Graphene-integrated microtube whispering-gallery mode resonators for polarization-sensitive optical modulation and photodetection

Tianjun Cai; Ziyu Zhang; Binmin Wu; Jiayang You; Zhi Zheng; Yunqi Wang; Changlu Bian; Yang Wang; Yuan Tian; Yuhang Chi; Qingyu Xiao; Mingze Ma; Li Chen; Junhan Liu; Xiang-zhong Chen; Enming Song; Jizhai Cui; Gaoshan Huang; Yongfeng Mei

doi:10.1038/s41377-025-02097-1

Your Location：

Home >

Browse articles >

Graphene-integrated microtube whispering-gallery mode resonators for polarization-sensitive optical modulation and photodetection

Original Articles

- Graphene-integrated microtube whispering-gallery mode resonators for polarization-sensitive optical modulation and photodetection
- Light: Science & Applications Vol. 15, Issue 5, Pages: 1489-1501(2026)
- Affiliations：
  
  1.International Institute for Intelligent Nanorobots and Nanosystems & State Key Laboratory of Surface Physics, College of Intelligent Robotics and Advanced Manufacturing, Fudan University, Shanghai, China
  2.Yiwu Research Institute of Fudan University, Yiwu, Zhejiang, China
  3.State Key Laboratory of Infrared Physics, Shanghai Institute of Technical Physics, Chinese Academy of Sciences, Shanghai, China
  4.Shanghai Frontiers Science Research Base of Intelligent Optoelectronics and Perception, Institute of Optoelectronics, Fudan University, Shanghai, China
- Author bio：
  
  Binmin Wu (wubinmin@mail.sitp.ac.cn)
  Yongfeng Mei (yfm@fudan.edu.cn)
- Funds：
- DOI：10.1038/s41377-025-02097-1
  CLC：
- Received：24 April 2025，
  
  Revised：2025-10-08，
  
  Accepted：13 October 2025，
  
  Online First：28 February 2026，
  
  Published：31 May 2026
- Accepted：
Scan QR Code
Cai, T. J. et al. Graphene-integrated microtube whispering-gallery mode resonators for polarization-sensitive optical modulation and photodetection. Light: Science & Applications, 15, 1489-1501 (2026).
DOI：

Cai, T. J. et al. Graphene-integrated microtube whispering-gallery mode resonators for polarization-sensitive optical modulation and photodetection. Light: Science & Applications, 15, 1489-1501 (2026). DOI： 10.1038/s41377-025-02097-1.

摘要

Abstract

The monolithic photonic-electronic integration is crucial for high-bandwidth optical communication and computing

while existing structures struggle to reconcile compact footprints with performance preservation. Here

graphene-integrated silicon nitride microtube whispering-gallery mode resonators

fabricated via wafer-level nanomembrane self-rolling process

are demonstrated for polarization optical modulation and photodetection in photonic-electronic synergy. The engineered lobe-shaped architecture in the microtube facilitates axial mode quantization

greatly enhancing the optical mode confinement and improving the quality factor. A balanced trade-off between photodetection efficiency and optical resonance is achieved by adjusting the coupling between graphene and microtube resonance

d graphene-integrated microtube resonators with lobe structure demonstrate an efficient optical resonance (

$$ Q $$

= 2008.36) and high photoresponsivity (2.80 A W

−1

). Furthermore

fourfold rotational symmetry breaking in microtubes presents a workable structural paradigm for the polarization-sensitive optical modulation and photodetection

overall characteristics presents a promising platform for optical manipulation and multidimensional detection of integrated photonic and optoelectronic systems.

关键词

Keywords

references

Coldren, L. A., Corzine, S. W.&Mašanović, M. L. Diode Lasers and Photonic Integrated Circuits. (Hoboken: John Wiley&Sons Inc., 2012).

Ning, S. P. et al. Photonic-electronic integrated circuits for high-performance computing and ai accelerators. J. Lightwave Technol. 42 , 7834–7859 (2024)..

Sun, C. et al. Single-chip microprocessor that communicates directly using light. Nature 528 , 534–538 (2015)..

Atabaki, A. H. et al. Integrating photonics with silicon nanoelectronics for the next generation of systems on a chip. Nature 556 , 349–354 (2018)..

Haffner, C. et al. Low-loss plasmon-assisted electro-optic modulator. Nature 556 , 483–486 (2018)..

Wang, D. et al. Enhancing the graphene photocurrent using surface plasmons and a p-n junction. Light Sci. Appl. 9 , 126 (2020)..

Gao, Y. et al. Graphene-on-silicon nitride waveguide photodetector with interdigital contacts. Appl. Phys. Lett. 112 , 211107 (2018)..

Guo, J. S. et al. High-performance silicon-graphene hybrid plasmonic waveguide photodetectors beyond 1.55 μm. Light Sci. Appl. 9 , 29 (2020)..

Schuler, S. et al. High-responsivity graphene photodetectors integrated on silicon microring resonators. Nat. Commun. 12 , 3733 (2021)..

Wu, J. H. et al. Dual-function optical modulation and detection in microring resonators integrated graphene/MoTe 2 heterojunction. Appl. Phys. Rev. 11 , 021426 (2024)..

Zhang, Q. et al. High-responsivity MoS 2 hot-electron telecom-band photodetector integrated with microring resonator. Appl. Phys. Lett. 120 , 261111 (2022)..

Zhang, Y. N. et al. Design and optimization of four-wave mixing in microring resonators integrated with 2D graphene oxide films. J. Lightwave Technol. 39 , 6553–6562 (2021)..

Liu, D. J. et al. Silicon photonic filters. Microw. Optical Technol. Lett. 63 , 2252–2268 (2021)..

Chang, K. L. et al. Graphene-integrated waveguides: properties, preparation, and applications. Nano Res. 15 , 9704–9726 (2022)..

Kavokin, A. V. et al. Microcavities. 2nd edn. (Oxford: Oxford University Press, 2017).

Bai, B. W. et al. Microcomb-based integrated photonic process ing unit. Nat. Commun. 14 , 66 (2023)..

Lu, J. J. et al. Ultralow-threshold thin-film lithium niobate optical parametric oscillator. Optica 8 , 539–544 (2021)..

Gao, H. W. et al. 3D printed on-chip microtoroid resonators and nested spiral photonic devices. Photonics Res. 9 , 1803–1810 (2021)..

Jiang, X. F. et al. Chaos-assisted broadband momentum transformation in optical microresonators. Science 358 , 344–347 (2017)..

Kippenberg, T. J. et al. Demonstration of an erbium-doped microdisk laser on a silicon chip. Phys. Rev. A 74 , 051802 (2006)..

Wang, C. et al. Integrated high quality factor lithium niobate microdisk resonators. Opt. Express 22 , 30924–30933 (2014)..

Wang, J. et al. High- Q lithium niobate microdisk resonators on a chip for efficient electro-optic modulation. Opt. Express 23 , 23072–23078 (2015)..

Wang, T. J. et al. High-quality LiNbO 3 microdisk resonators by undercut etching and surface tension reshaping. Opt. Express 20 , 28119–28124 (2012)..

Xu, X. J. et al. Microdisk enhanced photodetector based on Ge self-assembled quantum dots on silicon-on-insulator. Thin Solid Films 557 , 363–367 (2014)..

Yang, S. C., Wang, Y. & Sun, H. D. Advances and prospects for whispering gallery mode microcavities. Adv. Optical Mater. 3 , 1136–1162 (2015)..

Zhang, Z. Y. et al. Multilevel design and construction in nanomembrane rolling for three-dimensional angle-sensitive photodetection. Nat. Commun. 15 , 3066 (2024)..

Zhang, Z. Y. et al. Graphene readout silicon-based microtube photodetectors for encrypted visible light communication. Adv. Mater. 37 , 2413771 (2025)..

Kong, Y. et al. Integration of a metal-organic framework film with a tubular whispering-gallery-mode microcavity for effective CO 2 sensing. ACS Appl. Mater. Interfaces 13 , 58104–58113 (2021)..

Madani, A. et al. Optical microtube cavities monolithically inte grated on photonic chips for optofluidic sensing. Opt. Lett. 42 , 486–489 (2017)..

Yang, S. et al. Enhanced evanescent field coupling of smart particles in tubular optical microcavity for sensing application. Adv. Optical Mater. 10 , 2102158 (2022)..

Wu, B. M. et al. One-step rolling fabrication of VO 2 tubular bolometers with polarization-sensitive and omnidirectional detection. Sci. Adv. 9 , eadi7805 (2023)..

Xiang, C., Jin, W. & Bowers, J. E. Silicon nitride passive and active photonic integrated circuits: trends and prospects. Photonics Res. 10 , A82–A96 (2022)..

Mao, S. C. et al. Low propagation loss SiN optical waveguide prepared by optimal low-hydrogen module. Opt. Express 16 , 20809–20816 (2008)..

Blumenthal, D. J. et al. Silicon nitride in silicon photonics. Proc. IEEE 106 , 2209–2231 (2018)..

Saggau, C. N. et al. Wafer-scale high-quality microtubular devices fabricated via dry-etching for optical andmicroelectronic applications. Adv. Mater. 32 , 2003252 (2020)..

Liu, J. Q. et al. High-yield, wafer-scale fabrication of ultralow-loss, dispersion-engineered silicon nitride photonic circuits. Nat. Commun. 12 , 2236 (2021)..

Huang, J. Y. et al. Enhanced photothermoelectric conversion in self-rolled tellurium photodetector with geometry-induced energy localization. Light Sci. Appl. 13 , 153 (2024)..

Huang, W. et al. Three-dimensional radio-frequency transformers based on a self-rolled-up membrane platform. Nat. Electron. 1 , 305–313 (2018)..

Huang, J. Y. et al. Nanomembrane-assembled nanophotonics and optoelectronics: from materials to applications. J. Phys.: Condens. Matter 35 , 093001 (2023)..

Wu, B. M. et al. Progress and challenges on 3D tubular structures and devices of 2D materials. Appl. Phys. Lett. 121 , 060503 (2022)..

Liu, M. et al. A graphene-based broadband optical modulator. Nature 474 , 64–67 (2011)..

Novoselov, K. S. et al . Electric field effect in atomically thin carbon films. Science 306 , 666–669 (2004)..

Grigorenko, A. N., Polini, M. & Novoselov, K. S. Graphene plasmonics. Nat. Photonics 6 , 749–758 (2012)..

Wang, F. et al. Gate-variable optical transitions in graphene. Science 320 , 206–209 (2008)..

Lee, C. et al. Measurement of the elastic properties and intrinsic strength of monolayer graphene. Science 321 , 385–388 (2008)..

Pereira, V. M., Castro Neto, A. H. & Peres, N. M. R. Tight-binding approach to uniaxial strain in graphene. Phys. Rev. B 80 , 045401 (2009)..

Deng, T. et al. Three-dimensional graphene field-effect transistors as high-performance photodetectors. Nano Lett. 19 , 1494–1503 (2019)..

Ma, Z. et al. Self-rolling of monolayer graphene for ultrasensitive molecular sensing. ACS Appl. Mater. Interfaces 13 , 49146–49152 (2021)..

Zheng, Y. K. e t al. Graphene strain-effect transistor with colossal on/off currentratio enabled by reversible nanocrack formation in metal electrodes on piezoelectric substrates. Nano Lett. 23 , 2536–2543 (2023)..

Gabor, N. M. et al. Hot carrier-assisted intrinsic photoresponse in graphene. Science 334 , 648–652 (2011)..

Song, J. C. W. et al. Hot carrier transport and photocurrent response in graphene. Nano Lett. 11 , 4688–4692 (2011)..

Strelow, C. et al. Light confinement and mode splitting in rolled-up semiconductor microtube bottle resonators. Phys. Rev. B 85 , 155329 (2012)..

Strelow, C. et al. Three dimensionally confined optical modes in quantum-well microtube ring resonators. Phys. Rev. B 76 , 045303 (2007)..

Huang, W. et al. On-chip inductors with self-rolled-up SiN x nanomembrane tubes: a novel design platform for extreme miniaturization. Nano Lett. 12 , 6283–6288 (2012)..

Nikishkov, G. P. Curvature estimation for multilayer hinged structures with initial strains. J. Appl. Phys. 94 , 5333–5336 (2003)..

Yu, H. Y. et al. All-optical image transportation through a multimode fibre using a miniaturized diffractive neural network on the distal facet. Nat. Photonics 19 , 486–493 (2025)..

Gao, Z. et al. Optical semantic communication through multimode fiber: from symbol transmission to sentiment analysis. Light Sci. Appl. 14 , 60 (2025)..

Shekhar, S. et al. Roadmapping the next generation of silicon photonics. Nat. Commun. 15 , 751 (2024)..

Chen, M. J. et al. I/O-efficient iterative matrix inversion with photonic integrated circuits. Nat. Commun. 15 , 5926 (2024)..

Zhang, Z. X. et al. Advances in machine-learning enhanced nanosensors: from cloud artificial intelligence toward future edge computing at chip level. Small Struct. 5 , 2300325 (2024)..

Pan, G. Z. et al. Harnessing the capabilities of VCSELs: unlocking the potential for advanced integrated photonic devices and systems. Light Sci. Appl. 13 , 229 (2024)..

Li, R. J. et al. Photonics for neuromorphic computing: fundamentals, devices, and opportunities. Adv. Mater. 37 , 2312825 (2025)..

Ferrari, A. C. & Basko, D. M. Raman spectroscopy as a versatile tool for studying the properties of graphene. Nat. Nanotechnol. 8 , 235–246 (2013)..

Hu, J. K. et al. 2D graphene oxide: a versatile thermo-optic material. Adv. Funct. Mater. 34 , 2406799 (2024)..

Li, J. Y. et al. High-performance graphene-integrated thermo-optic switch: design and experimental validation. Optical Mater. Express 10 , 387–396 (2020)..

Agrawal, A. Thermo-optic coefficient of chemical vapor deposited graphene multilayers. Vidyodaya J. Sci. 26 , 01 (2023)..

Wu, B. M. et al. Self-rolled-up ultrathin single-crystalline silicon nanomembranes for on-chip tubular polarization photodetectors. Adv. Mater. 35 , 2306715 (2023)..

Beliaev, L. Y. et al. Optical, structural and composition properties of silicon nitride films deposited by r eactive radio-frequency sputtering, low pressure and plasma-enhanced chemical vapor deposition. Thin Solid Films 763 , 139568 (2022)..

Khandelwal, A. et al. Self-rolled-up aluminum nitride-based 3D architectures enabled by record-high differential stress. ACS Appl. Mater. Interfaces 14 , 29014–29024 (2022)..

Guo, Y. T. et al. Self-rolling-up enabled ultrahigh-density information storage in freestanding single-crystalline ferroic oxide films. Adv. Funct. Mater. 33 , 2213668 (2023)..

Wu, Y. et al. Nanomembrane on graphene: delamination dynamics and 3D construction. ACS Nano 19 , 331–344 (2025)..

Views

Downloads

CSCD

Alert me when the article has been cited

Submit

Tools

Publicity Resources

Multifunctional ligand engineering for pure-blue halide perovskite nanocrystal LEDs

In-situ formation of oriented perovskite nanosheets with tailored optical dipoles enabling >30% EQE in pure-red LEDs

Robust chirality through merging BICs

Integrated optomechanical ultrasonic sensors with nano-Pascal-level sensitivity

Superextensive electrical power from a quantum battery

Related Author

No data

Related Institution

No data

⁰