Photolithographic fabrication of high-resolution Micro-QLEDs towards color-conversion microdisplay

Yuyu Jing; Mingyu Yao; Min Yang; Menglin Li; He Ding; Gaoling Yang; Rongjian Zhang; Dengbao Han; Huan Liu; Haizheng Zhong

doi:10.1038/s41377-025-02000-y

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Photolithographic fabrication of high-resolution Micro-QLEDs towards color-conversion microdisplay

Original Articles

- Photolithographic fabrication of high-resolution Micro-QLEDs towards color-conversion microdisplay
- Light: Science & Applications Vol. 14, Issue 12, Pages: 3990-3997(2025)
- Affiliations：
  
  1.MIIT Key Laboratory for Low-Dimensional Quantum Structure and Devices, School of Materials Science and Engineering, Beijing Institute of Technology, Beijing 100081, China
  2.Beijing Engineering Research Center of Mixed Reality and Advanced Display, School of Optics and Photonics, Beijing Institute of Technology, Beijing 100081, China
  3.Hefei Innovation Research Institute of Beihang University, Hefei 230012, China
  4.Key Laboratory of Bio-Inspired Smart Interfacial Science and Technology of the Ministry of Education, School of Chemistry, Beihang University, Beijing 100191, China
- Author bio：
  
  Haizheng Zhong (hzzhong@bit.edu.cn)
- Funds：
- DOI：10.1038/s41377-025-02000-y
  CLC：
- Received：27 March 2025，
  
  Revised：2025-07-10，
  
  Accepted：02 August 2025，
  
  Published Online：20 October 2025，
  
  Published：31 December 2025
- Accepted：
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Jing, Y. et al. Photolithographic fabrication of high-resolution Micro-QLEDs towards color-conversion microdisplay. Light: Science & Applications, 14, 3990-3997 (2025).
DOI：

Jing, Y. et al. Photolithographic fabrication of high-resolution Micro-QLEDs towards color-conversion microdisplay. Light: Science & Applications, 14, 3990-3997 (2025). DOI： 10.1038/s41377-025-02000-y.

摘要

Abstract

Microdisplay panels are critical components for

metaverse technology. Aiming to achieve high-resolution and full-color microdisplay

we report the photolithographic fabrication of color-converted Micro-quantum dot light emitting diodes (QLED) panel by combining blue Micro-QLED electroluminescence (EL) device and red-green quantum dot color converter (QDCC). Pre-patterned templates were firstly photolithographically fabricated and then applied as substrate to fabricate patterned blue Micro-QLED device

achieving an ultra-high pixel resolution up to 6350 pixels per inch (pixel size ranging from 20 μm × 20 μm to 2 μm × 2 μm). Notably

the patterned blue devices achieve a peak external quantum efficiency (EQE) of 7.8% and a maximum brightness of 39

472 cd m

−2

. The patterned red devices achieve a peak EQE of 18% and a maximum brightness of 103

022 cd m

−2

. By integrating a dual-color red and green QDCC arrays on the top of the blue Micro-QLED

a prototype full-color Micro-QLED panel was fabricated

achieving a resolution up to 1184 pixels per inch with a peak EQE 4.8%

and a maximum brightness of 10 065 cd m

−2

. The photolithographic fabrication of color-converted Micro-QLED provides an easy-operated method for achieving cost-effective microdisplay panels.

关键词

Keywords

references

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