Ultrafast z-scanning for high-efficiency laser micro-machining

Ting-Hsuan Chen; Romain Fardel; Craig B Arnold

doi:10.1038/lsa.2017.181

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Ultrafast z-scanning for high-efficiency laser micro-machining

Original Articles

- Ultrafast z-scanning for high-efficiency laser micro-machining
- Ultrafast z-scanning for high-efficiency laser micro-machining
- LSA 2018年7卷第3期
- Affiliations：
  
  Department of Mechanical and Aerospace Engineering, and Princeton Institute for the Science and Technology of Materials, Princeton University, Princeton, NJ 08544, USA
- Author bio：
  
  CB Arnold, Email: cbarnold@princeton.edu
- Funds：
- DOI：10.1038/lsa.2017.181
  中图分类号：
- 纸质出版日期：2018，
  
  网络出版日期：2018-04-20，
  
  收稿日期：2017-06-28，
  
  修回日期：2017-12-29，
  
  录用日期：2017-12-29
- Accepted：
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Ultrafast z-scanning for high-efficiency laser micro-machining[J]. LSA, 2018,7(3):17181-9.

Chen, T. H. et al. Ultrafast z-scanning for high-efficiency laser micro-machining. Light: Science & Applications, 3, 17181 (2018).
Ultrafast z-scanning for high-efficiency laser micro-machining[J]. LSA, 2018,7(3):17181-9. DOI： 10.1038/lsa.2017.181.

Chen, T. H. et al. Ultrafast z-scanning for high-efficiency laser micro-machining. Light: Science & Applications, 3, 17181 (2018). DOI： 10.1038/lsa.2017.181.

摘要

Abstract

High-throughput laser micro-machining demands precise control of the laser beam position to achieve optimal efficiency

but existing methods can be both time-consuming and cost-prohibitive. In this paper

we demonstrate a new high-throughput micro-machining technique based on rapidly scanning the laser focal point along the optical axis using an acoustically driven variable focal length lens. Our results show that this scanning method enables higher machining rates over a range of defocus distances and that the effect becomes more significant as the laser energy is increased. In a specific example of silicon

we achieve a nearly threefold increase in the machining rate

while maintaining sharp side walls and a small spot size. This method has great potential for improving the micro-machining efficiency of conventional systems and also opens the door to applying laser machining to workpieces with uneven topography that have been traditionally difficult to process.

关键词

Keywords

high-efficiency micro-machininglaser material processingTAG lensultrafast z-scanning

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