Ultra-low loss silicon nitride becomes even cooler

Dawn T. H. Tan; Xavier X. Chia

doi:10.1038/s41377-024-01576-1

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Ultra-low loss silicon nitride becomes even cooler

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- Ultra-low loss silicon nitride becomes even cooler
- Ultra-low loss silicon nitride becomes even cooler
- LSA 2024年13卷第10期页码：1997-1999
- Affiliations：
  
  1.Photonics Devices and Systems Group, Singapore University of Technology and Design, Singapore, Singapore
  2.Institute of Microelectronics, Agency for Science Technology and Research (A*STAR), Singapore, Singapore
- Author bio：
  
  Dawn T. H. Tan (dawn_tan@sutd.edu.sg)
- Funds：
- DOI：10.1038/s41377-024-01576-1
  中图分类号：
- 网络出版日期：2024-09-05，
  
  纸质出版日期：2024-10-31
- Accepted：
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Ultra-low loss silicon nitride becomes even cooler[J]. LSA, 2024,13(10):1997-1999.

Tan, D. T. H. & Chia, X. X. Ultra-low loss silicon nitride becomes even cooler. Light: Science & Applications, 13, 1997-1999 (2024).
Ultra-low loss silicon nitride becomes even cooler[J]. LSA, 2024,13(10):1997-1999. DOI： 10.1038/s41377-024-01576-1.

Tan, D. T. H. & Chia, X. X. Ultra-low loss silicon nitride becomes even cooler. Light: Science & Applications, 13, 1997-1999 (2024). DOI： 10.1038/s41377-024-01576-1.

摘要

Abstract

Ultra-low loss silicon nitride realized using deuterated precursors and low thermal budgets well within backend-of-line CMOS processing may accelerate widespread proliferation of their use.

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references

Tsang, H. K. et al. Optical dispersion, two-photon absorption and self-phase modulation in silicon waveguides at 1.5 μm wavelength. Appl. Phys. Lett. 80 , 416–418 (2002)..

Ikeda, K. et al. Thermal and Kerr nonlinear properties of plasma-deposited silicon nitride/silicon dioxide waveguides. Opt. Express 16 , 12987–12994 (2008)..

Tan, D. T. H. et al. Group velocity dispersion and self phase modulation in silicon nitride waveguides. Appl. Phys. Lett. 96 , 061101 (2010)..

Levy, J. S. et al. CMOS-compatible multiple-wavelength oscillator for on-chip optical interconnects. Nat. Photonics 4 , 37–40 (2010)..

Moss, D. J. et al. New CMOS-compatible platforms based on silicon nitride and Hydex for nonlinear optics. Nat. Photonics 7 , 597–607 (2013)..

Herr, T. et al. Universal formation dynamics and noise of Kerr-frequency combs in microresonators. Nat. Photonics 6 , 480–487 (2012)..

Brasch, V. et al. Photonic chip-based optical frequency comb using soliton Cherenkov radiation. Science 351 , 357–360 (2016)..

Kippenberg, T. J. et al. Dissipative Kerr solitons in optical microresonators. Science 361 , eaan8083 (2018)..

Marin-Palomo, P. et al. Microresonator-based solitons for massively parallel coherent optical communications. Nature 546 , 274–279 (2017)..

Fülöp, A. et al. High-order coherent communications using mode-locked dark-pulse Kerr combs from microresonators. Nat. Commun. 9 , 1598 (2018)..

Rizzo, A. et al. Massively scalable Kerr comb-driven silicon photonic link. Nat. Photonics 17 , 781–790 (2023)..

Huang, S. W. et al. A broadband chip-scale optical frequency synthesizer at 2.7×10 −16 relative uncertainty. Sci. Adv. 2 , e1501489 (2016)..

Riemensberger, J. et al. A photonic integrated continuous-travelling-wave parametric amplifier. Nature 612 , 56–61 (2022)..

Liu, K. K. et al. 36 Hz integral linewidth laser based on a photonic integrated 4.0 m coil resonator. Optica 9 , 770–775 (2022)..

Pfeiffer, M. H. P. et al. Ultra-smooth silicon nitride waveguides based on the Damascene reflow process: fabrication and loss origins. Optica 5 , 884–892 (2018)..

Ji, X. C. et al. Methods to achieve ultra-high quality factor silicon nitride resonators. APL Photonics 6 , 071101 (2021)..

Ay, F. & Aydinli, A. Comparative investigation of hydrogen bonding in silicon based PECVD grown dielectrics for optical waveguides. Opt. Mater. 26 , 33–46 (2004)..

Bose, D. et al. Anneal-free ultra-low loss silicon nitride integrated photonics. Light Sci. Appl. 13 , 156 (2024)..

Chiles, J. et al. Deuterated silicon nitride photonic devices for broadband optical frequency comb generation. Opt. Lett. 43 , 1527–1530 (2018)..

Chia, X. X. et al. Optical characterizati on of deuterated silicon-rich nitride waveguides. Sci. Rep. 12 , 12697 (2022)..

Xie, Y. Z. et al. Soliton frequency comb generation in CMOS-compatible silicon nitride microresonators. Photonics Res. 10 , 1290–1296 (2022)..

Chia, X. X. & Tan, D. T. H. Deuterated SiNx: a low-loss, back-end CMOS-compatible platform for nonlinear integrated optics. Nanophotonics 12 , 1613–1631 (2023)..

Chia, X. X. et al. Low-power four-wave mixing in deuterated silicon-rich nitride ring resonators. J. Lightwave Technol. 41 , 3115–3130 (2023)..

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