Using light to image millimeter wave based on stacked meta-MEMS chip

Han Wang; Zhigang Wang; Cheng Gong; Xinyu Li; Tiansheng Cui; Huiqi Jiang; Minghui Deng; Bo Yan; Weiwei Liu

doi:10.1038/s41377-024-01733-6

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Using light to image millimeter wave based on stacked meta-MEMS chip

Original Articles

- Using light to image millimeter wave based on stacked meta-MEMS chip
- Using light to image millimeter wave based on stacked meta-MEMS chip
- LSA 2025年14卷第2期页码：521-530
- Affiliations：
  
  1.Institute of Modern Optics, Nankai University, Tianjin Key Laboratory of Micro-scale Optical Information Science and Technology, Tianjin 300350, China
  2.School of Electronic Science and Engineering, University of Electronic Science and Technology of China, Chengdu 611731, China
- Author bio：
  
  Cheng Gong (gongcheng@nankai.edu.cn)
- Funds：
  
  The authors would like to express their sincere thanks to the 55th Institute of China Electronics Technology Group Corporation, and Prof. Nan Zhang of the Institute of Optics, Nankai University, for providing equipment support during the chip fabrication process
- DOI：10.1038/s41377-024-01733-6
  中图分类号：
- 收稿日期：2024-06-29，
  
  修回日期：2024-12-08，
  
  录用日期：2024-12-24，
  
  网络出版日期：2025-01-22，
  
  纸质出版日期：2025-02-28
- Accepted：
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Using light to image millimeter wave based on stacked meta-MEMS chip[J]. LSA, 2025,14(2):521-530.

Wang, H. et al. Using light to image millimeter wave based on stacked meta-MEMS chip. Light: Science & Applications, 14, 521-530 (2025).
Using light to image millimeter wave based on stacked meta-MEMS chip[J]. LSA, 2025,14(2):521-530. DOI： 10.1038/s41377-024-01733-6.

Wang, H. et al. Using light to image millimeter wave based on stacked meta-MEMS chip. Light: Science & Applications, 14, 521-530 (2025). DOI： 10.1038/s41377-024-01733-6.

摘要

Abstract

A stacked metamaterial MEMS (meta-MEMS) chip is proposed

which can perfectly absorb electromagnetic waves

convert them into mechanical energy

drive movement of the optical micro-reflectors array

and detect millimeter waves. It is equivalent to using visible light to image a millimeter wave. The meta-MEMS adopts the design of upper and lower chip separation and then stacking to achieve the “dielectric-resonant-air-ground” structure

reduce the thickness of the metamaterial and MEMS structures

and improve the performance of millimeter wave imaging. For verification

we designed and prepared a 94 GHz meta-MEMS focal plane array chip

in which the sum of the thickness of the metamaterial and MEMS structures is only 1/2500 wavelength

the pixel size is less than 1/3 wavelength

but the absorption rate is as high as 99.8%. Moreover

a light readout module was constructed to test the millimeter wave imaging performance. The results show that the response speed can reach 144 Hz and the lens-less imaging resolution is 1.5 mm.

关键词

Keywords

references

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