High-efficiency femtosecond laser fabrication of graphene-hybrid planar micro-supercapacitors with micro/nanostructured electrodes

Yuyuan Zhang; Tingting Zou; Haobo Jiang; Xiuyan Fu; Wei Xin; Yiyang Meng; Xilin Li; Jun-Ming Cao; Lin Yang; Yuanzheng Li; Weizhen Liu; Dongdong Han; Xing-Long Wu; Jianjun Yang; Haiyang Xu; Yichun Liu

doi:10.1038/s41377-025-02182-5

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High-efficiency femtosecond laser fabrication of graphene-hybrid planar micro-supercapacitors with micro/nanostructured electrodes

Original Articles

- High-efficiency femtosecond laser fabrication of graphene-hybrid planar micro-supercapacitors with micro/nanostructured electrodes
- Light: Science & Applications Vol. 15, Issue 3, Pages: 835-847(2026)
- Affiliations：
  
  1.State Key Laboratory of Integrated Optoelectronics, Key Laboratory of UV-Emitting Materials and Technology of Ministry of Education, Northeast Normal University, Changchun 130024, China
  2.School of Science, Jilin University of Chemical Technology, Jilin 132022, China
  3.GPL Photon Lab, State Key Laboratory of Luminescence Science and Technology, Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun 130033, China
  4.Key Laboratory of Functional Materials Physics and Chemistry of Ministry of Education, Jilin Normal University, Changchun 130103, China
  5.State Key Laboratory of Integrated Optoelectronics, JLU Region, College of Electronic Science and Engineering, Jilin University, Changchun 130012, China
- Author bio：
  
  Wei Xin (xinwei@nenu.edu.cn)
  Weizhen Liu (wzliu@nenu.edu.cn)
  Haiyang Xu (hyxu@nenu.edu.cn)
- Funds：
- DOI：10.1038/s41377-025-02182-5
  CLC：
- Received：29 September 2025，
  
  Revised：2025-12-18，
  
  Accepted：28 December 2025，
  
  Online First：21 January 2026，
  
  Published：31 March 2026
- Accepted：
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Zhang, Y. Y. et al. High-efficiency femtosecond laser fabrication of graphene-hybrid planar micro-supercapacitors with micro/nanostructured electrodes. Light: Science & Applications, 15, 835-847 (2026).
DOI：

Zhang, Y. Y. et al. High-efficiency femtosecond laser fabrication of graphene-hybrid planar micro-supercapacitors with micro/nanostructured electrodes. Light: Science & Applications, 15, 835-847 (2026). DOI： 10.1038/s41377-025-02182-5.

摘要

Abstract

The integration of surface-regular micro/nanostructured electrodes within a limited footprint area is promising to enhance the electrochemical performance of planar micro-supercapacitors (P-MSCs)

while developing simple yet efficient manufacturing methods for such electrodes remains a challenge. Here

we propose a universal strategy combining femtosecond laser plasma lithography with spatial light modulation (SLM-FPL)

fabricating well-ordered sub-wavelength micro/nanostructured electrodes of interdigital P-MSCs (SEP-MSCs) on graphene oxide (GO) films. Achieving 500/50 µm finger widths/spacings and 680 nm internal grating periods

this method enables device densities

25 units inch

−2

with processing efficiency orders of magnitude higher than conventional laser direct writing. Further performance optimizations via wettability modification

electric field engineering

and hybrid composites (GO-MXene/COF) yield outstanding specific capacitance (~41.4 F cm

−3

) and cycling stability (93% retention over 5000 cycles)

supporting applications in flexible sensors and compact power supplies. This SLM-FPL technology shows strong potential for high-performance

spatially efficient SEP-MSCs in next-generation integrated systems.

关键词

Keywords

references

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