Simultaneous additive and subtractive three-dimensional nanofabrication using integrated two-photon polymerization and multiphoton ablation

Wei Xiong; Yun Shen Zhou; Xiang Nan He; Yang Gao; Masoud Mahjouri-Samani; Lan Jiang; Tommaso Baldacchini; Yong Feng Lu

doi:10.1038/lsa.2012.6

Go to Nature Website

Your Location：

Home >

Browse articles >

Simultaneous additive and subtractive three-dimensional nanofabrication using integrated two-photon polymerization and multiphoton ablation

Original Article

- Simultaneous additive and subtractive three-dimensional nanofabrication using integrated two-photon polymerization and multiphoton ablation
- Simultaneous additive and subtractive three-dimensional nanofabrication using integrated two-photon polymerization and multiphoton ablation
- LSA 2012年1卷第1期
- Affiliations：
  
  1.Department of Electrical Engineering, University of Nebraska-Lincoln, Lincoln, NE 68588-0511, USA
  2.Department of Mechanical and Automation Engineering, Beijing Institute of Technology, Beijing 100081, China
  3.Technology and Applications Center, Newport Corporation, Irvine, CA 92606, USA
- Author bio：
  
  Professor YF Lu, Department of Electrical Engineering, University of Nebraska-Lincoln, Lincoln, NE 68588-0511, USA E-mail: ylu2@unl.edu
- Funds：
- DOI：10.1038/lsa.2012.6
  中图分类号：
- 纸质出版日期：2012-03，
  
  网络出版日期：2012-04-13，
  
  收稿日期：2012-01-01，
  
  录用日期：2012-03-05
- Accepted：
Scan QR Code
Simultaneous additive and subtractive three-dimensional nanofabrication using integrated two-photon polymerization and multiphoton ablation[J]. LSA, 2012,1(1).

Xiong, W. et al. Simultaneous additive and subtractive three-dimensional nanofabrication using integrated two-photon polymerization and multiphoton ablation. Light: Science & Applications, 1, e6 (2012).
Simultaneous additive and subtractive three-dimensional nanofabrication using integrated two-photon polymerization and multiphoton ablation[J]. LSA, 2012,1(1). DOI： 10.1038/lsa.2012.6.

Xiong, W. et al. Simultaneous additive and subtractive three-dimensional nanofabrication using integrated two-photon polymerization and multiphoton ablation. Light: Science & Applications, 1, e6 (2012). DOI： 10.1038/lsa.2012.6.

摘要

Abstract

Modern three-dimensional nanofabrication requires both additive and subtractive processes. However

both processes are largely isolated and generally regarded as incompatible with each other. In this study

we developed simultaneous additive and subtractive fabrication processes using two-photon polymerization followed by femtosecond (fs) laser multiphoton ablation. To demonstrate the new capability

submicrometer polymer fibers containing periodic holes of 500-nm diameter and microfluidic channels of 1-µm diameter were successfully fabricated. This method combining both two-photon polymerization and fs laser ablation improves the nanofabrication efficiency and enables the fabrication of complex three-dimensional micro-/nanostructures

promising for a wide range of applications in integrated optics

microfluidics and microelectromechanical systems.

关键词

Keywords

femtosecond laser direct writingfemtosecond laser multiphoton ablationmicro-/nanofabricationtwo-photon polymerization

references

Cumpston BH, Ananthavel SP, Barlow S, Dyer DL, Ehrlich JEet al. Two-photon polymerization initiators for three-dimensional optical data storage and microfabrication.Nature1999;398: 51–54..

Seet KK, Mizeikis V, Juodkazis S, Misawa H. Spiral three-dimensional photonic crystals for telecommunications spectral range.Appl Phys A-Mater2006;82: 683–688..

Reinhardt C, Kiyan R, Passinger S, Stepanov AL, Ostendorf Aet al. Rapid laser prototyping of plasmonic components.Appl Phys A-Mater2007;89: 321–325..

Reinhardt C, Passinger S, Chichkov BN, Marquart C, Radko IPet al. Laser-fabricated dielectric optical components for surface plasmon polaritons.Opt Lett2006;31: 1307–1309..

Klein F, Striebel T, Fischer J, Jiang ZX, Franz CMet al. Elastic fully three-dimensional microstructure scaffolds for cell force measurements.Adv Mater2010;22: 868–871..

Cunningham LP, Veilleux MP, Campagnola PJ. Freeform multiphoton excited microfabrication for biological applications using a rapid prototyping CAD-based approach.Opt Express2006;14: 8613–8621..

Maruo S, Ikuta K, Korogi H. Submicron manipulation tools driven by light in a liquid.Appl Phys Lett2003;82: 133–135..

Maruo S, Ikuta K, Korogi H. Force-controllable, optically driven micromachines fabricated by single-step two-photon micro stereolithography.J Microelectromech S2003;12: 533–539..

Maruo S, Inoue H. Optically driven micropump produced by three-dimensional two-photon microfabrication.Appl Phys Lett2006;89: 144101..

Galajda P, Ormos P. Rotors produced and driven in laser tweezers with reversed direction of rotation.Appl Phys Lett2002;80: 4653–4655..

Galajda P, Ormos P. Complex micromachines produced and driven by light.Appl Phys Lett2001;78: 249–251..

Maruo S, Fourkas JT. Recent progress in multiphoton microfabrication.Laser Photon Rev2008;2: 100–111..

Zhang YL, Chen QD, Xia H, Sun HB. Designable 3D nanofabrication by femtosecond laser direct writing.Nano Today2010;5: 435–448..

Gattass RR, Mazur E. Femtosecond laser micromachining in transparent materials.Nat Photon2008;2: 219–225..

Baldacchini T. Novel techniques for the fabrication of two- and three-dimensional microstructures. PhD thesis, Boston College, Boston, MA, 2004.http://www.proquest.com/http://www.proquest.com/

Glezer EN, Milosavljevic M, Huang L, Finlay RJ, Her THet al. Three-dimensional optical storage inside transparent materials.Opt Lett1996;21: 2023–2025..

Marshall GD, Ams M, Withford MJ. Direct laser written waveguide-Bragg gratings in bulk fused silica.Opt Lett2006;31: 2690–2691..

Shen N, Datta D, Schaffer CB, LeDuc P, Ingber DEet al. Ablation of cytoskeletal filaments and mitochondria in live cells using a femtosecond laser nanoscissor.Mech Chem Biosyst2005;2: 17–25..

Boyd RW.Nonlinear Optics. 3rd ed. Amsterdam/Boston: Academic Press; 2008.

Goldman JR, Prybyla JA. Ultrafast dynamics of laser-excited electron distributions in silicon.Phys Rev Lett1994;72: 1364–1367..

Zappe HP.Fundamentals of Micro-optics. Cambridge/New York: Cambridge University Press; 2010.

浏览量

Downloads

CSCD

文章被引用时，请邮件提醒。

Submit

工具集

关联资源

In-channel integration of designable microoptical devices using flat scaffold-supported femtosecond-laser microfabrication for coupling-free optofluidic cell counting

Protein-based soft micro-optics fabricated by femtosecond laser direct writing

High-aspect 3D two-photon polymerization structuring with widened objective working range (WOW-2PP)