Passive technologies for future large-scale photonic integrated circuits on silicon: polarization handling, light non-reciprocity and loss reduction

Daoxin Dai; Jared Bauters; John E Bowers

doi:10.1038/lsa.2012.1

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Passive technologies for future large-scale photonic integrated circuits on silicon: polarization handling, light non-reciprocity and loss reduction

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- Passive technologies for future large-scale photonic integrated circuits on silicon: polarization handling, light non-reciprocity and loss reduction
- Passive technologies for future large-scale photonic integrated circuits on silicon: polarization handling, light non-reciprocity and loss reduction
- LSA 2012年1卷第1期
- Affiliations：
  
  1.Department of Electrical and Computer Engineering, University of California, Santa Barbara, CA 93106, USA
  2.Centre for Optical and Electromagnetic Research, State Key Laboratory for Modern Optical Instrumentation, Zhejiang University, Zijingang, Hangzhou 310058, China
- Author bio：
  
  Professor DX Dai, Department of Electrical and Computer Engineering, University of California, Santa Barbara, CA 93106, USA. E-mail: dxdai@zju.edu.cn
  Professor JE Bowers, Department of Electrical and Computer Engineering, University of California, Santa Barbara, CA 93106, USA. E-mail: bowers@ece.ucsb.edu
- Funds：
- DOI：10.1038/lsa.2012.1
  中图分类号：
- 纸质出版日期：2012-03，
  
  网络出版日期：2012-03-29，
  
  收稿日期：2012-01-12，
  
  修回日期：2012-02-16，
  
  录用日期：2012-02-17
- Accepted：
Scan QR Code
Passive technologies for future large-scale photonic integrated circuits on silicon: polarization handling, light non-reciprocity and loss reduction[J]. LSA, 2012,1(1).

Dai, D. X., Bauters, J. & Bowers, J. E. Passive technologies for future large-scale photonic integrated circuits on silicon: polarization handling, light non-reciprocity and loss reduction. Light: Science & Applications, 1, e1 (2012).
Passive technologies for future large-scale photonic integrated circuits on silicon: polarization handling, light non-reciprocity and loss reduction[J]. LSA, 2012,1(1). DOI： 10.1038/lsa.2012.1.

Dai, D. X., Bauters, J. & Bowers, J. E. Passive technologies for future large-scale photonic integrated circuits on silicon: polarization handling, light non-reciprocity and loss reduction. Light: Science & Applications, 1, e1 (2012). DOI： 10.1038/lsa.2012.1.

摘要

Abstract

Silicon-based large-scale photonic integrated circuits are becoming important

due to the need for higher complexity and lower cost for optical transmitters

receivers and optical buffers. In this paper

passive technologies for large-scale photonic integrated circuits are described

including polarization handling

light non-reciprocity and loss reduction. The design rule for polarization beam splitters based on asymmetrical directional couplers is summarized and several novel designs for ultra-short polarization beam splitters are reviewed. A novel concept for realizing a polarization splitter–rotator is presented with a very simple fabrication process. Realization of silicon-based light non-reciprocity devices (e.g.

optical isolator)

which is very important for transmitters to avoid sensitivity to reflections

is also demonstrated with the help of magneto-optical material by the bonding technology. Low-loss waveguides are another important technology for large-scale photonic integrated circuits. Ultra-low loss optical waveguides are achieved by designing a Si

core with a very high aspect ratio. The loss is reduced further to

0.1 dB m

−1

with

an improved fabrication process incorporating a high-quality thermal oxide upper cladding by means of wafer bonding. With the developed ultra-low loss Si

optical waveguides

some devices are also demonstrated

including ultra-high-Q ring resonators

low-loss arrayed-waveguide grating (de)multiplexers

and high-extinction-ratio polarizers.

关键词

Keywords

integrationlow lossnon-reciprocalpolarizationsilicon

references

Welch DF, Kish FA, Melle S, Nagarajan R, Kato Met al. Large-scale InP photonic integrated circuits: enabling efficient scaling of optical transport networks.IEEE J Select Top Quantum Electron2007;13: 22–31..

Nicholes SC, Măsanovic ML, Jevremovic B, Lively E, Coldren LAet al. An 8×8 InP monolithic tunable optical router (motor) packet forwarding chip.J Lightwave Technol2010;28: 641–650..

Liang D, Bowers JE. Photonic integration: Si or InP substrates?Electron Lett2009;45: 578–581..

Coldren LA, Nicholes SC, Johansson L, Ristic S, Guzzon RSet al. High performance InP-based photonic ICs—a tutorial.J Lightwave Technol2011;29: 554–570..

Infinera's 400 Gb/s PIC sets new record for integration. 23 March 2009.http://www.infinera.com/j7/servlet/NewsItem?newsItemID=150http://www.infinera.com/j7/servlet/NewsItem?newsItemID=150

Barwicz T, Watts M, Popovic M, Rakich P, Socci Let al. Polarization-transparent microphotonic devices in the strongconfinement limit.Nature Photon2007;1: 57–60..

Sasaki K, Ohno F, Motegi A, Baba T. Arrayed waveguide grating of 70×60μm2size based on Si photonic wire waveguides.Electron Lett2005;41: 801–802..

Dai D. Liu L, Wosinski L, He S. Design and fabrication of ultra-small overlapped AWG demultiplexer based on alpha-Si nanowire waveguides.Electron Lett2006;42: 400–402..

Bogaerts W, Selvaraja SK, Dumon P, Brouckaert J, Vos DKet al. Silicon-on-insulator spectral filters fabricated with CMOS technology.IEEE J Sel Top Quant Electron2010;16: 33–44..

Fukuda H, Yamada K, Tsuchizawa T, Watanabe T, Shinojima Het al. Silicon photonic circuit with polarization diversity.Opt Express2008;16: 4872–80..

Sheng Z, Dai D, He S. Comparative study of losses in ultrasharp silicon-on-insulator nanowire bends.IEEE J Sel Top Quant Electron2009;15: 1406–1412..

Liang D, Bowers JE. Recent progress in lasers on silicon.Nature Photon2010;4: 511–517..

Alduino A, Liao L, Jones R, Morse M, Kim Bet al. Demonstration of a high speed 4-channel integrated silicon photonics WDM link with hybrid silicon lasers. OSA technical digest (CD) (Optical Society of America, 2010) in Integrated photonics research, silicon and nanophotonics. Paper PDIWI5

Kurczveil G, Heck MJ, Garcia JM, Poulsen HN, Park Het al. Integrated recirculating optical hybrid silicon buffers. SPIE Photonics West; 24 January 2011; San Francisco, CA, USA. SPIE: San Francisco, CA, USA.

Faralli S, Nguyen KN, Chen HW, Peters JD, Garcia JMet al. 25 Gbaud DQPSK receiver integrated on the hybrid silicon. Proceedings of 8th IEEE International Conference on Group Ⅳ Photonics (GFP); 14–16 September 2011; London, UK, 2011, pp326–328

Smit MK, Bente EA, Hill MT, Karouta F, Leijtens XJet al. Current status and prospects of photonic IC technology. Proceedings of IEEE Conference on Indium Phosphide Related Materials; 14–18 May 2007; Matsue, Japan. IEEE: Matsue, Japan, 2007, pp3–6.

Dai D, He S. Design of a polarization-insensitive arrayed waveguide grating demultiplexer based on silicon photonic wires.Opt Lett2006;31: 1988–1990..

Dai D, Shi Y, He S. Theoretical Investigation for reducing polarization-sensitivity in Si-nanowire-based arrayed-waveguide grating (de)multiplexer with polarization-beam-splitters and reflectors.IEEE J Quant Electron2009;45: 654–660..

Pfau T, Peveling R, Hauden J, Grossard N, Porte Het al. Coherent digital polarization diversity receiver for real-time polarization-multiplexed QPSK transmission at 2.8 Gb/s.IEEE Photon Technol Lett2007;19: 1988–1990..

Tien MC, Mizumoto T, Pintus P, Kromer H, Bowers JE. Silicon ring isolators with bonded nonreciprocal magneto-optic garnets.Opt Express2011;19: 11740–11745..

Ciminelli C, Olio FD, Campanella CE, Armenise MN. Photonic technologies for angular velocity sensing.Adv Opt Phot2010;2: 370–404..

Burmeister EF, Mack JP, Poulsen HN, Mašanovic ML, Stamenic Bet al. Photonic integrated circuit optical buffer for packet-switched networks.Opt Express2009;17: 6629–6635..

Horikawa K, Ogawa I, Kitoh T, Ogawa H. Silica-based integrated planar lightwave true-time-delay network for microwave antenna applications. Proceedings of the Optical Fiber Communication Conference; 25 February–1 March 1996; San Jose, CA, USA. Optical Society of America: Washington, DC, USA, 1996, Vol. 2, pp100–101.

Dong P, Qian W, Liao S, Liang H, Kung CCet al. Low loss shallow-ridge silicon waveguides.Opt Express2010;18: 14474–14479..

Cardenas J, Poitras CB, Robinson JT, Preston K, Chen Let al. Low loss etchless silicon photonic waveguides.Opt Express2009;17: 4752–4757..

Goykhman I, Desiatov B, Levy U. Ultrathin silicon nitride microring resonator for biophotonic applications at 970 nm wavelength.Appl Phys Lett2010;97: 081108..

Bogaerts W, Taillaert D, Dumon P, Thourhout DV, Baets R. A polarization-diversity wavelength duplexer circuit in silicon-on-insulator photonic wires.Opt Express2007;15: 1567–1578..

Fukuda H, Yamada K, Tsuchizawa T, Watanabe T, Shinojima Het al. Ultrasmall polarization splitter based on silicon wire waveguides.Opt Express2006;14: 12401–12408..

Komatsu M, Saitoh K, Koshiba M. Design of miniaturized silicon wire and slot waveguide polarization splitter based on a resonant tunneling.Opt Express2009;17: 19225–19233..

Liang TK, Tsang HK. Integrated PBS in high index contrast silicon-on-insulator waveguides.IEEE Photon Technol Lett2005;17: 393–395..

Augustin LM, Hanfoug R, Tol JJ, Laat WJ, Smit MK, A compact integrated polarization splitter/converter in InGaAsP-InP.IEEE Photon Technol Lett2007;19: 1286–1288..

Hong JM, Ryu HH, Park SR, Jeong JW, Lee SGet al. Design and fabrication of a significantly shortened multimode interference coupler for polarization splitter application.IEEE Photon Technol Lett2003;15: 72–74..

Jiao Y, Dai D, Shi Y, He S. Shortened polarization beam splitters with two cascaded multimode interference sections.IEEE Photon Technol Lett2009;21: 1538–1540..

Tu Z, Huang Y, Yi H, Wang X, Li Yet al. A compact SOI polarization beam splitter based on multimode interference coupler. Asia Communications and Photonics Conference; 13–16 November 2011; Shanghai, China.SPIE2011;8307: 830707..

Yang BK, Shin SY, Zhang DM. Ultrashort polarization splitter using two-mode interference in silicon photonic wires.IEEE Photon Technol Lett2009;21: 432–434..

Kiyat I, Aydinli A, Dagli N. A compact silicon-on-insulator polarization splitter.IEEE Photon Technol Lett2005;17: 100–102..

Augustin LM, Tol JJ, Hanfoug RR, de Laat WJ, van de Moosdijk MJet al. A single etch-step fabrication-tolerant polarization splitter.J Lightwave Technol2007;25: 740–746..

Xiao J, Liu X, Sun XH. Design of a compact polarization splitter in horizontal multiple-slotted waveguide structures.Jpn J Appl Phys2008;47: 3748–3754..

Tu XG, Ang SS, Chew AB, Teng J, Mei T. An ultracompact directional coupler based on GaAs cross-slot waveguide.IEEE Photon Technol Lett2010;22: 1324–1326..

Yamazaki T, Aono H, Yamauchi J, Nakano H. Coupled waveguide polarization splitter with slightly different core widths.J Lightwave Technol2008;26: 3528–3533..

Yue Y, Zhang L, Yang JY, Beausoleil RG, Willner AE. Silicon-on-insulator polarization splitter using two horizontally slotted waveguides.Opt Lett2010;35: 1364–1366..

Shi Y, Dai D, He S. Proposal for an ultra-compact PBS based on a photonic crystal-assisted multimode interference coupler.IEEE Photon Technol Lett2007;19: 825–827..

Ao X, Liu L, Lech W, He S. Polarization beam splitter based on a two-dimensional photonic crystal of pillar type.Appl Phys Lett2006;89: 171115..

Okuno M, Sugita A, Jinguji K, Kawachi M. Birefringence control of silica waveguides on Si and its application to a polarization-beam splitter/switch.J Lightwave Technol1994;12: 625–634..

Goto N, Yip GL. A TE–TM mode splitter in LiNbO3by proton exchange and Ti diffusion.J Lightwave Technol1989;7: 1567–1573..

Ghirardi F, Brandon J, Carre M, Bruno A, Meniganx Let al. Polarization splitter based on modal birefringence in InP/InGaAsP optical waveguides.IEEE Photon Technol Lett1993;5: 1047–1049..

Lin KC, Chuang WC, Lee WY. Proposal and analysis of an ultrashort directional-coupler polarization splitter with an NLC coupling layer.J Lightwave Technol1996;14: 2547–2553..

Dai D, Shi Y, He S. Characteristic analysis of nanosilicon rectangular waveguides for planar light-wave circuits of high integration.Appl Opt2006;45: 4941–4946..

Almeida VR, Xu Q, Barrios CA, Lipson M. Guiding and confining light in void nanostructure.Opt Lett2004;29: 1209–1211..

Dai D, Wang Z, Bowers JE. Ultra-short broad-band polarization beam splitter based on an asymmetrical directional coupler.Opt Lett2011;36: 2590–2592..

Dai D, Bowers JE. Novel ultra-short and ultra-broadband polarization beam splitter based on a bent directional coupler.Opt Express2011;19: 18614–18620..

Feng NN, Sun R, Kimerling LC, Michel J. Lossless strip-to-slot waveguide transformer.Opt Lett2007;32: 1250–1252..

Lin S, Hu J, Crozier KB. Ultracompact, broadband slot waveguide polarization splitter.Appl Phys Lett2011;98: 151101..

Chin MK, Ho ST. Design and modeling of waveguide-coupled single-mode microring resonators.J Lightwave Technol1998;16: 1433–1446..

Lui WW, Hirono T, Yokoyama K, Huang WP. Polarization rotation in semiconductor bending waveguides: a coupled-mode theory formulation.J Lightwave Technol1998;16: 929–936..

Zhang J, Yu MB, Lo GQ, Kwong DL. Silicon-waveguide-based mode evolution polarization rotator.IEEE J Select Top Quantum Electron2010;16: 53–60..

Feng NN, Sun R, Michel J, Kimerling LC. Low-loss compact-size slotted waveguide polarization rotator and transformer.Opt Lett2007;32: 2131–2133..

Yue Y, Zhang L, Song M, Beausoleil RG, Willner AE. Higher-order-mode assisted silicon-on-insulator 90 degree polarization rotator.Opt Express2009;17: 20694–20699..

Rahman BM, Obayya SS, Rajarajan M, Grattan KT, El-Mikathi HA. Design and characterization of compact single-section passive polarization rotator.J Lightwave Technol2001;19: 512–519..

Deng HH, Yevick DO, Brooks C, Jessop PE. Design rules for slanted-angle polarization rotators.J Lightwave Technol2005;23: 432–445..

Wang Z, Dai D. Ultrasmall Si-nanowire-based polarization rotator.J Opt Soc Am B2008;25: 747–753..

Dai D, Bowers JE. Novel concept for ultracompact polarization splitter-rotator based on silicon nanowires.Opt Express2011;19: 10940–10949..

Vermeulen D, Selvaraja S, Cort WA, Yebo NA, Hallynck Eet al. Efficient tapering to the fundamental Quasi-TM mode in asymmetrical waveguides, ECIO 2010; 6–9 April 2010; Cambridge, UK. Department of Information Technology; Cambridge, UK. Paper WeP16.

Shintaku T. Integrated optical isolator based on efficient nonreciprocal radiation mode conversion.Appl Phys Lett1998;73: 1946–1948..

Shimizu H, Goto S. Evanescent semiconductor active optical isolators for low insertion loss and high gain saturation power.J Lightwave Technol2010;28: 1414–1419..

Fujita J, Levy M, Osgood RM, Wilkens L, Dotsch H. Waveguide optical isolator based on Mach-Zehnder interferometer.Appl Phys Lett2000;76: 2158–2160..

Yokoi H, Mizumoto T, Shoji Y. Optical nonreciprocal devices with a silicon guiding layer fabricated by wafer bonding.Appl Opt2003;42: 6605–6612..

Yokoi H, Mizumoto T, Shinjo N, Futakuchi N, Nakano Y. Demonstration of an optical isolator with a semiconductor guiding layer that was obtained by use of a nonreciprocal phase shift.Appl Opt2000;39: 6158–6164..

Shoji Y, Mizumoto T, Yokoi H, Hsieh IW, Osgood RM. Magneto-optical isolator with silicon waveguides fabricated by direct bonding.Appl Phys Lett2008;92: 3..

Kono N, Kakihara K, Saitoh K, Koshiba M. Nonreciprocal microresonators for the miniaturization of optical waveguide isolators.Opt Express2007;15: 7737–7751..

Rostami A. Piecewise linear integrated optical device as an optical isolator using two-port nonlinear ring resonators.Opt Laser Technol2007;39: 1059–1065..

Fan L, Wang J, Shen H, Varghese LT, Niu Bet al. A CMOS compatible microring-based on-chip isolator with 18dB optical isolation. In: Frontiers in Optics. Rochester: OSA; 2010. pFThQ4.

Shintaku T, Uno T, Kobayashi M. Magnetooptic channel waveguides in Ce-substituted yttrium-gartnet.J Appl Phys1993;74: 4877–4881..

Pintus P, Tien MC, Bowers JE. Design of magneto-optical ring isolator on SOI based on the finite-element method,IEEE Photon Technol Lett2011;23: 1670–1672..

Adar R, Serbin MR, Mizrahi V. Less-than-1 dB per meter propagation loss of silica wave-guides measured using a ring-resonator.J Lightwave Technol1994;12: 1369–1372..

Kominato T, Hida Y, Itoh M, Takahashi H, Sohma Set al. Extremely low-loss (0.3 dB/m) and long silica-based waveguides with large width and clothoid curve connection. Proceedings of ECOC; 5–9 September 2004; Stockholm, Sweden, 2004.

Bauters JF, Heck MJR, John D, Dai D, Tien MCet al. Ultra-low-loss high-aspect-ratio Si3N4waveguides.Opt Express2011;19: 3163–3174..

Dai D, Wang Z, Bauters JF, Tien MC, Heck MJet al. Low-loss Si3N4arrayed-waveguide grating (de)multiplexer using nano-core optical waveguides.Opt Express2011;19: 14130–14136..

Tien MC, Bauters JF, Heck MJ, Spencer DT, Blumenthal DJet al. Ultra-high quality factor planar Si3N4ring resonators on Si substrates.Opt Express2011;19: 13551–13556..

Spillane SM, Kippenberg TJ, Vahala KJ. Ultralow-threshold Raman laser using a spherical dielectric microcavity.Nature2002;415: 621–623..

Vollmer F, Braun D, Libchaber A, Khoshsima M, Teraoka Iet al. Protein detection by optical shift of a resonant microcavity.Appl Phys Lett2002;80: 4057–4059..

Klein EJ, Geuzebroek DH, Kelderman H, Gabriel S, Baker Net al. Reconfigurable optical add-drop multiplexer using microring resonators.IEEE Photon Technol Lett2005;17: 2358–23560..

Rasras MS, Kun-Yii T, Gill DM, Young-Kai C, White AEet al. Demonstration of a tunable microwave-photonic notch filter using low-loss silicon ring resonators.J Lightwave Technol2009;27: 2105–2110..

Armani DV, Kippenberg TJ, Spillane SM, Vahala KJ. Ultra-high-Q toroid microcavity on a chip.Nature2003;421: 925–928..

Soltani M, Yegnanarayanan S, Adibi A. Ultra-high Q planar silicon microdisk resonators for chip-scale silicon photonics.Opt Express2007;15: 4694–4704..

Gondarenko A, Levy JS, Lipson M. High confinement micron-scale silicon nitride high Q ring resonator.Opt Express2009;17: 111–115..

Hosseini ES, Yegnanarayanan S, Atabaki AH, Soltani M, Adibi A. High quality planar silicon nitride microdisk resonators for integrated photonics in the visible wavelength range.Opt Express2009;17: 14543–14551..

Bauters JF, Heck MJ, John D, Barton JS, Bowers JEet al. Planar waveguides with less than 0.1 dB/m propagation loss fabricated with wafer bonding.Opt Express2011;19: 24090–24101..

Dai D, Wang Z, Bauters JF, Tien MC, Heck MJet al. Polarization characteristics of lowloss nano-core buried optical waveguides and directional couplers. 7th IEEE International Conference on Group IV Photonics (GFP); 1–3 September 2010; Beijing, China. IEEE Photonics Society, Beijing, China. pp 260–262.

Doerr CR, Okamoto K. Advances in silica planar lightwave circuits.J Lightwave Technol2006;24: 4763–4788..

Barbarin Y, Leijtens XJ, Louzao CM, Kooiman JR, Smit MK. Extremely small AWG demultiplexer fabricated on InP by using a double-etch process.IEEE Photon Technol Lett2004;16: 2478..

Trinh PD, Yegnanarayanan S, Coppinger F, Jalali B. Silicon-on-insulator (SOI) phased-array wavelength multi/demultiplexer with extremely low-polarization sensitivity.IEEE Photon Technol Lett1997;9: 940–942..

Dai D, Fu X, Shi Y, He S Experimental demonstration of an ultra-compact Si-nanowire-based reflective arrayed-waveguide grating (de)multiplexer with photonic crystal reflectors.Opt Lett2010;35: 2594–2596..

Dai D, Wang Z, Julian N, Bowers JE. Compact broadband polarizer based on shallowly-etched silicon-on-insulator ridge optical waveguides.Opt Express2010;18: 27404–27415..

Kokubun Y, Asakawa S. ARROW-type polarizer utilizing form birefringence in multilayer first cladding.IEEE Photon Technol Lett1993;5: 1418–1420..

Li GY, Xu AS. Analysis of the TE-pass or TM-pass metal-clad polarizer with a resonant buffer layer.J Lightwave Technol2008;26: 1234–1241..

Twu RC, Huang CC, Wang WS. TE-pass Zn-diffused LiNbO3waveguide polarizer.Microwav Opt Technol Lett2006;48: 2312–2314..

Cui Y, Wu Q, Schonbrun E, Tinker M, Lee JBet al. Silicon-based 2-D slab photonic crystal TM polarizer at telecommunication wavelength.IEEE Photon Technol Lett2008;20: 641–643..

Alessandro A, Bellini B, Donisi D, Beccherelli R, Asquini R. Nematic liquid crystal optical channel waveguides on silicon.IEEE J Quant Electron2006;42: 1084–1090..

Wang Q, Ho ST. Ultracompact TM-pass silicon nanophotonic waveguide polarizer and design.IEEE J Photon2010;2: 49–56..

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