Laser manufacturing of spatial resolution approaching quantum limit

Xiao-Jie Wang; Hong-Hua Fang; Zhen-Ze Li; Dan Wang; Hong-Bo Sun

doi:10.1038/s41377-023-01354-5

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Laser manufacturing of spatial resolution approaching quantum limit

Original Articles

- Laser manufacturing of spatial resolution approaching quantum limit
- Laser manufacturing of spatial resolution approaching quantum limit
- LSA 2024年13卷第3期页码：421-428
- Affiliations：
  
  1.State Key Laboratory of Precision Measurement Technology and Instruments, Department of Precision Instrument, Tsinghua University, Beijing 100084, China
  2.State Key Laboratory of Integrated Optoelectronics, College of Electronic Science and Engineering, Jilin University, 2699 Qianjin Street, Changchun 130012, China
- Author bio：
  
  Hong-Hua Fang (hfang@mail.tsinghua.edu.cn)
  Hong-Bo Sun (hbsun@tsinghua.edu.cn)
- Funds：
- DOI：10.1038/s41377-023-01354-5
  中图分类号：
- 收稿日期：2023-08-02，
  
  修回日期：2023-12-07，
  
  录用日期：2023-12-08，
  
  网络出版日期：2024-01-02，
  
  纸质出版日期：2024-03-31
- Accepted：
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Laser manufacturing of spatial resolution approaching quantum limit[J]. LSA, 2024,13(3):421-428.

Wang, X. J. et al. Laser manufacturing of spatial resolution approaching quantum limit. Light: Science & Applications, 13, 421-428 (2024).
Laser manufacturing of spatial resolution approaching quantum limit[J]. LSA, 2024,13(3):421-428. DOI： 10.1038/s41377-023-01354-5.

Wang, X. J. et al. Laser manufacturing of spatial resolution approaching quantum limit. Light: Science & Applications, 13, 421-428 (2024). DOI： 10.1038/s41377-023-01354-5.

摘要

Abstract

Atomic and close-to-atom scale manufacturing is a promising avenue toward single-photon emitters

single-electron transistors

single-atom memory

and quantum-bit devices for future communication

computation

and sensing applications. Laser manufacturing is outstanding to this end for ease of beam manipulation

batch production

and no requirement for photomasks. It is

however

suffering from optical diffraction limits. Herein

we report a spatial resolution improved to the quantum limit by exploiting a threshold tracing and lock-in method

whereby the two-order gap between atomic point defect complexes and optical diffraction limit is surpassed

and a feature size of <5 nm is realized. The underlying physics is that the uncertainty of local atom thermal motion dominates electron excitation

rather than the power density slope of the incident laser. We show that the colour centre yield in hexagonal boron nitride is transformed from stochastic to deterministic

and the emission from individual sites becomes polychromatic to monochromatic. As a result

single colour centres in the regular array are deterministically created with a unity yield and high positional accuracy

serving as a step forward for integrated quantum technological applications.

关键词

Keywords

references

Kawata, S. et al. Finer features for functional microdevices. Nature 412 , 697–698 (2001)..

Sun, H. B., Matsuo, S. & Misawa, H. Three-dimensional photonic crystal structures achieved with two-photon-absorption photopolymerization of resin. Appl. Phys. Lett. 74 , 786–788 (1999)..

Sun, K. et al. Three-dimensional direct lithography of stable perovskite nanocrystals in glass. Science 375 , 307–310 (2022)..

Ródenas, A. et al. Three-dimensional femtosecond laser nanolithography of crystals. Nat. Photon. 13 , 105–109 (2019)..

Lin, Z. et al. Miniaturising artificial compound eyes based on advanced micronanofabrication techniques. Light Adv. Manuf. 2 , 84–100 (2021)..

Shiyi, L. et al. High-speed, large-area and high-precision fabrication of aspheric micro-lens array based on 12-bit direct laser writing lithography. Light Adv. Manuf. 3 , 676–686 (2022)..

Tokel, O. et al. In-chip microstructures and photonic devices fabricated by nonlinear laser lithography deep inside silicon. Nat. Photon. 11 , 639–645 (2017)..

Wei, D. Z. et al. Experimental demonstration of a three-dimensional lithium niobate nonlinear photonic cr ystal. Nat. Photon. 12 , 596–600 (2018)..

Xia, H. et al. Ferrofluids for fabrication of remotely controllable micro-nanomachines by two-photon polymerization. Adv. Mater. 22 , 3204–3207 (2010)..

Xu, B. B. et al. Programmable assembly of CdTe quantum dots into microstructures by femtosecond laser direct writing. J. Mater. Chem. C. 1 , 4699–4704 (2013)..

Sugioka, K. & Cheng, Y. Ultrafast lasers—reliable tools for advanced materials processing. Light Sci. Appl. 3 , e149 (2014)..

Haoyi, Y. et al. Three-dimensional direct laser writing of PEGda hydrogel microstructures with low threshold power using a green laser beam. Light Adv. Manuf. 2 , 31–38 (2021)..

Andrea, T. et al. 3D-printed miniature spectrometer for the visible range with a 100 × 100 μm 2 footprint. Light Adv. Manuf. 2 , 20–30 (2021)..

Zhang, X. L. et al. Non-Abelian braiding on photonic chips. Nat. Photon. 16 , 390–395 (2022)..

Sun, Y. K. et al. Non-Abelian Thouless pumping in photonic waveguides. Nat. Phys. 18 , 1080–1085 (2022)..

Ma, Z. C. et al. Femtosecond laser programmed artificial musculoskeletal systems. Nat. Commun. 11 , 4536 (2020)..

Li, L. J. et al. Achieving λ/20 resolution by one-color initiation and deactivation of polymerization. Science 324 , 910–913 (2009)..

Gan, Z. S. et al. Three-dimensional deep sub-diffraction optical beam lithography with 9 nm feature size. Nat. Commun. 4 , 2061 (2013)..

Li, Z. Z. et al. O-FIB: far-field-induced near-field breakdown for direct nanowriting in an atmospheric environment. Light Sci. Appl. 9 , 41 (2020)..

Li, Z. Z. et al. Super stealth dicing of transparent solids with nanometric precision. arXiv https://doi.org/10.48550/arXiv.2308.02352 https://doi.org/10.48550/arXiv.2308.02352 (2023)..

Liu, S. F. et al. 3D nanoprinting of semiconductor quantum dots by photoexcitation-induced chem ical bonding. Science 377 , 1112–1116 (2022)..

Chen, Y. C. et al. Laser writing of coherent colour centres in diamond. Nat. Photon. 11 , 77–80 (2017)..

Chen, Y. C. et al. Laser writing of scalable single color centers in silicon carbide. Nano Lett. 19 , 2377–2383 (2019)..

Wang, X. J. et al. Laser writing of color centers. Laser Photon. Rev. 16 , 2100029 (2022)..

Chen, Y. C. et al. Laser writing of individual nitrogen-vacancy defects in diamond with near-unity yield. Optica . 6 , 662–667 (2019)..

Yurgens, V. et al. Low-charge-noise nitrogen-vacancy centers in diamond created using laser writing with a solid-immersion lens. ACS Photon. 8 , 1726–1734 (2021)..

Gan, L. et al. Large-scale, high-yield laser fabrication of bright and pure single-photon emitters at room temperature in hexagonal boron nitride. ACS Nano 16 , 14254–14261 (2022)..

Wang, X. J. et al. Quantum emitters with narrow band and high debye–waller factor in aluminum nitride written by femtosecond laser. Nano Lett. 23 , 2743–2749 (2023)..

Hou, S. Y. et al. Localized emission from laser-irradiated defects in 2D hexagonal boron nitride. 2D Mater. 5 , 015010 (2018)..

Wang, X. J. et al. Enhanced brightness of quantum emitters via in situ coupling to the dielectric microsphere. Appl. Phys. Lett. 123 , 133106 (2023)..

Grosso, G. et al. Tunable and high-purity room temperature single-photon emission from atomic defects in hexagonal boron nitride. Nat. Commun. 8 , 705 (2017)..

Tran, T. T. et al. Quantum emission from hexagonal boron nitride monolayers. Nat. Nanotechnol. 11 , 37–41 (2016)..

Joglekar, A. P. et al. Optics at critical intensity: applications to nanomorphing. Proc. Natl Acad. Sci. USA 101 , 5856–5861 (2004)..

Rethfeld, B. et al. Ultrafast dynamics of nonequilibrium electrons in metals under femtosecond laser irradiation. Phys. Rev. B 65 , 214303 (2002)..

Christensen, B. H., Vestentoft, K. & Balling, P. Short-pulse ablation rates and the two-temperature model. Appl. Surf. Sci. 253 , 6347–6352 (2007)..

Dombi, P. et al. Strong-field nano-optics. Rev. Mod. Phys. 92 , 025003 (2020)..

Kruchinin, S. Y., Krausz, F. & Yakovlev, V. S. Colloquium : strong-field phenomena in periodic systems. Rev. Mod. Phys. 90 , 021002 (2018)..

Sun, J. W. et al. Splitting of type-Ⅰ (N-B, P-Al) and type-Ⅱ (N-Al, N-Ga) donor-acceptor pair spectra in 3C-SiC. Phys. Rev. B 83 , 195201 (2011)..

Choyke, W. J. & Patrick, L. Luminescence of donor-acceptor pairs in cubic SiC. Phys. Rev. B 2 , 4959–4965 (1970)..

Dischler, B. et al. Resolved donor-acceptor pair-recombination lines in diamond luminescence. Phys. Rev. B 49 , 1685–1689 (1994)..

Tan, Q. H. et al. Donor-acceptor pair quantum emitters in hexagonal boron nitride. Nano Lett. 22 , 1331–1337 (2022)..

Ziegler, J. et al. Deterministic quantum emitter formation in hexagonal boron nitride via controlled edge creation. Nano Lett. 19 , 2121–2127 (2019)..

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