High-aspect 3D two-photon polymerization structuring with widened objective working range (WOW-2PP)

Kotaro Obata; Ayman El-Tamer; Lothar Koch; Ulf Hinze; Boris N Chichkov

doi:10.1038/lsa.2013.72

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High-aspect 3D two-photon polymerization structuring with widened objective working range (WOW-2PP)

Original Articles

- High-aspect 3D two-photon polymerization structuring with widened objective working range (WOW-2PP)
- High-aspect 3D two-photon polymerization structuring with widened objective working range (WOW-2PP)
- LSA 2013年2卷第3-4期
- Affiliations：
  
  Laser Zentrum Hannover e.V., 30419 Hannover, Germany
- Author bio：
  
  Dr BN Chichkov, Laser Zentrum Hannover e.V., Hollerithallee 8, 30419 Hannover, Germany E-mail: b.chichkov@lzh.de
- Funds：
- DOI：10.1038/lsa.2013.72
  中图分类号：
- 纸质出版日期：2013-12，
  
  网络出版日期：2013-12-06，
  
  收稿日期：2013-02-01，
  
  修回日期：2013-05-27，
  
  录用日期：2013-08-19
- Accepted：
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High-aspect 3D two-photon polymerization structuring with widened objective working range (WOW-2PP)[J]. LSA, 2013,2(3-4).

Obata, K. et al. High-aspect 3D two-photon polymerization structuring with widened objective working range (WOW-2PP). Light: Science & Applications, 2, e116 (2013).
High-aspect 3D two-photon polymerization structuring with widened objective working range (WOW-2PP)[J]. LSA, 2013,2(3-4). DOI： 10.1038/lsa.2013.72.

Obata, K. et al. High-aspect 3D two-photon polymerization structuring with widened objective working range (WOW-2PP). Light: Science & Applications, 2, e116 (2013). DOI： 10.1038/lsa.2013.72.

摘要

Abstract

We developed a novel two-photon polymerization (2PP) configuration for fabrication of high-aspect three-dimensional (3D) structures

with an overall height larger than working distance of the microscope objective used for laser beam focusing into a photosensitive material. This method is based on a modified optical 2PP setup

where a microscope objective (100× high N.A.)

immersion oil and cover glass can be moved together into the photosensitive material

resulting in an effective higher and wider objective working range (WOW-2PP). The proposed technique enables the fabrication of high-aspect structures with sub-micrometer process resolution. 3D structures with a height of 7 mm are demonstrated

which could hardly be built with the conventional 2PP set-up due to refractive index mismatch and laser beam disturbances.

关键词

Keywords

femtosecond laserlarge-scale structuringlaser material processingphotochemistrytwo-photon polymerization

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