeter wave based on stacked meta-MEMS chip

Original Articles

- Using light to image millimeter wave based on stacked meta-MEMS chip
- Light: Science & Applications Vol. 14, Issue 2, Pages: 521-530(2025)
- Affiliations：
  
  1.Institute of Modern Optics, Nankai University, Tianjin Key Laboratory of Micro-scale Optical Information Science and Technology, Tianjin 300350, China
  2.School of Electronic Science and Engineering, University of Electronic Science and Technology of China, Chengdu 611731, China
- Author bio：
  
  Cheng Gong (gongcheng@nankai.edu.cn)
- Funds：
- DOI：10.1038/s41377-024-01733-6
  CLC：
- Received：29 June 2024，
  
  Revised：08 December 2024，
  
  Accepted：2024-12-24，
  
  Published Online：22 January 2025，
  
  Published：28 February 2025
- Accepted：
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Wang, H. et al. Using light to image millimeter wave based on stacked meta-MEMS chip. Light: Science & Applications, 14, 521-530 (2025).
DOI：

Wang, H. et al. Using light to image millimeter wave based on stacked meta-MEMS chip. Light: Science & Applications, 14, 521-530 (2025). DOI： 10.1038/s41377-024-01733-6.

摘要

Abstract

A stacked metamaterial MEMS (meta-MEMS) chip is proposed

which can perfectly absorb electromagnetic waves

convert them into mechanical energy

drive movement of the optical micro-reflectors array

and detect millimeter waves. It is equivalent to using visible light to image a millimeter wave. The meta-MEMS adopts the design of upper and lower chip separation and then stacking to achieve the “dielectric-resonant-air-ground” structure

reduce the thickness of the metamaterial and MEMS structures

and improve the performance of millimeter wave imaging. For verification

we designed and prepared a 94 GHz meta-MEMS focal plane array chip

in which the sum of the thickness of the metamaterial and MEMS structures is only 1/2500 wavelength

the pixel size is less than 1/3 wavelength

but the absorption rate is as high as 99.8%. Moreover

a light readout module was constructed to test the millimeter wave imaging performance. The results show that the response speed can reach 144 Hz and the lens-less imaging resolution is 1.5 mm.

关键词

Keywords

references

Meng, Y. et al. Passive millimeter wave imaging system based on helical scanning. Sci. Rep. 8 , 7852 (2018)..

Laviada, J. et al. Multiview three-dimensional reconstruction by millimetre-wave portable camera. Sci. Rep. 7 , 6479 (2017)..

Pang, L. et al. Real-time concealed object detection from passive millimeter wave images based on the YOLOv3 algorithm. Sensors 20 , 1678 (2020)..

Pham, T. H., Kim, K. H. & Hong, I. P. A study on millimeter wave SAR imaging for non-destructive testing of rebar in reinforced concrete. Sensors 22 , 8030 (2022)..

Wang, X. Y. et al. Research on penetration loss of D-band millimeter wave for typical materials. Sensors 22 , 7666 (2022)..

Meng, Y. et al. MMW holographic imaging for security check. Proceedings of the IEEE Asia-Pacific Microwave Conference . Singapore: IEEE, 2019, 569-571.

Guo, L. & Qin, S. Y. High-performance detection of concealed forbidden objects on human body with deep neural networks based on passive millimeter wave and visible imagery. J. Infrared Millim. Terahertz Waves 40 , 314–347 (2019)..

Cheng, Y. Y. et al. Physically based object contour edge display using adjustable linear polarization ratio for passive millimeter-wave security imaging. IEEE Trans. Geosci. Remote Sens. 59 , 3177–3191 (2021)..

Onojima, S.,Arima, Y. & Hirose, A. Millimeter-wave security imaging using complex-valued self-organizing map for visualization of moving targets. Neurocomputing 134 , 247–253 (2014)..

Shuvo, R. T. & Arefin, A. S. M. S. Simulation based non-invasive detection of skin cancer (basal cell carcinoma) using millimeter-wave reflectometry. In Proc. IEEE Region 10 Symposium 1644–1647 (IEEE, 2020).

Mirbeik-Sabzevari, A. & Tavassolian, N. Tumor detection using millimeter-wave technology: differentiating between benign lesions and cancer tissues. IEEE Microw. Mag. 20 , 30–43 (2019)..

Di Meo, S. et al. Combining millimeter-wave imaging, ultrasound and elastography in a new multimodal approach for breast cancer detection: initial experimental results. In Proc. 42nd Annual International Conference of the IEEE Engineering in Medicine & Biology Society 1807–1810 (IEEE, 2020)..

Iliopoulos, I. et al. Enhancement of penetration of millimeter waves by field focusing applied to breast cancer detection. IEEE Trans. Biomed. Eng. 68 , 959–966 (2021)..

Blackhurst, E. & Salmon, N. Full polarimetric radar for concealed weapons detection: e xperimental determination and simulation of the Huynen target parameters for the human torso. In Proc. SPIE 11164, Millimetre Wave and Terahertz Sensors and Technology XII 111640D (SPIE, 2019).

Weatherall, J. C. et al. Suitability of explosive simulants for millimeter-wave imaging detection systems. In Proc. SPIE 10994, Passive and Active Millimeter-Wave Imaging XXII 109940G (SPIE, 2019).

Briqech, Z. et al. 57-64 GHz imaging/detection sensor–Part I: system setup and experimental evaluations. IEEE Sens. J. 20 , 10824–10832 (2020)..

Elboushi, A. & Sebak, A. MMW sensor for hidden targets detection and warning based on reflection/scattering approach. IEEE Trans. Antennas Propag. 62 , 4890–4894 (2014)..

Chen, Z. M. et al. A BiCMOS W-band 2×2 focal-plane array with on-chip antenna. IEEE J. Solid State Circuits 47 , 2355–2371 (2012)..

Caster, F.et al. Design and analysis of a W-band 9-element imaging array receiver using spatial-overlapping super-pixels in silicon. IEEE J. Solid State Circuits 49 , 1317–1332 (2014)..

Shang, Y. et al. High-se nsitivity CMOS super-regenerative receiver with quench-controlled high- Q metamaterial resonator for millimeter-wave imaging at 96 and 135 GHz. IEEE Trans. Microw. Theory Tech. 62 , 3095–3106 (2014)..

Fan, K. B., Stenger, V. & Padilla, W. J. Pyroelectric metamaterial millimeter-wave detector. Appl. Phys. Lett. 121 , 021701 (2022)..

Zhao, M. R.et al. Metamaterial Iris-based cavity antenna for mm-wave computational polarimetric imaging. IEEE Antennas Wireless Propagation Lett. https://doi.org/10.1109/LAWP.2024.3373041 https://doi.org/10.1109/LAWP.2024.3373041 (2024)..

Smith, D. R. et al. Composite medium with simultaneously negative permeability and permittivity. Phys. Rev. Lett. 84 , 4184–4187 (2000)..

Shelby, R. A., Smith, D. R. & Schultz, S. Experimental verification of a negative index of refraction. Science 292 , 77–79 (2001)..

Chen, H. T. et al. Active terahertz metamaterial devices. Nature 444 , 597–600 (2006)..

Schurig, D. et al. Metamaterial elect romagnetic cloak at microwave frequencies. Science 314 , 977–980 (2006)..

Landy, N. I. et al. Perfect metamaterial absorber. Phys. Rev. Lett. 100 , 207402 (2008)..

Chen, W. T. et al. A broadband achromatic metalens for focusing and imaging in the visible. Nat. Nanotechnol. 13 , 220–226 (2018)..

Han, Z. L., Fujita, H. & Toshiyoshi, H. Electrostatically tunable MEMS THz metamaterials based on DC/RF decoupled split-ring resonator arrays. In Proc. International Conference on Optical MEMS and Nanophotonics 27–28 (IEEE, 2012).

Xu, J. K. et al. Nanometer-scale heterogeneous interfacial sapphire wafer bonding for enabling plasmonic-enhanced nanofluidic mid-infrared spectroscopy. ACS Nano 14 , 12159–12172 (2020)..

Meng, C. et al. Dynamic piezoelectricMEMS-based optical metasurfaces. Sci. Adv. 7 , eabg5639 (2021)..

Demir, K. & Unlu, M. Miniature MEMS: novel key components toward terahertz reconfigurability. J. Microelectromech. Syst. 29 , 455–467 (2020)..

Ren, Z. H. et al. Leveraging of MEMS technologies for optical metamaterials applications. Adv. Opt. Mater. 8 , 1900653 (2020)..

Lin, Y. S. & Xu, Z. F. Reconfigurable metamaterials for optoelectronic applications. Int. J. Optomechatronics 14 , 78–93 (2020)..

Pitchappa, P. et al. Terahertz MEMS metadevices. J. Micromech. Microeng. 31 , 113001 (2021)..

Liu, X. M. et al. Progress of optomechanical micro/nano sensors: a review. Int. J. Optomechatronics 15 , 120–159 (2021)..

Yang, F. Y., Pitchappa, P. & Wang, N. Terahertz reconfigurable intelligent surfaces (RISs) for 6G communication links. Micromachines 13 , 285 (2022)..

Xu, C. et al. Reconfigurable terahertz metamaterials: from fundamental principles to advanced 6G applications. iScience 25 , 103799 (2022)..

Quack, N. et al. Integrated silicon photonic MEMS. Microsyst. Nanoeng. 9 , 27 (2023)..

Tao, H. et al. Microwave and terahertz wave sensing with metamaterials. Opt. Express 19 , 21620–21626 (2011)..

Alves, F. et al. Bi-material terahertz sensors using metamaterial structures. Opt. Express 21 , 13256–13271 (2013)..

Bilgin, H. et al. A MEMS-based terahertz detector with metamaterial-based absorber and optical interferometric readout. Sens. Actuators A Phys. 244 , 292–298 (2016)..

Wen, Y. Z. et al. Photomechanical meta-molecule array for real-time terahertz imaging. Microsyst. Nanoengineering 3 , 17071 (2017)..

Alves, F. et al. MEMS terahertz-to-infrared band converter using frequency selective planar metamaterial. Sci. Rep. 8 , 12466 (2018)..

Zhu, H. L. et al. A terahertz optomechanical detector based on metasurface and Bi-material micro-cantilevers. Micromachines 13 , 805 (2022)..

Li, Z. G. et al. Design and fabrication of substrate-free Au/SiN x /Au metafilm for THz sensing appli cation. IEEE Photonics J. 14 , 4636206 (2022)..

Ozpinar, H. & Aksimsek, S. Fractal interwoven resonator based penta-band metamaterial absorbers for THz sensing and imaging. Sci. Rep. 12 , 19758 (2022)..

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