Integrated tunable green light source on silicon nitride

Gang Wang; Ozan Yakar; Xinru Ji; Marco Clementi; Ji Zhou; Christian Lafforgue; Jiaye Wu; Jianqi Hu; Tobias J. Kippenberg; Camille-Sophie Brès

doi:10.1038/s41377-026-02222-8

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Integrated tunable green light source on silicon nitride

Original Articles

- Integrated tunable green light source on silicon nitride
- Light: Science & Applications Vol. 15, Issue 5, Pages: 1523-1531(2026)
- Affiliations：
  
  1.École Polytechnique Fédérale de Lausanne, Photonic Systems Laboratory (PHOSL), Lausanne, Switzerland
  2.École Polytechnique Fédérale de Lausanne, Laboratory of Photonics and Quantum Measurements (LPQM), Lausanne, Switzerland
  3.Dipartimento di Fisica "A. Volta", Universitá di Pavia, Pavia, Italy
- Author bio：
  
  Camille-Sophie Brès (camille.bres@epfl.ch)
- Funds：
- DOI：10.1038/s41377-026-02222-8
  CLC：
- Received：30 April 2025，
  
  Revised：2026-01-16，
  
  Accepted：01 February 2026，
  
  Online First：28 February 2026，
  
  Published：31 May 2026
- Accepted：
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Wang, G. et al. Integrated tunable green light source on silicon nitride. Light: Science & Applications, 15, 1523-1531 (2026).
DOI：

Wang, G. et al. Integrated tunable green light source on silicon nitride. Light: Science & Applications, 15, 1523-1531 (2026). DOI： 10.1038/s41377-026-02222-8.

摘要

Abstract

Integrated green light sources are essential for telecommunications and quantum applications

while the performance of current on-chip green light generation is still limited in power and tunability. In this work

we demonstrate green light generation in silicon nitride microresonators using photo-induced second-order nonlinearities

achieving up to 3.5 mW green power via second-harmonic generation and densely tunable over a 29 nm range. In addition

we report milliwatt-level all-optical poling (AOP) threshold

allowing for amplifier-free continuous-wave AOP. Furthermore

we demonstrate non-cascaded sum-frequency generation

leveraging the combination of AOP and simultaneous coherent frequency combs generation at 1

m. Such comb-assisted AOP enables switching of the green light generation over an 11 nm range while maintaining the pump within a single resonance. The combination of such highly efficient photo-induced nonlinearity and multi-wavelength AOP enables the realization of low-threshold

high-power

widely-tunable on-chip green sources.

关键词

Keywords

references

Bernien, H. et al. Heralded entanglement between solid-state qubits separated by three metres. Nature 497 , 86–90 (2013)..

Wu, Y., Wang, Y., Qin, X., Rong, X. & Du, J. A programmable two-qubit solid-state quantum processor under ambient conditions. npj Quantum Inf. 5 , 9 (2019)..

Clark, C. R. et al. High-fidelity bell-state preparation with 40 Ca + optical qubits. Phys. Rev. Lett. 127 , 130505 (2021)..

Haubold, M., Gan ser, A., Eder, T. & Zäh, M. F. Laser welding of copper using a high power disc laser at green wavelength. Procedia CIRP 74 , 446–449 (2018)..

Sticklus, J., Hoeher, P. A. & Röttgers, R. Optical underwater communication: the potential of using converted green leds in coastal waters. IEEE J. Ocean. Eng. 44 , 535–547 (2019)..

Moustakas, T. D. & Paiella, R. Optoelectronic device physics and technology of nitride semiconductors from the uv to the terahertz. Rep. Prog. Phys. 80 , 106501 (2017)..

Corcoran, B. et al. Green light emission in silicon through slow-light enhanced third-harmonic generation in photonic-crystal waveguides. Nat. Photonics 3 , 206–210 (2009)..

Vijayakumar, S. et al. Phase-matched third-harmonic generation in silicon nitride waveguides. Nanophotonics 13 , 3385–3393 (2024)..

Levy, J. S., Foster, M. A., Gaeta, A. L. & Lipson, M. Harmonic generation in silicon nitride ring resonators. Opt. Express 19 , 11415–11421 (2011)..

Wang, L. R. et al. Frequency comb generation in the green using silicon nitride m icroresonators. Laser Photonics Rev. 10 , 631–638 (2016)..

Jung, H., Stoll, R., Guo, X., Fischer, D. & Tang, H. X. Green, red, and ir frequency comb line generation from single ir pump in aln microring resonator. Optica 1 , 396–399 (2014)..

Surya, J. B., Guo, X., Zou, C.-L. & Tang, H. X. Efficient third-harmonic generation in composite aluminum nitride/silicon nitride microrings. Optica 5 , 103–108 (2018)..

Lu, X. Y., Moille, G., Rao, A., Westly, D. A. & Srinivasan, K. On-chip optical parametric oscillation into the visible: generating red, orange, yellow, and green from a near-infrared pump. Optica 7 , 1417–1425 (2020)..

Domeneguetti, R. R. et al. Parametric sideband generation in cmos-compatible oscillators from visible to telecom wavelengths. Optica 8 , 316–322 (2021)..

Sun, Y. et al. Advancing on-chip kerr optical parametric oscillation towards coherent applications covering the green gap. Light Sci. Appl. 13 , 201 (2024)..

Ling, J. W. et al. Third-harmonic generation on chip through cascaded χ (2) processes. In Conference on Lasers and Electro-Optics , SF4G–3 (Optica Publishing Group, San Jose, CA, USA, 2022)..

Yakar, O., Nitiss, E., Hu, J. & Brès, C.-S. Generalized coherent photogalvanic effect in coherently seeded waveguides. Laser Photonics Rev. 16 , 2200294 (2022)..

Hu, J. Q. et al. Photo-induced cascaded harmonic and comb generation in silicon nitride microresonators. Sci. Adv. 8 , eadd8252 (2022)..

Chen, H. W. et al. Continuous-wave second-harmonic generation of green light in periodically poled thin-film lithium tantalate. Opt. Lett. 50 , 1125–1127 (2025)..

Porcel, M. A. G. et al. Photo-induced second-order nonlinearity in stoichiometric silicon nitride waveguides. Opt. Express 25 , 33143–33159 (2017)..

Lu, X. Y. et al. Emerging integrated laser technologies in the visible and short near-infrared regimes. Nat. Photonics 18 , 1010–1023 (2024)..

Anderson, D. Z., Mizrahi, V. & Sipe, J. E. Model for second-harmonic generation in glass optical fibers based on asymmetric photoelectron emission from def ect sites. Opt. Lett. 16 , 796–798 (1991)..

Dianov, E. M., Kornienko, L., Rybaltovsky, A., Chernov, P. & Yatsenko, Y. P. Photoinduced second-harmonic generation in fibers doped with rare-earth ions. Opt. Lett. 19 , 439–441 (1994)..

Österberg, U. & Margulis, W. Dye laser pumped by nd: Yag laser pulses frequency doubled in a glass optical fiber. Opt. Lett. 11 , 516–518 (1986)..

Margulis, W., Laurell, F. & Lesche, B. Imaging the nonlinear grating in frequency-doubling fibres. Nature 378 , 699–701 (1995)..

Billat, A. et al. Large second harmonic generation enhancement in Si 3 N 4 waveguides by all-optically induced quasi-phase-matching. Nat. Commun. 8 , 1016 (2017)..

Hickstein, D. D. et al. Self-organized nonlinear gratings for ultrafast nanophotonics. Nat. Photonics 13 , 494–499 (2019)..

Lu, X. Y., Moille, G., Rao, A., Westly, D. A. & Srinivasan, K. Efficient photoinduced second-harmonic generation in silicon nitride photonics. Nat. Photonics 15 , 131–136 (2021)..

Nitiss, E., Hu, J., Stroganov, A. & Brès, C.-S. Optically reconfigurable quasi-phase-matching in silicon nitride microresonators. Nat. Photonics 16 , 134–141 (2022)..

Zhou, J. et al. Self-organized spatiotemporal quasi-phase-matching in microresonators. Nat. Commun. 16 , 4083 (2025)..

Li, B. H. et al. Down-converted photon pairs in a high-Q silicon nitride microresonator. Nature 639 , 922–927 (2025)..

Limonov, M. F., Rybin, M. V., Poddubny, A. N. & Kivshar, Y. S. Fano resonances in photonics. Nat. Photonics 11 , 543–554 (2017)..

Clementi, M. et al. A chip-scale second-harmonic source via self-injection-locked all-optical poling. Light Sci. Appl. 12 , 296 (2023)..

Li, B. H. et al. High-coherence hybrid-integrated 780 nm source by self-injection-locked second-harmonic generation in a high-q silicon-nitride resonator. Optica 10 , 1241–1244 (2023)..

Lu, X. Y. & Srinivas an, K. Considering photoinduced second-harmonic generation as a dc kerr optical parametric oscillation or amplification process. Phys. Rev. Appl. 16 , 014027 (2021)..

Erkintalo, M. & Coen, S. Coherence properties of kerr frequency combs. Opt. Lett. 39 , 283–286 (2014)..

Mitchell, M., Chen, Z., Shih, M.-f & Segev, M. Self-trapping of partially spatially incoherent light. Phys. Rev. Lett. 77 , 490–493 (1996)..

Cole, D. C., Lamb, E. S., Del'Haye, P., Diddams, S. A. & Papp, S. B. Soliton crystals in kerr resonators. Nat. Photonics 11 , 671–676 (2017)..

Godey, C., Balakireva, I. V., Coillet, A. & Chembo, Y. K. Stability analysis of the spatiotemporal Lugiato-Lefever model for kerr optical frequency combs in the anomalous and normal dispersion regimes. Phys. Rev. A 89 , 063814 (2014)..

Clementi, M., Zatti, L., Zhou, J., Liscidini, M. & Brès, C.-S. Ultrabroadband milliwatt-level resonant frequency doubling on a chip. Nat. Commun. 16 , 6164 (2025)..

Wang, W. Q., Wang, L. R. & Zhang, W. F. Advances in soliton microcomb generation. Adv. Photonics 2 , 034001 (2020)..

Moille, G. et al. Broadband resonator-waveguide coupling for efficient extraction of octave-spanning microcombs. Opt. Lett. 44 , 4737–4740 (2019)..

Yuan, Z. Q. et al. Efficient and wavelength-tunable second-harmonic generation toward the green gap. Sci. Adv. 11 , eadw2781 (2025)..

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