Metasurface array for single-shot spectroscopic ellipsometry

Shun Wen; Xinyuan Xue; Shuai Wang; Yibo Ni; Liqun Sun; Yuanmu Yang

doi:10.1038/s41377-024-01396-3

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Metasurface array for single-shot spectroscopic ellipsometry

Original Articles

- Metasurface array for single-shot spectroscopic ellipsometry
- Metasurface array for single-shot spectroscopic ellipsometry
- Light: Science & Applications 2024年13卷第5期页码：835-842
- Affiliations：
  
  Department of Precision Instrument, State Key Laboratory of Precision Measurement Technology and Instruments, Tsinghua University, Beijing 100084, China
- Author bio：
  
  Yuanmu Yang (ymyang@tsinghua.edu.cn)
- Funds：
- DOI：10.1038/s41377-024-01396-3
  中图分类号：
- 收稿：2023-09-27，
  
  修回：2024-01-03，
  
  录用：2024-01-24，
  
  网络出版：2024-04-10，
  
  纸质出版：2024-05-31
- Accepted：
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Shun Wen, Xinyuan Xue, Shuai Wang, 等. Metasurface array for single-shot spectroscopic ellipsometry[J]. Light: Science & Applications, 2024,13(5):835-842.

Wen, S. et al. Metasurface array for single-shot spectroscopic ellipsometry. Light: Science & Applications, 13, 835-842 (2024).
Shun Wen, Xinyuan Xue, Shuai Wang, 等. Metasurface array for single-shot spectroscopic ellipsometry[J]. Light: Science & Applications, 2024,13(5):835-842. DOI： 10.1038/s41377-024-01396-3.

Wen, S. et al. Metasurface array for single-shot spectroscopic ellipsometry. Light: Science & Applications, 13, 835-842 (2024). DOI： 10.1038/s41377-024-01396-3.

摘要

Abstract

Spectroscopic ellipsometry is a potent method that is widely adopted for the measurement of thin film thickness and refractive index. Most conventional ellipsometers utilize mechanically rotating polarizers and grating-based spectrometers for spectropolarimetric detection. Here

we demonstrated a compact metasurface array-based spectroscopic ellipsometry system that allows single-shot spectropolarimetric detection and accurate determination of thin film properties without any mechanical movement. The silicon-based metasurface array with a highly anisotropic and diverse spectral response is combined with iterative optimization to reconstruct the full Stokes polarization spectrum of the light reflected by the thin film with high fidelity. Subsequently

the film thickness and refractive index can be determined by fitting the measurement results to a proper material model with high accuracy. Our approach opens up a new pathway towards a compact and robust spectroscopic ellipsometry system for the high throughput measurement of thin film properties.

关键词

Keywords

references

McCrackin, F. L. et al. Measurement of the thickness and refractive index of very thin films and the optical properties of surfaces by ellipsometry. J. Res. Natl. Bur. Stand.- A. Phys. Chem. 67A , 363–377 (1963)..

Azzam, R. M. A., Bashara, N. M. & Ballard, S. S. Ellipsometry and polarized light. Phys. Today 31 , 72 (1978)..

Vedam, K. Spectroscopic ellipsometry: a historical overview. Thin Solid Films 313-314 , 1–9 (1998)..

Kwak, H. et al. Non-destructive thickness characterisation of 3D multilayer semiconductor devices using optical spectral measurements and machine learning[J ] . Light: Adv. Manufact. 2 , 1 (2021)..

Irene, E. A. Applications of spectroscopic ellipsometry to microelectronics. Thin Solid Films 233 , 96–111 (1993)..

Schubert, M. Infrared Ellipsometry on Semiconductor Layer Structures - Phonons, Plasmons, and Polaritons . (Berlin: Springer, 2004).

Fujiwara, H. & Kondo, M. Real-time monitoring and process control in amorphous/crystalline silicon heterojunction solar cells by spectroscopic ellipsometry and infrared spectroscopy. Appl. Phys. Lett. 86 , 032112 (2005)..

Collins, R. W. & Koh, J. Dual rotating-compensator multichannel ellipsometer: instrument design for real-time Mueller matrix spectroscopy of surfaces and films. J. Opt. Soc. Am. A 16 , 1997–2006 (1999)..

Shan, A. et al. High-speed imaging/mapping spectroscopic ellipsometry for in-line analysis of roll-to-roll thin-film photovoltaics. IEEE J. Photovolt. 4 , 355–361 (2014)..

Petrik, P. & Fried, M. Mapping and imaging of thin films on large surfaces. Phys. Status Solidi (A) 219 , 2100800 (2022)..

Jellison, G. E. & Modine, F. A. Two-modulator generalized ellipsometry: theory. Appl. Opt. 36 , 8190–8198 (1997)..

Azzam, R. M. A. Division-of -amplitude photopolarimeter (DOAP) for the simultaneous measurement of all four stokes parameters of light. Opt. Acta: Int. J. Opt. 29 , 685–689 (1982)..

Lee, J. et al. Rotating-compensator multichannel ellipsometry: applications for real time stokes vector spectroscopy of thin film growth. Rev. Sci. Instrum. 69 , 1800–1810 (1998)..

Fujiwara, H. Spectroscopic Ellipsometry: Principles and Applications . (Hoboken: Wiley, 2007).

Chen, C., An, I. & Collins, R. W. Multichannel mueller matrix ellipsometry for simultaneous real-time measurement of bulk isotropic and surface anisotropic complex dielectric functions of semiconductors. Phys. Rev. Lett. 90 , 217402 (2003)..

Collins, R. W. et al. Multichannel ellipsometry. in Handbook of Ellipsometry (eds Tompkins, H. G. & Irene, E. A.) (Norwich: William Andrew Publishing, 2005).

Mukherjee, D. & Petrik, P. Real-time ellipsometry at high and low temperatures. ACS Omega 8 , 3684–3697 (2023)..

Minamikawa, T. et al. Dual-comb spectroscopic ellipsometry. Nat. Commun. 8 , 610 (2017)..

Zhang, R. X. et al. Dynamic ellipsometry measurement based on a simplified phase-stable dual-comb system. Optics Express 30 , 7806–7820 (2022)..

Yu, N. F. et al. Light propagation with phase discontinuities: generalized laws of reflection and refraction. Science 334 , 333–337 (2011)..

Lin, D. M. et al. Dielectric gradient metasurface optical elements. Science 345 , 298–302 (2014)..

Yu, N. F. & Capasso, F. Flat optics with designer metasurfaces. Nat. Mater. 13 , 139–150 (2014)..

Yang, Y. M. et al. Dielectric meta-reflectarray for broadband linear polarization conversion and optical vortex generation. Nano Lett. 14 , 1394–1399 (2014)..

Zhu, Y. et al. Metasurfaces designed by a bidirectional deep neural network and iterative algorithm for generating quantitative field distributions[J ] . Light: Adv. Manufact. 4 , 9 (2023)..

Lee, G. Y. et al. Complete amplitude and phase control of light using broadband holographic metasurfaces. Nanoscale 10 , 4237–4245 (2018)..

Overvig, A. C. et al. Dielectric metasurfaces for complete and independent control of the optical amplitude and phase. Light Sci. Appl. 8 , 92 (2019)..

Kwon, H. et al. Single-shot quantitative phase gradient microscopy using a system of multifunctional metasurfaces. Nat. Photonics 14 , 109–114 (2020)..

Wen, L. et al. Broad-band spatial light modulation with dual epsilon-near-zero modes. Opto-Electron. Adv. 5 , 200093 (2022)..

Wei, J. X. et al. Mid-infrared semimetal polarization detectors with configurable polarity transition. Nat. Photonics 15 , 614–621 (2021)..

Dorrah, A. H. et al. Structuring total angular momentum of light along the propagation direction with polarization-controlled meta-optics. Nat. Commun. 12 , 6249 (2021)..

Shen, Z. C. et al. Monocular metasurface camera for passive single-shot 4D imaging. Nat. Commun. 14 , 1035 (2023)..

Sautter, J. et al. Active tuning of all-dielectric metasurfaces. ACS Nano 9 , 4308–4315 (2015)..

Devlin, R. C. et al. Broadband high-efficiency dielectric metasurfaces for the visible spectrum. Proc. Natl. Acad. Sci. USA 113 , 10473–10478 (2016)..

Zhao, F. et al. Metalens-assisted system for underwater imaging. Laser Photonics Rev. 15 , 2100097 (2021)..

Ren, Y. Z. et al. Full-stokes polarimetry for visible light enabled by an all-dielectric metasurface. Adv. Photonics Res. 3 , 2100373 (2022)..

Arbabi, E. et al. Full-stokes imaging polarimetry using dielectric metasurfaces. ACS Photonics 5 , 3132–3140 (2018)..

Yang, Z. Y. et al. Generalized Hartmann-Shack array of dielectric metalens sub-arrays for polarimetric beam profiling. Nat. Commun. 9 , 4607 (2018)..

Rubin, N. A. et al. Matrix Fourier optics enables a compact full-Stokes polarization camera. Science 365 , eaax1839 (2019)..

Shaltout, A. et al. Photonic spin Hall effect in gap-plasmon metasurfaces for on-chip chiroptical spectroscopy. Optica 2 , 860–863 (2015)..

Pors, A., Nielsen, M. G. & Bozhevolnyi, S. I. Plasmonic metagratings for simultaneous determination of Stokes parameters. Optica 2 , 716–723 (2015)..

Tittl, A. et al. Imaging-based molecular barcoding with pixelated dielectric metasurfaces. Science 360 , 1105–1109 (2018)..

Yesilkoy, F. et al. Ultrasensitive hyperspectral imaging and biodetection enabled by dielectric metasurfaces. Nat. Photonics 13 , 390–396 (2019)..

Wang, Z. et al. Single-shot on-chip spectral sensors based on photonic crystal slabs. Nat. Commun. 10 , 1020 (2019)..

Yoon, H. H. et al. Miniaturized spectrometers with a tunable van der Waals junction. Science 378 , 296–299 (2022)..

Yang, Z. Y. et al. Miniaturization of optical spectrometers. Science 371 , eabe0722 (2021)..

Zhu, Y. B. et al. Compact CMOS spectral sensor for the visible spectrum. Photonics Res. 7 , 961–966 (2019)..

Cen, Q. et al. Microtaper leaky-mode spectrometer with picometer resolution. eLight 3 , 9 (2023)..

Zhang, W. Y. et al. Deeply learned broadband encoding stochastic hyperspectral imaging. Light Sci. Appl. 10 , 108 (2021)..

Xiong, J. et al. Dynamic brain spectrum acquired by a real-time ultraspectral imaging chip with reconfigurable metasurfaces. Optica 9 , 461–468 (2022)..

Yang, J. W. et al. Ultraspectral imaging based on metasurfaces with freeform shaped meta-atoms. Laser Photonics Rev. 16 , 2100663 (2022)..

Yako, M. et al. Video-rate hyperspectral camera based on a CMOS-compatible random array of Fabry-Pérot filters. Nat. Photonics 17 , 218–223 (2023)..

Chen, W. T. et al. Integrated plasmonic metasurfaces for spectropolarimetry. Nanotechnology 27 , 224002 (2016)..

Maguid, E. et al. Photonic spin-controlled multifunctional shared-aperture antenna array. Science 352 , 1202–1206 (2016)..

Ding, F. et al. Beam-size-invariant spectropolarimeters using gap-plasmon metasurfaces. ACS Photonics 4 , 943–949 (2017)..

Chen, Y. T. et al. On-chip spectropolarimetry by fingerprinting with random surface arrays of nanoparticles. ACS Photonics 5 , 1703–1710 (2018)..

Shinoda, K. & Ohtera, Y. Alignment-free filter array: snapshot multispectral polarization imaging based on a Voronoi-like random photonic crystal filter. Opt. Express 28 , 38867–38882 (2020)..

Ni, Y. B. et al. Computational spectropolarimetry with a tunable liquid crystal metasurface. eLight 2 , 23 (2022)..

Wu, C. et al. Spectrally selective chiral silicon metasurfaces based on infrared Fano resonances. Nat. Commun. 5 , 3892 (2014)..

Wang, S. et al. Arbitrary polarization conversion dichroism metasurfaces for all-in-one full Poincaré sphere polarizers. Light Sci. Appl. 10 , 24 (2021)..

Molesky, S. et al. Inverse design in nanophotonics. Nat. Photonics 12 , 659–670 (2018)..

Piggott, A. Y. et al. Inverse design and demonstration of a compact and broadband on-chip wavelength demultiplexer. Nat. Photonics 9 , 374–377 (2015)..

Wang, S. et al. Metasurface-based solid poincaré sphere polarizer. Phys. Rev. Lett. 130 , 123801 (2023)..

Herzinger, C. M. et al. Ellipsometric determination of optical constants for silicon and thermally grown silicon dioxide via a multi-sample, multi-wavelength, multi-angle investigation. J. Appl. Phys. 83 , 3323–3336 (1998)..

Tua, D. et al. Imaging-based intelligent spectrometer on a plasmonic rainbow chip. Nat. Commun. 14 , 1902 (2023)..

Liu, J. C. et al. Machine learning powered ellipsometry. Light Sci. Appl. 10 , 55 (2021)..

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