Electrons dynamics control by shaping femtosecond laser pulses in micro/nanofabrication: modeling, method, measurement and application

Lan Jiang; An-Dong Wang; Bo Li; Tian-Hong Cui; Yong-Feng Lu

doi:10.1038/lsa.2017.134

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Electrons dynamics control by shaping femtosecond laser pulses in micro/nanofabrication: modeling, method, measurement and application

Review

- Electrons dynamics control by shaping femtosecond laser pulses in micro/nanofabrication: modeling, method, measurement and application
- Electrons dynamics control by shaping femtosecond laser pulses in micro/nanofabrication: modeling, method, measurement and application
- LSA 2018年7卷第1期
- Affiliations：
  
  1.Laser Micro/Nano-Fabrication Laboratory, School of Mechanical Engineering, Beijing Institute of Technology, Beijing 100081, China
  2.Department of Mechanical Engineering, University of Minnesota, Minneapolis, MN 55455, USA
  3.Department of Electrical Engineering, University of Nebraska-Lincoln, Lincoln, NE 68588-0511, USA
- Author bio：
  
  L Jiang, Email: jianglan@bit.edu.cn
- Funds：
- DOI：10.1038/lsa.2017.134
  中图分类号：
- 纸质出版日期：2018，
  
  网络出版日期：2018-02-09，
  
  收稿日期：2017-04-12，
  
  修回日期：2017-08-27，
  
  录用日期：2017-08-28
- Accepted：
Scan QR Code
Electrons dynamics control by shaping femtosecond laser pulses in micro/nanofabrication: modeling, method, measurement and application[J]. LSA, 2018,7(1):17134-27.

Jiang, L. et al. Electrons dynamics control by shaping femtosecond laser pulses in micro/nanofabrication: modeling, method, measurement and application. Light: Science & Applications, 7, 17134 (2018).
Electrons dynamics control by shaping femtosecond laser pulses in micro/nanofabrication: modeling, method, measurement and application[J]. LSA, 2018,7(1):17134-27. DOI： 10.1038/lsa.2017.134.

Jiang, L. et al. Electrons dynamics control by shaping femtosecond laser pulses in micro/nanofabrication: modeling, method, measurement and application. Light: Science & Applications, 7, 17134 (2018). DOI： 10.1038/lsa.2017.134.

摘要

Abstract

During femtosecond laser fabrication

photons are mainly absorbed by electrons

and the subsequent energy transfer from electrons to ions is of picosecond order. Hence

lattice motion is negligible within the femtosecond pulse duration

whereas femtosecond photon-electron interactions dominate the entire fabrication process. Therefore

femtosecond laser fabrication must be improved by controlling localized transient electron dynamics

which poses a challenge for measuring and controlling at the electron level during fabrication processes. Pump-probe spectroscopy presents a viable solution

which can be used to observe electron dynamics during a chemical reaction. In fact

femtosecond pulse durations are shorter than many physical/chemical characteristic times

which permits manipulating

adjusting

or interfering with electron dynamics. Hence

we proposed to control localized transient electron dynamics by temporally or spatially shaping femtosecond pulses

and further to modify localized transient materials properties

and then to adjust material phase change

and eventually to implement a novel fabrication method. This review covers our progresses over the past decade regarding electrons dynamics control (EDC) by shaping femtosecond laser pulses in micro/nanomanufacturing: (1) Theoretical models were developed to prove EDC feasibility and reveal its mechanisms; (2) on the basis of the theoretical predictions

many experiments are conducted to validate our EDC-based femtosecond laser fabrication method. Seven examples are reported

which proves that the proposed method can significantly improve fabrication precision

quality

throughput and repeatability and effectively control micro/nanoscale structures; (3) a multiscale measurement system was proposed and developed to study the fundamentals of EDC from the femtosecond scale to the nanosecond scale and to the millisecond scale; and (4) As an example of practical applications

our method was employed to fabricate some key structures in one of the 16 Chinese National S & T Major Projects

for which electron dynamics were measured using our multiscale measurement system.

关键词

Keywords

electrons dynamics controlfemtosecond lasermicro/nano fabricationpulse shaping

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