Solving the inverse grating problem by white light interference Fourier scatterometry

Valeriano Ferreras Paz; Sandy Peterhänsel; Karsten Frenner; Wolfgang Osten

doi:10.1038/lsa.2012.36

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Solving the inverse grating problem by white light interference Fourier scatterometry

Original Article

- Solving the inverse grating problem by white light interference Fourier scatterometry
- Solving the inverse grating problem by white light interference Fourier scatterometry
- LSA 2012年1卷第1期
- Affiliations：
  
  1.Institute of Applied Optics, Stuttgart University, 70569 Stuttgart, Germany
  2.SCoPE—Stuttgart Research Center of Photonic Engineering, Stuttgart University, Stuttgart, Germany
- Author bio：
  
  Professor V Ferreras Paz, Institute of Applied Optics, Stuttgart University, Pfaffenwaldring 9, 70569 Stuttgart, Germany. E-mail: ferreras@ito.uni-stuttgart.de
  Professor W Osten, Institute of Applied Optics, Stuttgart University, Pfaffenwaldring 9, 70569 Stuttgart, Germany. E-mail: osten@ito.uni-stuttgart.de
- Funds：
- DOI：10.1038/lsa.2012.36
  中图分类号：
- 纸质出版日期：2012-03，
  
  网络出版日期：2012-11-09，
  
  收稿日期：2012-04-24，
  
  修回日期：2012-07-10，
  
  录用日期：2012-07-17
- Accepted：
Scan QR Code
Solving the inverse grating problem by white light interference Fourier scatterometry[J]. LSA, 2012,1(1).

Paz, V. F. et al. Solving the inverse grating problem by white light interference Fourier scatterometry. Light: Science & Applications, 1, e36 (2012).
Solving the inverse grating problem by white light interference Fourier scatterometry[J]. LSA, 2012,1(1). DOI： 10.1038/lsa.2012.36.

Paz, V. F. et al. Solving the inverse grating problem by white light interference Fourier scatterometry. Light: Science & Applications, 1, e36 (2012). DOI： 10.1038/lsa.2012.36.

摘要

Abstract

Scatterometry is a well-established

fast and precise optical metrology method used for the characterization of sub-lambda periodic features. The Fourier scatterometry method

by analyzing the Fourier plane

makes it possible to collect the angle-resolved diffraction spectrum without any mechanical scanning. To improve the depth sensitivity of this method

we combine it with white light interferometry. We show the exemplary application of the method on a silicon line grating. To characterize the sub-lambda features of the grating structures

we apply a model-based reconstruction approach by comparing simulated and measured spectra. All simulations are based on the rigorous coupled-wave analysis method.

关键词

Keywords

Fourier scatterometryinverse problemoptical sub-lambda metrologyRCWAwhite light interference

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