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1.School of Electrical Engineering, Korea Advanced Institute of Science and Technology, Daejeon 34141, Republic of Korea
2.Department of Mechanical Engineering, University of California, Berkeley, Berkeley, CA 94720, USA
3.Strategic Technology Research Institute, Korea Research Institute of Standards and Science, Daejeon 34113, Republic of Korea
4.Department of Physics, Kyung Hee University, Seoul 02447, Republic of Korea
Min Seok Jang (jang.minseok@kaist.ac.kr)
Received:15 October 2024,
Revised:2025-07-15,
Accepted:18 July 2025,
Published Online:27 August 2025,
Published:31 October 2025
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Han, S. J. et al. Single-gate electro-optic beam switching metasurfaces. Light: Science & Applications, 14, 3120-3130 (2025).
Han, S. J. et al. Single-gate electro-optic beam switching metasurfaces. Light: Science & Applications, 14, 3120-3130 (2025). DOI: 10.1038/s41377-025-01967-y.
Electro-optic active metasurfaces have attracted attention due to their ability to electronically control optical wavefronts with unprecedented spatiotemporal resolutions. In most studies
such devices require gate arrays composed of a large number of independently-controllable local gate electrodes that address the local scattering response of individual metaatoms. Although this approach in principle enables arbitrary wavefront control
the complicated driving mechanism and low optical efficiency have been hindering its practical applications. In this work
we demonstrate an active beam switching device that provides highly directional beam profiles and significant and uniform optical efficiencies across diffraction orders separated by a large deflection angle. The device operates with only a single-gate bias applied to monolayer graphene
modulating its optical conductivity to control the optical efficiency of the device. The key performance metrics
the absolute and the relative efficiency
which are defined as the scattered power toward a certain angle
θ
normalized by the incident power and the net scattered
power from the metasurface
respectively
are maximized by a genetic algorithm. Experimentally
the metasurface achieves 57° of active beam switching from the 0th to the −1st order diffraction
with absolute efficiencies of 0.084 and 0.078 and relative efficiencies of 0.765 and 0.836
respectively. Furthermore
an analytical framework using nonlocal quasinormal mode expansion provides deeper insight into the operating mechanism of active beam switching. Finally
we discuss the performance limitations of this design platform and provide insights into potential improvements.
Berini, P. Optical beam steering using tunable metasurfaces. ACS Photonics 9 , 2204–2218 (2022)..
Aksyuk, V. A. et al. Beam-steering micromirrors for large optical cross-connects. J. Light. Technol. 21 , 634–642 (2003)..
Jung, C., Lee, E. & Rho, J. The rise of electrically tunable metasurfaces. Sci. Adv. 10 , eado8964 (2024)..
Kuznetsov, A. I. et al. Roadmap for optical metasurfaces. ACS Photonics 11 , 816–865 (2024)..
Kamali, S. M. et al. A review of dielectric optical metasurfaces for wavefront control. Nanophotonics 7 , 1041–1068 (2018)..
Han, S. et al. Complete complex amplitude modulation with electronically tunable graphene plasmonic metamolecules. ACS Nano 14 , 1166–1175 (2020)..
Shirmanesh, G. K. et al. Electro-optically tunable multifunctional metasurfaces. ACS Nano 14 , 6912–6920 (2020)..
Khorasaninejad, M. et al. Metalenses at visible wavelengths: diffraction-limited focusing and subwavelength resolution imaging. Science 352 , 1190–1194 (2016)..
Li, B., Lin, Q. & Li, M. Frequency–angular resolving LiDAR using chip-scale acousto-optic beam steering. Nature 620 , 316–322 (2023)..
Meng, C. et al. Dynamic piezoelectric MEMS-based optical metasurfaces. Sci. Adv. 7 , eabg5639 (2021)..
Holsteen, A. L., Cihan, A. F. & Brongersma, M. L. Temporal color mixing and dynamic beam shaping with silicon metasurfaces. Science 365 , 257–260 (2019)..
Wang, Y. et al. 2D broadband beamsteering with large-scale MEMS optical phased array. Optica 6 , 557–562 (2019)..
Zhuang, X. et al. Active terahertz beam steering based on mechanical deformation of liquid crystal elastomer metasurface. Light Sci. Appl. 12 , 14 (2023)..
Zhang, L. et al. Highly tunable cascaded metasurfaces for continuous two-dimensional beam steering. Adv. Sci. 10 , 2300542 (2023)..
Moitra, P. et al. Programmable wavefront control in the visible spectrum using low-loss chalcogenide phase-change metasurfaces. Adv. Mater. 35 , 2205367 (2023)..
Nemati, A. et al. Controllable polarization-insensitive and large-angle beam switching with phase-change metasurfaces. Adv. Opt. Mater. 10 , 2101847 (2022)..
Zhang, Y. et al. Electrically reconfigurable non-volatile metasurface using low-loss optical phase-change material. Nat. Nanotechnol. 16 , 661–666 (2021)..
de Galarreta, C. R. et al. Nonvolatile reconfigurable phase-change metadevices for beam steering in the near infrared. Adv. Funct. Mater. 28 , 1704993 (2018)..
Komar, A. et al. Dynamic beam switching by liquid crystal tunable dielectric metasurfaces. ACS Photonics 5 , 1742–1748 (2018)..
Moitra, P. et al. Electrically tunable reflective metasurfaces with continuous and full-phase modulation for high-efficiency wavefront control at visible frequencies. ACS Nano 17 , 16952–16959 (2023)..
Li, S. Q. et al. Phase-only transmissive spatial light modulator based on tunable dielectric metasurface. Science 364 , 1087–1090 (2019)..
Park, J. et al. All-solid-state spatial light modulator with independent phase and amplitude control for three-dimensional LiDAR applications. Nat. Nanotechnol. 16 , 69–76 (2021)..
Thureja, P. et al. Array-level inverse design of beam steering active metasurfaces. ACS Nano 14 , 15042–15055 (2020)..
Karst, J. et al. Electrically switchable metallic polymer nanoantennas. Science 374 , 612–616 (2021)..
Li, M. et al. Excitonic beam steering in an active van der Waals metasurface. Nano Lett. 23 , 2771–2777 (2023)..
Yang, J. et al. Active optical metasurfaces: comprehensive review on physics, mechanisms, and prospective applications. Rep. Prog. Phys. 85 , 036101 (2022)..
Lin, S., Chen, Y. & Wong, Z. J. High-performance optical beam steering with nanophotonics. Nanophotonics 11 , 2617–2638 (2022)..
Jang, M. S. et al. Tunable large resonant absorption in a midinfrared graphene Salisbury screen. Phys. Rev. B 90 , 165409 (2014)..
Kim, S. et al. Electronically tunable extraordinary optical transmission in graphene plasmonic ribbons coupled to subwavelength metallic slit arrays. Nat. Commun. 7 , 12323 (2016)..
Kim, S. et al. Electronically tunable perfect absorption in graphene. Nano Lett. 18 , 971–979 (2018)..
Kim, J. Y. et al. Full 2π tunable phase modulation using avoided crossing of resonances. Nat. Commun. 13 , 2103 (2022)..
Chung, H. & Miller, O. D. High-NA achromatic metalenses by inverse design. Opt. Express 28 , 6945–6965 (2020)..
Siegel, J. et al. Electrostatic steering of thermal emission with active metasurface control of delocalized modes. Nat. Commun. 15 , 3376 (2024)..
Wang, H. et al. Normally-off fully recess-gated GaN metal–insulator–semiconductor field-effect transistor using Al 2 O 3 /Si 3 N 4 bilayer as gate dielectrics. Appl. Phys. Express 10 , 106502 (2017)..
Hui, Y. Y. et al. n- and p-Type modulation of ZnO nanomesh coated graphene field effect transistors. Nanoscale 4 , 3118–3122 (2012)..
Falkovsky, L. A. & Varlamov, A. A. Space-time dispersion of graphene conductivity. Eur. Phys. J. B 56 , 281–284 (2007)..
Mitchell, M. An Introduction to Genetic Algorithms (MIT Press, 1998).
Holland, J. H. Genetic algorithms. Sci. Am. 267 , 66–72 (1992)..
Zhang, J. et al. Genetic algorithms to automate the design of metasurfaces for absorption bandwidth broadening. ACS Appl. Mater. Interfaces 13 , 7792–7800 (2021)..
Jafar-Zanjani, S., Inampudi, S. & Mosallaei, H. Adaptive genetic algorithm for optical metasurfaces design. Sci. Rep. 8 , 11040 (2018)..
Park, J. et al. Free-form optimization of nanophotonic devices: from classical methods to deep learning. Nanophotonics 11 , 1809–1845 (2022)..
Park, J. et al. Ultimate light trapping in a free-form plasmonic waveguide. Phys. Rev. Appl. 12 , 024030 (2019)..
Hugonin, J. P. & Lalanne, P. RETICOLO software for grating analysis. Preprint at https://arxiv.org/abs/2101.00901 https://arxiv.org/abs/2101.00901 (2021).
Lalanne, P. & Morris, G. M. Highly improved conver gence of the coupled-wave method for TM polarization. J. Opt. Soc. Am. A 13 , 779–784 (1996)..
Moharam, M. G. & Gaylord, T. K. Rigorous coupled-wave analysis of planar-grating diffraction. J. Opt. Soc. Am. 71 , 811–818 (1981)..
Ju, L. et al. Graphene plasmonics for tunable terahertz metamaterials. Nat. Nanotechnol. 6 , 630–634 (2011)..
Meade, R. D., Johnson, S. G. & Winn, J. N. Photonic Crystals: Molding the Flow of Light 2nd edn (Princeton University Press, 2008).
Li, H. et al. Impact of oxygen plasma treatment on carrier transport and molecular adsorption in graphene. Nanoscale 11 , 11145–11151 (2019)..
Kim, S. et al. Realization of a high mobility dual-gated graphene field-effect transistor with Al 2 O 3 dielectric. Appl. Phys. Lett. 94 , 062107 (2009)..
Yu, N. et al. Light propagation with phase discontinuities: generalized laws of reflection and refraction. Science 334 , 333–337 (2011)..
Ching, E. S. C. et al. Quasinormal-mode expansion for waves in open systems. Rev. Mod. Phys. 70 , 1545–1554 (1998)..
Zschiedrich, L. et al. Riesz-projection-based theory of light-matter interaction in dispersive nanoresonators. Phys. Rev. A 98 , 043806 (2018)..
Binkowski, F. et al. Poles and zeros in non-Hermitian systems: Application to photonics. Phys. Rev. B 109 , 045414 (2024)..
Binkowski, F. et al. Modal analysis for nanoplasmonics with nonlocal material properties. Phys. Rev. B 100 , 155406 (2019)..
Betz, F., Binkowski, F. & Burger, S. RPExpand: software for Riesz projection expansion of resonance phenomena. SoftwareX 15 , 100763 (2021)..
Manfrinato, V. R. et al. Resolution limits of electron-beam lithography toward the atomic scale. Nano Lett. 13 , 1555–1558 (2013)..
Chen, Y. et al. Sub-10 nm fabrication: methods and applications. Int. J. Extrem. Manuf. 3 , 032002 (2021)..
Banszerus, L. et al. Ultrahigh-mobility graphene devices from chemical vapor deposition on reusable copper. Sci. Adv. 1 , e1500222 (2015)..
Chen, C. F. et al. Controlling inelastic light scattering quantum pathways in graphene. Nature 471 , 617–620 (2011)..
Kakenov, N. et al. Observation of gate-tunable coherent perfect absorption of terahertz radiation in graphene. ACS Photonics 3 , 1531–1535 (2016)..
Robertson, J. High dielectric constant oxides. Eur. Phys. J. Appl. Phys. 28 , 265–291 (2004)..
Sire, C. et al. Statistics of electrical breakdown field in HfO2 and SiO 2 films from millimeter to nanometer length scales. Appl. Phys. Lett. 91 , 242905 (2007)..
Zeng, B. et al. Hybrid graphene metasurfaces for high-speed mid-infrared light modulation and single-pixel imaging. Light Sci. Appl. 7 , 51 (2018)..
Basu, S., Lee, B. J. & Zhang, Z. M. Infrared radiative properties of heavily doped silicon at room te mperature. J. Heat. Transf. 132 , 023301 (2010)..
Corrigan, P. et al. Quantum cascade lasers and the Kruse model in free space optical communication. Opt. Express 17 , 4355–4359 (2009)..
Liu, V. & Fan, S. S4: a free electromagnetic solver for layered periodic structures. Comput. Phys. Commun. 183 , 2233–2244 (2012)..
Rakić, A. D. et al. Optical properties of metallic films for vertical-cavity optoelectronic devices. Appl. Opt. 37 , 5271–5283 (1998)..
Kischkat, J. et al. Mid-infrared optical properties of thin films of aluminum oxide, titanium dioxide, silicon dioxide, aluminum nitride, and silicon nitride. Appl. Opt. 51 , 6789–6798 (2012)..
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