1.State Key Laboratory for Extreme Photonics and Instrumentation, College of Optical Science and Engineering, International Research Center for Advanced Photonics, Zhejiang University, Zijingang Campus, Hangzhou 310058, China
2.Intelligent Optics and Photonics Research Center, Jiaxing Research Institute, Zhejiang University, Jiaxing 314000, China
3.Ningbo Research Institute, Zhejiang University, Ningbo 315100, China
Daoxin Dai (dxdai@zju.edu.cn)
收稿日期:2024-08-10,
修回日期:2025-03-05,
录用日期:2025-03-09,
网络出版日期:2025-03-31,
纸质出版日期:2025-06-30
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Multimode-enabled silicon photonic delay lines: break the delay-density limit[J]. LSA, 2025,14(6):1532-1540.
Hong, S. H. et al. Multimode-enabled silicon photonic delay lines: break the delay-density limit. Light: Science & Applications, 14, 1532-1540 (2025).
Multimode-enabled silicon photonic delay lines: break the delay-density limit[J]. LSA, 2025,14(6):1532-1540. DOI: 10.1038/s41377-025-01820-2.
Hong, S. H. et al. Multimode-enabled silicon photonic delay lines: break the delay-density limit. Light: Science & Applications, 14, 1532-1540 (2025). DOI: 10.1038/s41377-025-01820-2.
Integrated optical delay lines have become imperative to meet the growing demand as large aperture antennas and high number of subarrays required for microwave beamforming
high-speed optical communication
and integrated quantum photonics. It is very challenging to achieve large delay ranges
small footprints
and broad bandwidths simultaneously due to the strong trade-off between the propagation loss and the group refractive index of optical waveguides. In this paper
we propose and experimentally demonstrate multimode-enabled silicon photonic delay line for
the first time
which breaks the delay-density limit of singlemode waveguide spirals
towards a broadband
mm
2
-scale
and ultra-large time delay. By demonstrating low-loss-propagation possibilities for different polarizations and modes
we introduce a novel multimode delay unit by integrating the mode (de)multiplexers and the ultralow-loss multimode waveguide spiral supporting the TE
0
TE
1
and TE
2
modes propagating in parallel. The measured propagation losses for the TE
0
TE
1
and TE
2
modes are 0.2 dB/cm
0.31 dB/cm
and 0.49 dB/cm
respectively. In this way
the
highest
line delay-density of 376.9 ps/cm and low delay loss of 0.004 dB/ps are achieved. Furthermore
we implement a 7-bit tunable multimode photonic delay line and experimentally demonstrate an ultra-large delay range of 12.7 ns with a delay resolution of 100 ps and within an ultra-compact footprint of 3.85 mm
2
enabling a delay density over 3299 ps/mm
2
showing the
largest
delay range and the
highest
delay density among on-chip delay lines reported to date
to the best of our knowledge.
Liu, C. E. et al. Observation of coherent optical information storage in an atomic medium using halted light pulses. Nature 409 , 490–493 (2001)..
Gauthier, D. Slow light brings faster communications. Phys. World 18 , 30–32 (2005)..
Mok, J. T. & Eggleton, B. J. Expect more delays. Nature 433 , 811–812 (2005)..
Zhou, L. J. et al. Integrated optical delay lines: a review and perspective [invited ] . Chin. Opt. Lett. 16 , 101301 (2018)..
Yurtsever, G. et al. Photonic integrated Mach-Zehnder interferometer with an on-chip reference arm for optical coherence tomography. Biomed. Opt. Express 5 , 1050–1061 (2014)..
Granieri, S., Jaeger, M. & Siahmakoun, A. Multiple-beam fiber-optic beamformer with binary array of delay lines. J. Lightwave Technol. 21 , 3262–3272 (2003)..
Choi, E. et al. All-fiber variable optical delay line for applications in optical coherence tomography: feasibility study for a novel delay line. Opt. Express 13 , 1334–1345 (2005)..
Li, S. G. et al. Rangeability extension of fiber-optic low-coherence measurement based on cascaded multistage fiber delay line. Appl. Opt. 51 , 771–775 (2012)..
Liang, C. S. et al. A comprehensive study of optical frequency domain reflectometry. IEEE Access 9 , 41647–41668 (2021)..
Bouma, B. E. et al. Optical coherence tomography. Nat. Rev. Methods Prim. 2 , 79 (2022)..
Hansen, R. C. Phased Array Antennas . 2nd edn. (Hoboken: John Wiley & Sons, 2009).
Mailloux, R. J. Phased Array Antenna Handbook . 3rd edn. (Norwood: Artech House, 2017).
Sibson, P. et al. Chip-based quantum key distribution. Nat. Commun. 8 , 13984 (2017)..
Xie, J. Y. et al. Seven-bit reconfigurable optical true time delay line based on silicon integration. Opt. Express 22 , 22707–22715 (2014)..
Wang, X. Y. et al. Continuously tunable ultra-thin silicon waveguide optical delay line. Optica 4 , 507–515 (2017)..
Zheng, P. F. et al. A seven bit silicon optical true time delay line for Ka-band phased array antenna. IEEE Photonics J. 11 , 5501809 (2019)..
Hong, S. H. et al. Ultralow-loss compact silicon photonic waveguide spirals and delay lines. Photonics Res. 10 , 1 (2022)..
Moreira, R. L. et al. Integrated ultra-low-loss 4-bit tunable delay for broadband phased array antenna applications. IEEE Photonics Technol. Lett. 25 , 1165–1168 (2013)..
Lin, D. D. et al. A high performance silicon nitride optical delay line with good expansibility. J. Lightwave Technol. 41 , 209–217 (2023)..
Song, Q. Q., Hu, Z. F. & Chen, K. X. Scalable and reconfigurable true time delay line based on an ultra-low-loss silica waveguide. Appl. Opt. 57 , 4434–4439 (2018)..
Ke, W. et al. Digitally tunable optical delay line based on thin-film lithium niobate featuring high switching speed and low optical loss. Photonics Res. 10 , 2575–2583 (2022)..
Lee, K. K.et al. Fabrication of ultralow-loss Si/SiO 2 waveguides by roughness reduction. Opt. Lett. 26 , 1888–1890 (2001)..
Bogaerts, W. & Chrostowski, L. Silicon photonics circuit design: methods, tools and challenges. Laser Photonics Rev. 12 , 1700237 (2018)..
Wang, X. X. & Liu, J. F. Emerging technologies in Si active photonics. J. Semiconduct. 39 , 061001 (2018)..
Chakravarty, S. e t al. Hybrid material integration in silicon photonic integrated circuits. J. Semiconduct. 42 , 041303 (2021)..
Shekhar, S. et al. Roadmapping the next generation of silicon photonics. Nat. Commun. 15 , 751 (2024)..
Zhu, C. et al. Silicon integrated microwave photonic beamformer. Optica 7 , 1162–1170 (2020)..
Zheng, P. F. et al. A wideband 1 × 4 optical beam-forming chip based on switchable optical delay lines for Ka-band phased array. Opt. Commun. 488 , 126842 (2021)..
Xie, Y. W. et al. Low-loss chip-scale programmable silicon photonic processor. Opto-Electron. Adv. 6 , 220030 (2023)..
Martinez-Carrasco, P. et al. Ultrabroadband high-resolution silicon RF-photonic beamformer. Nat. Commun. 15 , 1433 (2024)..
Ghaderi, E. et al. An integrated discrete-time delay-compensating technique for large-array beamformers. IEEE Trans. Circuits Syst. I: Regul. Pap. 66 , 3296–3306 (2019)..
Bru, L. A., Pastor, D. & Muñoz, P. Integrated optical frequency domain reflectometry device for characterization of complex integrated devices. Opt. Express 26 , 30000–30008 (2018)..
Ji, X. C. et al. On-chip tunable photonic delay line. APL Photonics 4 , 090803 (2019)..
Parra, E. & Lowell, J. R. Toward applications of slow light technology. Opt. Photonics N. 18 , 40–45 (2007)..
Moralis-Pegios, M. et al. On-chip SOI delay line bank for optical buffers and time slot interchangers. IEEE Photonics Technol. Lett. 30 , 31–34 (2018)..
Wang, J. W. et al. Integrated photonic quantum technologies. Nat. Photonics 14 , 273–284 (2020)..
Morichetti, F. et al. A reconfigurable architecture for continuously variable optical slow-wave delay lines. Opt. Express 15 , 17273–17282 (2007)..
Yang, J. et al. Continuously tunable, wavelength-selective buffering in optical packet switching networks. IEEE Photonics Technol. Lett. 20 , 1030–1032 (2008)..
Fontaine, N. K. et al. Continuously tunable optical buffering at 40 Gb/s for optical packet switching networks. J. Lightwave Technol. 26 , 3776–3783 (2008)..
Zhuang, L. et al. Single-chip ring resonator-based 1 × 8 optical beam forming network in CMOS-compatible waveguide technology. IEEE Photonics Technol. Lett. 19 , 1130–1132 (2007)..
Zhuang, L. M. et al. Novel ring resonator-based integrated photonic beamformer for broadband phased array receive antennas—part Ⅱ: experimental prototype. J. Lightwave Technol. 28 , 19–31 (2010)..
Meijerink, A. et al. Novel ring resonator-based integrated photonic beamformer for broadband phased array receive antennas—part Ⅰ: design and performance analysis. J. Lightwave Technol. 28 , 3–18 (2010)..
Lin, D. D. et al. A tunable optical delay line based on cascaded silicon nitride microrings for Ka-band beamforming. IEEE Photonics J. 11 , 5503210 (2019)..
Giuntoni, I. et al. Continuously tunable delay line based on SOI tapered Bragg gratings. Opt. Express 20 , 11241–11246 (2012)..
Wang, X., Liao, S. S. & Dong, J. J. Optical true time delay based on contradirectional couplers with single sidewall-modulated Bragg gratings. In Proceedings of SPIE 10026, Real-time Photonic Measurements, Data Management, and Processing II . 100260C (Beijing, China: SPIE, 2016). https://doi.org/10.1117/12.2247010 https://doi.org/10.1117/12.2247010 ..
Liu, S. J. et al. Digitally tunable dispersion controller using chirped multimode waveguide gratings. Optica 10 , 316–323 (2023)..
Vlasov, Y. A. et al. Active control of slow light on a chip with photonic crystal waveguides. Nature 438 , 65–69 (2005)..
O'Brien, D. et al. Tunable optical delay using photonic crystal heterostructure nanocavities. Phys. Rev. B 76 , 115110 (2007)..
Sancho, J. et al. Integrable microwave filter based on a photonic crystal delay line. Nat. Commun. 3 , 1075 (2012)..
Fei, H. M. et al. Tunable hexagonal boron nitride topological optical delay line in the visible region . Chin. Opt. Lett. 22 , 053602 (2024)..
Xu, H. N. et al. Direct-access mode-division multiplexing switch for scalable on-chipmulti-mode networks. Nanophotonics 10 , 4551–4566 (2021)..
Zhao, W. K. et al. 96-Channel on-chip reconfigurable optical add-drop multiplexer for multidimensional multiplexing systems. Nanophotonics 11 , 4299–4313 (2022)..
Dai, D. X. et al. 10‐Channel mode (de)multiplexer with dual polarizations. Laser Photonics Rev. 12 , 1700109 (2018)..
Bauters, J. F. et al. Ultra-low-loss high-aspect-ratio Si 3 N 4 waveguides. Opt. Express 19 , 3163–3174 (2011)..
Ciminelli, C. et al. Three-dimensional modelling of scattering loss in InGaAsP/InP and silica-on-silicon bent waveguides. J. Eur. Opt. Soc. -Rapid Publ. 4 , 09015 (2009)..
Zhang, L. et al. Ultralow‐loss silicon photonics beyond the singlemode regime. Laser Photonics Rev. 16 , 2100292 (2022)..
Song, L. J. et al. Toward calibration-free Mach–Zehnder switches for next-generation silicon photonics. Photonics Res. 10 , 793–801 (2022)..
Song, L. J. et al. Low-loss calibration-free 2 × 2 Mach-Zehnder switches with varied-width multimode-interference couplers. J. Lightwave Technol. 40 , 5254–5259 (2022)..
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