A hybrid single quantum dot coupled cavity on a CMOS-compatible SiC photonic chip for Purcell-enhanced deterministic single-photon emission

Yifan Zhu; Runze Liu; Ailun Yi; Xudong Wang; Yuanhao Qin; Zihao Zhao; Junyi Zhao; Bowen Chen; Xiuqi Zhang; Sannian Song; Yongheng Huo; Xin Ou; Jiaxiang Zhang

doi:10.1038/s41377-024-01676-y

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A hybrid single quantum dot coupled cavity on a CMOS-compatible SiC photonic chip for Purcell-enhanced deterministic single-photon emission

Original Articles

- A hybrid single quantum dot coupled cavity on a CMOS-compatible SiC photonic chip for Purcell-enhanced deterministic single-photon emission
- A hybrid single quantum dot coupled cavity on a CMOS-compatible SiC photonic chip for Purcell-enhanced deterministic single-photon emission
- LSA 2025年14卷第4期页码：948-958
- Affiliations：
  
  1.State Key Laboratory of Materials for Integrated Circuits, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, 865 Changning Road, Shanghai 200050, China
  2.Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing 100049, China
  3.Department of Physics, The Chinese University of Hong Kong, Hong Kong 999077, China
  4.Hefei National Research Center for Physical Sciences, the Microscale and School of Physical Sciences, University of Science and Technology of China, Hefei 230026, China
  5.Shanghai Research Center for Quantum Science and CAS Center for Excellence in Quantum Information and Quantum Physics, University of Science and Technology of China, Shanghai 201315, China
- Author bio：
  
  Yongheng Huo (yongheng@ustc.edu.cn)
  Xin Ou (ouxin@mail.sim.ac.cn)
  Jiaxiang Zhang (jiaxiang.zhang@mail.sim.ac.cn)
- Funds：
- DOI：10.1038/s41377-024-01676-y
  中图分类号：
- 收稿日期：2024-05-01，
  
  修回日期：2024-10-25，
  
  录用日期：2024-10-28，
  
  网络出版日期：2025-02-14，
  
  纸质出版日期：2025-04-30
- Accepted：
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A hybrid single quantum dot coupled cavity on a CMOS-compatible SiC photonic chip for Purcell-enhanced deterministic single-photon emission[J]. LSA, 2025,14(4):948-958.

Zhu, Y. F. et al. A hybrid single quantum dot coupled cavity on a CMOS-compatible SiC photonic chip for Purcell-enhanced deterministic single-photon emission. Light: Science & Applications, 14, 948-958 (2025).
A hybrid single quantum dot coupled cavity on a CMOS-compatible SiC photonic chip for Purcell-enhanced deterministic single-photon emission[J]. LSA, 2025,14(4):948-958. DOI： 10.1038/s41377-024-01676-y.

Zhu, Y. F. et al. A hybrid single quantum dot coupled cavity on a CMOS-compatible SiC photonic chip for Purcell-enhanced deterministic single-photon emission. Light: Science & Applications, 14, 948-958 (2025). DOI： 10.1038/s41377-024-01676-y.

摘要

Abstract

The ability to control nonclassical light emission from a single quantum emitter by an integrated cavity may unleash new perspectives for integrated photonic quantum applications. However

coupling a single quantum emitter to cavity within photonic circuitry towards creation of the Purcell-enhanced single-photon emission is elusive due to the complexity of integrating active devices in low-loss photonic circuits. Here we demonstrate a hybrid micro-ring resonator (HMRR) coupled with self-assembled quantum dots (QDs) for cavity-enhanced deterministic single-photon emission. The HMRR

cavity supports whispering-gallery modes with quality factors up to 7.8×10

. By further introducing a micro-heater

we show that the photon emission of QDs can be locally and dynamically tuned over one free spectral ranges of the HMRR (~ 4 nm). This allows precise tuning of individual QDs in resonance with the cavity modes

thereby enhancing single-photon emission with a Purcell factor of about 4.9. Our results on the hybrid integrated cavities coupled with two-level quantum emitters emerge as promising devices for chip-based scalable photonic quantum applications.

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references

Wang, J. W. et al. Integrated photonic quantum technologies. Nat. Photonics 14 , 273–284 (2020)..

Bounouar, S., Davanco, M.&Reitzenstein, S. Quantum integrated photonic circuits. In Semiconductors and Semimetals vol. 105 (eds Cundiff, S. T.&Kira, M.) (Amsterdam: Elsevier, 153-234. 2020)

Politi, A., Matthews, J. C. F. & O’Brien, J. L. Shor’s quantum factoring algorithm on a photonic chip. Science 325 , 1221 (2009)..

O’Brien, J. L., Furusawa, A. & Vučković, J. Photonic quantum technologies. Nat. Photonics 3 , 687–695 (2009)..

Harris, N. C. et al. Large-scale quantum photonic circ uits in silicon. Nanophotonics 5 , 456–468 (2016)..

Wang, J. et al. Multidimensional quantum entanglement with large-scale integrated optics. Science 360 , 285–291 (2018)..

Sibson, P. et al. Integrated silicon photonics for high-speed quantum key distribution. Optica 4 , 172–177 (2017)..

Paraïso, T. K. et al. A photonic integrated quantum secure communication system. Nat. Photonics 15 , 850–856 (2021)..

Arrazola, J. M. et al. Quantum circuits with many photons on a programmable nanophotonic chip. Nature 591 , 54–60 (2021)..

Yu, S. et al. A von-Neumann-like photonic processor and its application in studying quantum signature of chaos. Light Sci. Appl. 13 , 74 (2024)..

Yi, A. L. et al. Silicon carbide for integrated photonics. Appl. Phys. Rev. 9 , 031302 (2022)..

Lukin, D. M. et al. 4H-silicon-carbide-on-insulator for integrated quantum and nonlinear photo nics. Nat. Photonics 14 , 330–334 (2020)..

Powell, K. et al. Integrated silicon carbide electro-optic modulator. Nat. Commun. 13 , 1851 (2022)..

Yi, A. L. et al. Wafer-scale 4H-silicon carbide-on-insulator (4H–SiCOI) platform for nonlinear integrated optical devices. Optical Mater. 107 , 109990 (2020)..

Lukin, D. M., Guidry, M. A. & Vučković, J. Integrated quantum photonics with silicon carbide: challenges and prospects. PRX Quantum 1 , 020102 (2020)..

Wang, C. L. et al. High-Q microresonators on 4H-silicon-carbide-on-insulator platform for nonlinear photonics. Light Sci. Appl. 10 , 139 (2021)..

Yang, J. et al. Inverse-designed silicon carbide quantum and nonlinear photonics. Light Sci. Appl. 12 , 201 (2023)..

Senellart, P., Solomon, G. & White, A. High-performance semiconductor quantum-dot single-photon sources. Nat. Nanotechnol. 12 , 1026–1039 (2017)..

Rao, M. J. et al. Single photon emitter deterministically coupled to a topological corner state. Light Sci. Appl. 13 , 19 (2024)..

Stachurski, J. et al. Single photon emission and recombination dynamics in self-assembled GaN/AlN quantum dots. Light Sci. Appl. 11 , 114 (2022)..

Liu, J. et al. A solid-state source of strongly entangled photon pairs with high brightness and indistinguishability. Nat. Nanotechnol. 14 , 586–593 (2019)..

Tomm, N. et al. A bright and fast source of coherent single photons. Nat. Nanotechnol. 16 , 399–403 (2021)..

Yang, J. W. et al. Tunable quantum dots in monolithic Fabry-Perot microcavities for high-performance single-photon sources. Light Sci. Appl. 13 , 33 (2024)..

He, Y. M. et al. Deterministic implementation of a bright, on-demand single-photon source with near-unity indistinguishability via quantum dot imaging. Optica 4 , 802–808 (2017)..

Ginés, L. et al. High extraction efficiency source of photon pairs based on a quantum dot embedded in a broadband micr opillar cavity. Phys. Rev. Lett. 129 , 033601 (2022)..

Li, X. S. et al. Bright semiconductor single-photon sources pumped by heterogeneously integrated micropillar lasers with electrical injections. Light Sci. Appl. 12 , 65 (2023)..

Huber, D. et al. Highly indistinguishable and strongly entangled photons from symmetric GaAs quantum dots. Nat. Commun. 8 , 15506 (2017)..

Wei, Y. J. et al. Deterministic and robust generation of single photons from a single quantum dot with 99.5% indistinguishability using adiabatic rapid passage. Nano Lett. 14 , 6515–6519 (2014)..

Ding, X. et al. On-demand single photons with high extraction efficiency and near-unity indistinguishability from a resonantly driven quantum dot in a micropillar. Phys. Rev. Lett. 116 , 020401 (2016)..

Dusanowski, L. et al. Purcell-enhanced and indistinguishable single-photon generation from quantum dots coupled to on-chip integrated ring resonators. Nano Lett. 20 , 6357–6363 (2020)..

Katsumi, R. et al. Transfer-printed single-photon sources coupled to wi re waveguides. Optica 5 , 691–694 (2018)..

Arcari, M. et al. Near-unity coupling efficiency of a quantum emitter to a photonic crystal waveguide. Phys. Rev. Lett. 113 , 093603 (2014)..

Kim, J. H. et al. Hybrid integration methods for on-chip quantum photonics. Optica 7 , 291–308 (2020)..

Elshaari, A. W. et al. Hybrid integrated quantum photonic circuits. Nat. Photonics 14 , 285–298 (2020)..

Kim, J. H. et al. Hybrid Integration of solid-state quantum emitters on a silicon photonic chip. Nano Lett. 17 , 7394–7400 (2017)..

Osada, A. et al. Strongly coupled single-quantum-dot–cavity system integrated on a CMOS-processed silicon photonic chip. Phys. Rev. Appl. 11 , 024071 (2019)..

Davanco, M. et al. Heterogeneous integration for on-chip quantum photonic circuits with single quantum dot devices. Nat. Commun. 8 , 889 (2017)..

Elshaari, A. W. et al. On-c hip single photon filtering and multiplexing in hybrid quantum photonic circuits. Nat. Commun. 8 , 379 (2017)..

Zhu, Y. F. et al. Hybrid integration of deterministic quantum dot-based single-photon sources with CMOS-compatible silicon carbide photonics. Laser Photonics Rev. 16 , 2200172 (2022)..

Patel, R. B. et al. Two-photon interference of the emission from electrically tunable remote quantum dots. Nat. Photonics 4 , 632–635 (2010)..

Barclay, P. E. et al. Hybrid nanocavity resonant enhancement of color center emission in diamond. Phys. Rev. X 1 , 011007 (2011)..

Faraon, A. et al. Resonant enhancement of the zero-phonon emission from a colour centre in a diamond cavity. Nat. Photonics 5 , 301–305 (2011)..

Dusanowski et al. On-chip Hong–Ou–Mandel interference from separate quantum dot emitters in an integrated circuit. ACS Photonics 10 , 2941–2947 (2023)..

Schnauber, P. et al. Deterministic integration of quantum dots into on-chip multimode interference beamsplitters using in situ electron beam lithography. Nano Lett. 18 , 2336–2342 (2018)..

Papon, C. et al. Independent operation of two waveguide-integrated quantum emitters. Phys. Rev. Appl. 19 , L061003 (2023)..

Corato-Zanarella, M. et al. Widely tunable and narrow-linewidth chip-scale lasers from near-ultraviolet to near-infrared wavelengths. Nat. Photonics 17 , 157–164 (2023)..

Uppu, R. et al. Scalable integrated single-photon source. Sci. Adv. 6 , eabc8268 (2020)..

Jin, T. et al. Generation of polarization-entangled photons from self-assembled quantum dots in a hybrid quantum photonic chip. Nano Lett. 22 , 586–593 (2022)..

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