Optical Fresnel zone plate flat lenses made entirely of colored photoresist through an i-line stepper

Ryohei Yamada; Hiroyuki Kishida; Tomohiro Takami; Itti Rittaporn; Mizuho Matoba; Haruyuki Sakurai; Kuniaki Konishi

doi:10.1038/s41377-024-01725-6

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Optical Fresnel zone plate flat lenses made entirely of colored photoresist through an i-line stepper

Article

- Optical Fresnel zone plate flat lenses made entirely of colored photoresist through an i-line stepper
- Optical Fresnel zone plate flat lenses made entirely of colored photoresist through an i-line stepper
- LSA 2025年14卷第1期
- Affiliations：
- Author bio：
  
  gkkonishi@ipst.s.u-tokyo.ac.jp
- Funds：
- DOI：10.1038/s41377-024-01725-6
  中图分类号：
- 收稿日期：2024-07-18，
  
  修回日期：2024-12-05，
  
  录用日期：2024-12-17，
  
  网络出版日期：2025-01-16，
- Accepted：
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Optical Fresnel zone plate flat lenses made entirely of colored photoresist through an i-line stepper[J]. LSA, 2025,14(1).

Ryohei Yamada, Hiroyuki Kishida, Tomohiro Takami, et al. Optical Fresnel zone plate flat lenses made entirely of colored photoresist through an i-line stepper[J]. Light: science & applications, 2025, 14(1).
Optical Fresnel zone plate flat lenses made entirely of colored photoresist through an i-line stepper[J]. LSA, 2025,14(1). DOI： 10.1038/s41377-024-01725-6.

Ryohei Yamada, Hiroyuki Kishida, Tomohiro Takami, et al. Optical Fresnel zone plate flat lenses made entirely of colored photoresist through an i-line stepper[J]. Light: science & applications, 2025, 14(1). DOI： 10.1038/s41377-024-01725-6.

摘要

Abstract

Light manipulation and control are essential in various contemporary technologies

and as these technologies evolve

the demand for miniaturized optical components increases. Planar-lens technologies

such as metasurfaces and diffractive optical elements

have gained attention in recent years for their potential to dramatically reduce the thickness of traditional refractive optical systems. However

their fabrication

particularly for visible wavelengths

involves complex and costly processes

such as high-resolution lithography and dry-etching

which has limited their availability. In this study

we present a simplified method for fabricating visible Fresnel zone plate (FZP) planar lenses

a type of diffractive optical element

using an i-line stepper and a special photoresist (color resist) that only necessitates coating

exposure

and development

eliminating the need for etching or other post-processing steps. We fabricated visible FZP lens patterns using conventional photolithography equipment on 8-inch silica glass wafers

and demonstrated focusing of 550 nm light to a diameter of 1.1 μm with a focusing efficiency of 7.2%. Numerical simulations showed excellent agreement with experimental results

confirming the high precision and designability of our method. Our lenses were also able to image objects with features down to 1.1 μm

showcasing their potential for practical applications in imaging. Our method is a cost-effective

simple

and scalable solution for mass production of planar lenses and other optical components operating in the visible region. It enables the development of advanced

miniaturized optical systems to meet modern technology demand

making it a valuable contribution to optical component manufacturing.

The specially developed color resist enables low-cost

mass-production of visible light Fresnel zone plates using only exposure and development through an i-line stepper used in the semiconductor industry.

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