A meta-lens array-based Shack-Hartmann wavefront sensor has been developed to break the limits imposed by the size and curvature of traditional micro-lenses
which significantly improves both sampling density and angular resolution of phase measurement. Metasurface advances the field of optical phase measurement to smaller-scale complex wavefront characterization.
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references
Zuo, C. et al. Deep learning in optical metrology: a review. Light Sci. Appl. 11 , 39 (2022)..
Zhao, M. X. et al. Phase characterisation of metalenses. Light Sci. Appl. 10 , 52 (2021)..
Feng, S. J. et al. Fringe pattern analysis using deep learning. Adv. Photon. 1 , 025001 (2019)..
Liang, J. Z. et al. Objective measurement of wave aberrations of the human eye with the use of a Hartmann–Shack wave-front sensor. J. Opt. Soc. Am. A 11 , 1949–1957 (1994)..
Platt, B. C. & Shack, R. History and principles of Shack-Hartmann wavefront sensing. J. Refract. Surg. 17 , S573–S577 (2001)..
Soldevila, F. et al. Phase imaging by spatial wavefront sampling. Optica 5 , 164–174 (2018)..
Liu, X. Y. et al. Meta-lens particle image velocimetry. Adv. Mater. 36 , 2310134 (2024)..
Lin, R. J. et al. Achromatic metalens array for full-colour light-field imaging. Nat. Nanotechnol. 14 , 227–231 (2019)..
Chen, M. K. et al. A meta-device for intelligent depth perception. Adv. Mater. 35 , 2107465 (2023)..
Li, L. et al. Metalens-array–based high-dimensional and multiphoton quantum source. Science 368 , 1487–1490 (2020)..
Go, G. H. et al. Meta Shack–Hartmann wavefront sensor with large sampling density and large angular field of view: phase imaging of complex objects. Light Sci Appl. 13 , 187 (2024)..