Full color visible imaging with crystalline silicon meta-optics

Johannes E. Fröch; Luocheng Huang; Zhihao Zhou; Virat Tara; Zhuoran Fang; Shane Colburn; Alan Zhan; Minho Choi; Arnab Manna; Andrew Tang; Zheyi Han; Karl F. Böhringer; Arka Majumdar

doi:10.1038/s41377-025-01888-w

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Full color visible imaging with crystalline silicon meta-optics

Original Articles

- Full color visible imaging with crystalline silicon meta-optics
- Full color visible imaging with crystalline silicon meta-optics
- LSA 2025年14卷第8期页码：2289-2296
- Affiliations：
  
  1.Department of Physics, University of Washington, Seattle, WA 98195, USA
  2.Department of Electrical and Computer Engineering, University of Washington, Seattle, WA 98195, USA
  3.Tunoptix, Seattle, WA 98195, USA
  4.Department of Bioengineering, University of Washington, Seattle, WA 98195, USA
  5.Institute for Nano-Engineered Systems, University of Washington, Seattle, WA 98195, USA
- Author bio：
  
  Johannes E. Fröch (jfroech@uw.edu)
  Arka Majumdar (arka@uw.edu)
- Funds：
- DOI：10.1038/s41377-025-01888-w
  中图分类号：
- 收稿日期：2024-10-21，
  
  修回日期：2025-04-30，
  
  录用日期：2025-05-08，
  
  网络出版日期：2025-06-18，
  
  纸质出版日期：2025-08-31
- Accepted：
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Full color visible imaging with crystalline silicon meta-optics[J]. LSA, 2025,14(8):2289-2296.

Fröch, J. E. et al. Full color visible imaging with crystalline silicon meta-optics. Light: Science & Applications, 14, 2289-2296 (2025).
Full color visible imaging with crystalline silicon meta-optics[J]. LSA, 2025,14(8):2289-2296. DOI： 10.1038/s41377-025-01888-w.

Fröch, J. E. et al. Full color visible imaging with crystalline silicon meta-optics. Light: Science & Applications, 14, 2289-2296 (2025). DOI： 10.1038/s41377-025-01888-w.

摘要

Abstract

Silicon is a common material of choice for semiconductor optics in the infrared spectral range

due to its low cost

well-developed high-volume manufacturing methods

high refractive index

and transparency. It is

however

typically ill-suited for applications in the visible range

due to its large absorption coefficient

especially for green and blue light. Counterintuitively

we demonstrate how ultra-thin crystalline meta-optics enable full-color imaging in the visible range. For this purpose

we employ an inverse design approach

which maximizes the volume under the broadband modulation transfer function of the meta-optics. Beyond that

we demonstrate polarization-multiplexed functionality in the visible. This is particularly important as polarization optics require high index materials

a characteristic often difficult to obtain in the visible.

关键词

Keywords

references

Park, J. H. et al. Biodegradable luminescent porous silicon nanoparticles for in vivo applications. Nat. Mater. 8 , 331–336 (2009)..

Li, W. et al. Tailoring porous silicon for biomedical applications: from drug delivery to cancer immunotherapy. Adv. Mater. 30 , 1703740 (2018)..

Staude, I. & Schilling, J. Metamaterial-inspired silicon nanophotonics. Nat. Photonics 11 , 274–284 (2017)..

Silverstone, J. W. et al. Silicon quantum photonics. IEEE J. Sel. Top. Quantum Electron. 22 , 390–402 (2016)..

Zwanenburg, F. A. et al. Silicon quantum electronics. Rev. Mod. Phys. 85 , 961–1019 (2013)..

Siew, S. Y. et al. Review of silicon photonics technology and platform development. J. Light. Technol. 39 , 4374–4389 (2021)..

Peng, Z. et al. Reflective silicon binary diffraction grating for visible wavelengths. Opt. Lett. 36 , 1515–1517 (2011)..

Martins, A. et al. On metalenses with arbitrarily wide field of view. ACS Photonics 7 , 2073–2079 (2020)..

Sun, Q. et al. Highly efficient air-mode silicon metasurfaces for visible light operation embedded in a protective silica layer. Adv. Opt. Mater. 9 , 2 002209 (2021)..

Feng, W. B. et al. RGB achromatic metalens doublet for digital imaging. Nano Lett. 22 , 3969–3975 (2022)..

Cadusch, J. J. et al. Compact, lightweight, and filter-free: an all-Si microspectrometer chip for visible light spectroscopy. ACS Photonics 9 , 474–481 (2022)..

Yang, W. H. et al. All-dielectric metasurface for high-performance structural color. Nat. Commun. 11 , 1864 (2020)..

Presutti, F. & Monticone, F. Focusing on bandwidth: achromatic metalens limits. Optica 7 , 624–631 (2020)..

Huang, L. C. et al. Full-color metaoptical imaging in visible light. Adv. Photonics Res. 3 , 2100265 (2022)..

Arbabi, E. et al. Multiwavelength polarization-insensitive lenses based on dielectric metasurfaces with meta-molecules. Optica 3 , 628–633 (2016)..

Chen, W. T., Zhu, A. Y. & Capasso, F. Flat optics with dispersion-engineered metasurfaces. Nat. Rev. Mater. 5 , 604–620 (2020)..

Tseng, E. et al. Neural nano-optics for high-quality thin lens imaging. Nat. Commun. 12 , 6493 (2021)..

Baranikov, A. V. et al. Large field-of-view and multi-color imaging with GaP quadratic metalenses. Laser Photonics Rev. 18 , 2300553, https://doi.org/10.1002/lpor.202300553 (2024)..

McClung, A. et al. Snapshot spectral imaging with parallel metasystems. Sci. Adv. 6 , eabc7646 (2020)..

Chakravarthula, P. et al. Thin on-sensor nanophotonic array cameras. ACM Trans. Graph. 42 , 249 (2023)..

Fröch, J. E. et al. Real time full-color imaging in a Meta-optical fiber endoscope. eLight 3 , 13 (2023)..

Huang, L. C. et al. Broadband thermal imaging using meta-optics. Nat. Commun. 15 , 1662, https://doi.org/10.1038/s41467-024-45904-w (2024)..

Colburn, S. et al. Broadband transparent and CMOS-compatible flat optics with silicon nitride metasu rfaces. Opt. Mater. Express 8 , 2330–2344 (2018)..

Schaeper, O. et al. Monolithic silicon carbide metalenses. ACS Photonics 9 , 1409–1414 (2022)..

Zhang, C. et al. Low-loss metasurface optics down to the deep ultraviolet region. Light Sci. Appl. 9 , 55 (2020)..

Khorasaninejad, M. et al. Metalenses at visible wavelengths: diffraction-limited focusing and subwavelength resolution imaging. Science 352 , 1190–1194 (2016)..

Mikheeva, E. et al. CMOS-compatible all-dielectric metalens for improving pixel photodetector arrays. APL Photonics 5 , 116105 (2020)..

Huang, T. Y. et al. A monolithic immersion metalens for imaging solid-state quantum emitters. Nat. Commun. 10 , 2392 (2019)..

Kim, M. et al. Multilayer all-polymer metasurface stacked on optical fiber via sequential micro-punching process. Nanophotonics 12 , 2359–2369 (2023)..

Roberts, G. et al. 3D -patterned inverse-designed mid-infrared metaoptics. Nat. Commun. 14 , 2768 (2023)..

Kim, J. et al. Scalable manufacturing of high-index atomic layer–polymer hybrid metasurfaces for metaphotonics in the visible. Nat. Mater. 22 , 474–481 (2023)..

Bayati, E. et al. Role of refractive index in metalens performance. Appl. Opt. 58 , 1460–1466 (2019)..

Intaravanne, Y. & Chen, X. Z. Recent advances in optical metasurfaces for polarization detection and engineered polarization profiles. Nanophotonics 9 , 1003–1014 (2020)..

Yang, Y. et al. Revealing structural disorder in hydrogenated amorphous silicon for a low‐loss photonic platform at visible frequencies. Adv. Mater. 33 , 2005893 (2021)..

Goldberg, O. et al. Silicon-rich nitride huygens metasurfaces in the visible regime. Adv. Opt. Mater. 12 , 2301612 (2024)..

Khmelevskaia, D. et al. Directly grown crystalline gallium phosphide on sapphire for nonlinear all-dielectric nanophotonics. Appl. Phys. Lett. 118 , 201101 (2021)..

Wang, Y. F. et al. A review of gallium phosphide nanophotonics towards omnipotent nonlinear devices. Nanophotonics 13 , 3207–3252 (2024)..

Khorasaninejad, M. et al. Visible wavelength planar metalenses based on titanium dioxide. IEEE J. Sel. Top. Quantum Electron. 23 , 43–58 (2017)..

Zhan, A. L. et al. Low-contrast dielectric metasurface optics. ACS Photonics 3 , 209–214 (2016)..

Karouta, F. A practical approach to reactive ion etching. J. Phys. D Appl. Phys. 47 , 233501 (2014)..

Kim, S. et al. Anti-aliased metasurfaces beyond the Nyquist limit. Nat. Commun. 16 , 411 (2025)..

O'Shea, D. D. et al. Diffractive Optics: Design, Fabrication, and Test (SPIE Press, 2003).

Yang, Y. et al. Revisiting optical material platforms for efficient linear and nonlinear dielectric metasurfaces in the ultraviolet, visible, and infrared. ACS Photonics 10 , 307–321 (2023)..

Khorasaninejad, M. et al. Achromatic metalens over 60 nm bandwidth in the visible and metalens with reverse chromatic dispersion. Nano Lett. 17 , 1819–1824 (2017)..

Chen, W. T. et al. A broadband achromatic metalens for focusing and imaging in the visible. Nat. Nanotechnol. 13 , 220–226 (2018)..

Wang, S. M. et al. A broadband achromatic metalens in the visible. Nat. Nanotechnol. 13 , 227–232 (2018)..

Li, Z. Y. et al. Meta-optics achieves RGB-achromatic focusing for virtual reality. Sci. Adv. 7 , eabe4458 (2021)..

Li, Z. Y. et al. Inverse design enables large-scale high-performance meta-optics reshaping virtual reality. Nat. Commun. 13 , 2409 (2022)..

Li, H. M. et al. Bandpass-filter-integrated multiwavelength achromatic metalens. Photonics Res. 9 , 1384–1390 (2021)..

Fröch, J. E. et al. Beating spectral bandwidth limits for large aperture broadband nano-optics. Nat. Commun. 16 , 3025, https://doi.org/10.1038/s41467-025-58208-4 (2025)..

Mäkinen, Y., Azzari, L. & Foi, A. Collaborative filtering of correlated noise: exact transform-domain variance for improved shrinkage and patch matching. IEEE Trans. Image Process. 29 , 8339–8354 (2020)..

Shen, Z. C. et al. Monocular metasurface camera for passive single-shot 4D imaging. Nat. Commun. 14 , 1035 (2023)..

Yang, F. et al. Monocular depth sensing using metalens. Nanophotonics 12 , 2987–2996 (2023)..

Guo, Q. et al. Compact single-shot metalens depth sensors inspired by eyes of jumping spiders. Proc. Natl. Acad. Sci. USA 116 , 22959–22965 (2019)..

Lin, Z. N. et al. End-to-end nanophotonic inverse design for imaging and polarimetry. Nanophotonics 10 , 1177–1187 (2021)..

Huang, L. C. et al. Photonic advantage of optical encoders. In Proc. 2023 Conference on Lasers and Electro-Optics (CLEO) 1–2 (IEEE, San Jose, CA, USA: 2023).

Wang, T. Y. et al. Image sensing with multilayer nonlinear optical neural networks. Nat. Photonics 17 , 408–415 (2023)..

Chen, Y. T. et al. All-analog photoelectronic chip for high-speed vision tasks. Nature 623 , 48–57 (2023)..

Cai, G. Y. et al. Compact angle-resolved metasurface spectrometer. Nat. Mater. 23 , 71–78 (2024)..

Fröch, J. E. et al. Dual band computational infrared spectroscopy via large aperture meta-optics. ACS Photonics 10 , 986–992, https://doi.org/10.1021/acsphotonics.2c01017 (2022)..

Faraji-Dana, M. et al. Compact folded metasurface spectrometer. Nat. Commun. 9 , 4196 (2018)..

Wang, R. X. et al. Compact multi-foci metalens spectrometer. Light Sci. Appl. 12 , 103 (2023)..

Neshev, D. N. & Miroshnichenko, A. E. Enabling smart vision with metasurfaces. Nat. Photonics 17 , 26–35 (2023)..

Jegou, H., Douze , M. & Schmid, C. Hamming embedding and weak geometric consistency for large-scale image search. In Proc. 10th European Conference on Computer Vision 304–317 (Springer, Marseille, France, 2008).

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