Ultraviolet laser photolysis of hydrocarbons for nondiamond carbon suppression in chemical vapor deposition of diamond films

Li-Sha Fan; Loic Constantin; Da-wei Li; Lei Liu; Kamran Keramatnejad; Clio Azina; Xi Huang; Hossein Rabiee Golgir; Yao Lu; Zahra Ahmadi; Fei Wang; Jeffrey Shield; Bai Cui; Jean-Francois Silvain; Yong-Feng Lu

doi:10.1038/lsa.2017.177

Go to Nature Website

Your Location：

Home >

Browse articles >

Ultraviolet laser photolysis of hydrocarbons for nondiamond carbon suppression in chemical vapor deposition of diamond films

Original Articles

- Ultraviolet laser photolysis of hydrocarbons for nondiamond carbon suppression in chemical vapor deposition of diamond films
- Ultraviolet laser photolysis of hydrocarbons for nondiamond carbon suppression in chemical vapor deposition of diamond films
- LSA 2018年7卷第3期
- Affiliations：
  
  1.Department of Electrical and Computer Engineering, University of Nebraska-Lincoln, Lincoln, NE 68588, USA
  2.Institut de Chimie de la Matière Condensée de Bordeaux-ICMCB-CNRS 87, Pessac, 33608, France
  3.Department of Mechanical and Materials Engineering, University of Nebraska-Lincoln, Lincoln, NE 68588, USA
- Author bio：
  
  YF Lu, Email: ylu2@unl.edu
- Funds：
- DOI：10.1038/lsa.2017.177
  中图分类号：
- 纸质出版日期：2018，
  
  网络出版日期：2018-04-06，
  
  收稿日期：2017-11-15，
  
  修回日期：2017-12-20，
  
  录用日期：2017-12-20
- Accepted：
Scan QR Code
Ultraviolet laser photolysis of hydrocarbons for nondiamond carbon suppression in chemical vapor deposition of diamond films[J]. LSA, 2018,7(3):17177-9.

Fan, L. S. et al. Ultraviolet laser photolysis of hydrocarbons for nondiamond carbon suppression in chemical vapor deposition of diamond films. Light: Science & Applications, 7, 17177 (2018).
Ultraviolet laser photolysis of hydrocarbons for nondiamond carbon suppression in chemical vapor deposition of diamond films[J]. LSA, 2018,7(3):17177-9. DOI： 10.1038/lsa.2017.177.

Fan, L. S. et al. Ultraviolet laser photolysis of hydrocarbons for nondiamond carbon suppression in chemical vapor deposition of diamond films. Light: Science & Applications, 7, 17177 (2018). DOI： 10.1038/lsa.2017.177.

摘要

Abstract

In this work

we demonstrate that ultraviolet (UV) laser photolysis of hydrocarbon species alters the flame chemistry such that it promotes the diamond growth rate and film quality. Optical emission spectroscopy and laser-induced fluorescence demonstrate that direct UV laser irradiation of a diamond-forming combustion flame produces a large amount of reactive species that play critical roles in diamond growth

thereby leading to enhanced diamond growth. The diamond growth rate is more than doubled

and diamond quality is improved by 4.2%. Investigation of the diamond nucleation process suggests that the diamond nucleation time is significantly shortened and nondiamond carbon accumulation is greatly suppressed with UV laser irradiation of the combustion flame in a laser-parallel-to-substrate geometry. A narrow amorphous carbon transition zone

averaging 4 nm in thickness

is identified at the film–substrate interface area using transmission electron microscopy

confirming the suppression effect of UV laser irradiation on nondiamond carbon formation. The discovery of the advantages of UV photochemistry in diamond growth is of great significance for vastly improving the synthesis of a broad range of technically important materials.

关键词

Keywords

combustion chemical vapor depositiondiamondphotolysisultraviolet laser

references

Zare NZ. Laser control of chemical reactions.Science1998;279: 1875–1879..

Crim FF. Making energy count.Science2007;316: 1707–1708..

Killelea DR, Campbell VL, Shuman NS, Utz AL. Bond-selective control of a heterogeneously catalyzed reaction.Science2008;319: 790–793..

Yan S, Wu YT, Zhang BL, Yue XF, Liu K. Do vibrational excitations of CHD3preferentially promote reactivity toward the chlorine atom?Science2007;316: 1723–1726..

Liu ZH, Feldman LC, Tolk NH, Zhang ZY, Cohen PL. Desorption of H from Si(111) by resonant excitation of the Si-H vibrational stretch mode.Science2006;312: 1024–1026..

Hideo O.Photochemistry of Small Molecules. New York: Wiley; 1978.

Fan LS, Zhou YS, Wang MX, Gao Y, Liu Let al. Resonant vibrational excitation of ethylene molecules in laser-assisted diamond deposition.Laser Phys Lett2014;11: 076002..

Fan LS, Xei ZQ, Park JB, He XN, Zhou YSet al. Synthesis of nitrogen-doped diamond films using vibrational excitation of ammonia molecules in laser-assisted combustion flames.J Laser Appl2012;24: 022001..

Golgir HR, Gao Y, Zhou YS, Fan LS, Thirugnanam Pet al. Low-temperature growth of crystalline gallium nitride films using vibrational excitation of ammonia molecules in laser-assisted metalorganic chemical vapor deposition.Cryst Growth Des2014;14: 6248–6253..

Keramatnejad K, Zhou YS, Gao Y, Golgir HR, Wang Met al. Skin effect mitigation in laser processed multi-walled carbon nanotube/copper conductors.J Appl Phys2015;118: 154311..

Wijnen MHJ. Photolysis of ethane at 1470 A.J Chem Phys1956;24: 851–854..

Michelsen HA, Salawitch RJ, Wennberg PO, Anderson JG. Production of O(1D) from photolysis of O3.Geophys Res Lett1994;21: 2227–2230..

Young RA, Black G, Slanger TG. Vacuum-ultraviolet photolysis of N2O. I. Metastable species produced at 1470 Å.J Chem Phys1968;49: 4769–4776..

Tyndall GW, Hacker NP. KrF laser-induced chemical vapor deposition of diamond.MRS Online Proc1989;162: 173..

Goto Y, Yag T, Nagai H. Synthesis of diamond films by laser-induced chemical vapor deposition.MRS Online Proc1988;129: 213..

Rebello JHD, Straub DL, Subramaniam VV. Diamond growth from a CO/CH4mixture by laser excitation of CO: laser excited chemical vapor deposition.J Appl Phys1992;72: 1133–1136..

Kitahama K, Hirata K, Nakamatsu H, Kawai S, Fujimori Net al. Synthesis of diamond by laser-induced chemical vapor deposition.Appl Phys Lett1986;49: 634–635..

Kitahama K. Reinvestigation of the carbon films prepared by ArF excimer laser-induced chemical vapor deposition.Appl Phys Lett1988;53: 1812–1814..

He XN, Shen XK, Gebre T, Xie ZQ, Jiang Let al. Spectroscopic determination of rotationaltemperature in C2H4/C2H2/O2flames for diamond growth with and without tunable CO2laser excitation.Appl Opt2010;49: 1555–1562..

Lifshitz Y, Köhler T, Frauenheim T, Guzmann I, Hoffman Aet al. The mechanism of diamond nucleation from energetic species.Science2002;297: 1531–1533..

Klein-Douwei RJH, Spaanjaars JJL, ter Meulen JJ. Two-dimensional distributions of C2, CH and OH in a diamond depositing oxyacetylene flame measured by laser induced fluorescence.J Appl Phys1995;78: 2086–2096..

Luque J, Juchmann W, Jeffries JB. Spatial density distributions of C2, C3and CH radicals by laser-induced fluorescence in a diamond depositing dc-arcjet.J Appl Phys1997;82: 2072–2081..

Komaki K, Yanagisawa M, Yamamoto I, Hirose Y. Synthesis of diamond in combustion flame under low pressures.Jpn J Appl Phys1993;32: 1814–1817..

Miller JA, Melius CF. Kinetic and thermodynamic issues in the formation of aromatic compounds in flames of aliphatic fuels.Combust Flame1992;91: 21–39..

Yalamanchi RS, Harshavardhan KS. Diamond growth in combustion flames.J Appl Phys1990;68: 5941–5943..

Gruen DM, Redfern PC, Horner DA, Zapol P, Curtiss LA. Theoretical studies on nanocrystalline diamond: nucleation by dicarbon and electronic structure of planar defects.J Phys Chem B1999;103: 5459–5467..

Redfern PC, Horner DA, Curtiss LA, Gruen DM. Theoretical studies of growth of diamond (110) from dicarbon.J Phys Chem1996;100: 11654–11663..

Shimada M, Tynan GR, Cattolica R. Rotational and translational temperature equilibrium in an inductively coupled plasma.J Vac Sci Technol A2006;24: 1878–1883..

Kim JS, Cappelli MA. Temperature measurements in low-pressure, diamond-forming, premixed flames.J Appl Phys1998;84: 4595–4602..

Fan LS, Zhou YS, Wang MX, Gao Y, Xiong Wet al. Mass spectrometric investigation of the roles of several chemical intermediates in diamond synthesis.RSC Adv2015;5: 4822–4830..

Asmussen JA, Reinhard DK.Diamond Films Handbook. New York: Marcel Dekker; 2002.

Liu HM, Dandy DS.Diamond Chemical Vapor Deposition: Nucleation and Early Growth Stages. Amsterdam: Elsevier; 1996.

Ferrari AC, Robertson J. Raman spectroscopy of amorphous, nanostructured, diamond-like carbon, and nanodiamond.Philos. Trans. R. Soc. Lond A2004;362: 2477–2512..

Bąk GW, Fabisiak K, Klimek L, Kozanecki M, Staryga E. Investigation of biaxial stresses in diamond films deposited on a silicon substrate by the HF CVD method.Opt Mater2008;30: 770–773..

Frenklach M, Spear KE. Growth mechanism of vapor-deposited diamond.J Mater Res1988;3: 133–140..

Wang MM, Zhou YS, Xie ZQ, Gao Y, He XNet al. Seed-free growth of diamond patterns on silicon predefined by femtosecond laser direct writing.Cryst Growth Des2013;13: 716–722..

Kim GH. Transmission electron microscope observation of diamond/WC interface.J Cryst Growth1997;178: 634–638..

Hamzah E, Yong TM, Mat Yajid MA. Surface morphology and bond characterization of nanocrystalline diamonds grown on tungsten carbide via hot filament chemical vapor deposition.J Cryst Growth2013;372: 109–115..

Okabe H. Photochemistry of acetylene.Can J Chem1983;61: 850–855..

Okabe H, McNesby JR. Vacuum ultraviolet photochemistry. Ⅱ. Photolysis of ethylene.J Chem Phys1962;36: 601–604..

浏览量

Downloads

CSCD

文章被引用时，请邮件提醒。

Submit

工具集

关联资源

暂无数据