Achieving 100% amplitude modulation depth in the terahertz range with graphene-based tuneable capacitance metamaterials

Ruqiao Xia; Nikita W. Almond; Wadood Tadbier; Stephen J. Kindness; Riccardo Degl'Innocenti; Yuezhen Lu; Abbie Lowe; Ben Ramsay; Lukas A. Jakob; James Dann; Stephan Hofmann; Harvey E. Beere; Sergey A. Mikhailov; David A. Ritchie; Wladislaw Michailow

doi:10.1038/s41377-025-01945-4

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Achieving 100% amplitude modulation depth in the terahertz range with graphene-based tuneable capacitance metamaterials

Original Articles

- Achieving 100% amplitude modulation depth in the terahertz range with graphene-based tuneable capacitance metamaterials
- Achieving 100% amplitude modulation depth in the terahertz range with graphene-based tuneable capacitance metamaterials
- LSA 2025年14卷第9期页码：2736-2751
- Affiliations：
  
  1.Cavendish Laboratory, University of Cambridge, Cambridge, UK
  2.Department of Engineering, University of Cambridge, Cambridge, UK
  3.School of Electronic Engineering and Computer Science, Queen Mary University of London, London, UK
  4.Department of Electronic & Electrical Engineering, Faculty of Engineering Sciences, University College London, London, UK
  5.Institute of Physics, University of Augsburg, Augsburg, Germany
  6.Centre for Integrative Semiconductor Materials and Department of Physics, Swansea University, Swansea, UK
- Author bio：
  
  Ruqiao Xia (rx224@cam.ac.uk)
  Wladislaw Michailow (wm297@cam.ac.uk)
- Funds：
- DOI：10.1038/s41377-025-01945-4
  中图分类号：
- 收稿日期：2024-12-17，
  
  修回日期：2025-05-27，
  
  录用日期：2025-06-30，
  
  网络出版日期：2025-08-04，
  
  纸质出版日期：2025-09-30
- Accepted：
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Achieving 100% amplitude modulation depth in the terahertz range with graphene-based tuneable capacitance metamaterials[J]. LSA, 2025,14(9):2736-2751.

Xia, R X. et al. Achieving 100% amplitude modulation depth in the terahertz range with graphene-based tuneable capacitance metamaterials. Light: Science & Applications, 14, 2736-2751 (2025).
Achieving 100% amplitude modulation depth in the terahertz range with graphene-based tuneable capacitance metamaterials[J]. LSA, 2025,14(9):2736-2751. DOI： 10.1038/s41377-025-01945-4.

Xia, R X. et al. Achieving 100% amplitude modulation depth in the terahertz range with graphene-based tuneable capacitance metamaterials. Light: Science & Applications, 14, 2736-2751 (2025). DOI： 10.1038/s41377-025-01945-4.

摘要

Abstract

Effective control of terahertz radiation requires fast and efficient modulators with a large modulation depth—a challenge that is often tackled by using metamaterials. Metamaterial-based active modulators can be created by placing graphene as a tuneable element shunting regions of high electric field confinement in metamaterials. However

in this common approach

the graphene is used as a variable resistor

and the modulation is achieved by resistive damping of the resonance. In combination with the finite conductivity of graphene due to its gapless nature

achieving 100% modulation depth using this approach remains challenging. Here

we embed nanoscale graphene capacitors within the gaps of the metamaterial resonators

and thus switch from a resistive damping to a capacitive tuning of the resonance. We further expand the optical modulation range by device excitation from its substrate side. As a result

we demonstrate terahertz modulators with over four orders of magnitude modulation depth (45.7 dB at 1.68 THz and 40.1 dB at 2.15 THz)

and a reconfiguration speed of 30 MHz. These tuneable capacitance modulators are electrically controlled solid-state devices enabling unity modulation with graphene conductivities below 0.7 mS. The demonstrated approach can be applied to enhance modulation performance of any metamaterial-based modulator with a 2D electron gas. Our results open up new frontiers in the area of terahertz communications

real-time imaging

and wave-optical analogue computing.

关键词

Keywords

references

Jessop, D. S. et al. Graphene based plasmonic terahertz amplitude modulator operating above 100 MHz. Appl. Phys. Lett. 108 , 171101 (2016)..

Gong, Y. M. et al. Active control of terahertz amplitude and phase based on graphene metasurface. Phys. E Low Dimensional Syst. Nanostruct. 143 , 115334 (2022)..

Kindness, S. J. et al. Graphene-integrated metamaterial device for all-electrical polarization control of terahertz quantum cascade lasers. ACS Photonics 6 , 1547–1555 (2019)..

Liu, A. S. et al. A high-speed silicon optical modulator based on a metal–oxide–semiconductor capacitor. Nature 427 , 615–618 (2004)..

Liu, A. S. et al. High-speed optical modulation based on carrier depletion in a silicon waveguide. Opt. Express 15 , 660–668 (2007)..

Sorianello, V. et al. Graphene–silicon phase modulators with gigahertz bandwidth. Nat. Photonics 12 , 40–44 (2018)..

Liu, J. M. et al. Review of graphene modulators from the low to the high figure of merits. J. Phys. D Appl. Phys. 53 , 233002 (2020)..

Yao, Y. et al. Electrically tunable metasurface perfect absorbers for ultrathin mid-infrared optical modulators. Nano Lett. 14 , 6526–6532 (2014)..

Zeng, B. B. et al. Hybrid graphene metasurfaces for high-speed mid-infrared light modulation and single-pixel imaging. Light Sci. Appl. 7 , 51 (2018)..

Bonazzi, T. et al. Metamaterial unipolar quantum optoelectronics for mid-infrared free-space optics. APL Photonics 9 , 110801 (2024)..

Unlu, M. et al. Switchable scattering meta-surfaces for broadband terahertz modulation. Sci. Rep. 4 , 5708 (2014)..

Han, Z. L. et al. MEMS reconfigurable metamaterial for terahertz switchable filter and modulator. Opt. Express 22 , 21326–21339 (2014)..

Schalch, J. S. et al. Broadband electricallytunable VO 2 -Metamaterial terahertz switch with suppressed reflection. Microw. Optical Technol. Lett. 62 , 2782–2790 (2020)..

Ren, Z. et al. Active and smart terahertz electro-optic modulator based on VO 2 structure. ACS Appl. Mater. Interfaces 14 , 26923–26930 (2022)..

Savo, S., Shrekenhamer, D. & Padilla, W. J. Liquid crystal metamaterial absorber spatiallight modulator for THz applications. Adv. Optical Mater. 2 , 275–279 (2014)..

Shen, Z. X. et al. Liquid crystal enabled dynamic cloaking of terahertz Fano resonators. Appl. Phys. Lett. 114 , 041106 (2019)..

Yin, Z. P. et al. Fast-tunable terahertz metamaterial absorber based on polymer network liquid crystal. Appl. Sci. 8 , 2454 (2018)..

Di Gaspare, A. et al. All in one-chip, electrolyte-gated graphene amplitude modulator, saturable absorber mirror and metrological frequency-tuner in the 2-5 THz range. Adv. Optical Mater. 10 , 2200819 (2022)..

Wu, Y. et al. Graphene terahertz modulators by ionic liquid gating. Adv. Mater. 27 , 1874–1879 (2015)..

Miao, Z. Q. et al. Widely tunable terahertz phase modulation with gate-controlled graphene metasurfaces. Phys. Rev. X 5 , 041027 (2015)..

Rahm, M., Li, J. S. & Padilla, W. J. THz wave modulators: a brief review on different modulation techniques. J. Infrared Millim. Terahertz Waves 34 , 1–27 (2013)..

Zhao, Y. C. et al. High-speed efficient terahertz modulation based on tunable collective-individual state conversion within an active 3 nm two-dimensional electron gas metasurface. Nano Lett. 19 , 7588–7597 (2019)..

Chen, H. T. et al. A metamaterial solid-state terahertz phase modulator. Nat. Photonics 3 , 148–151 ( 2009)..

Liu, P. Q. et al. Highly tunable hybrid metamaterials employing split-ring resonators strongly coupled to graphene surface plasmons. Nat. Commun. 6 , 8969 (2015)..

Jung, H. et al. Electrically controllable molecularization of terahertz meta-atoms. Adv. Mater. 30 , 1802760 (2018)..

Wang, J. F. et al. Tunable terahertz metamaterial absorber based on electricity and light modulation modes. Optical Mater. Express 10 , 2262–2273 (2020)..

Masyukov, M. et al. Optically tunable terahertz chiral metasurface based on multi-layered graphene. Sci. Rep. 10 , 3157 (2020)..

Du, X. M. et al. A broadband switchable metamaterial absorber/reflector based on multi-laps graphene sheets in the terahertz band. IEEE Photonics J. 13 , 4600208 (2021)..

Ma, Q. L., Hong, W. Y. & Shui, L. L. Structural optimization of single-layer graphene metamaterial for ultra-broadband terahertz absorber. IEEE Photonics J. 13 , 4600307 (2021)..

Degl'Innocenti, R., Lin, H. & Navarro-Cía, M. Recent progress in terahertz metamaterial modulators. Nanophotonics 11 , 1485–1514 (2022)..

Zheng, D. Z. et al. Enabling beam-scanning antenna technologies for terahertz wireless systems: a review. Fundamental Res. 5 , 556–570 (2025)..

Kindness, S. J. et al. Active control of electromagnetically induced transparency in a terahertz metamaterial array with graphene for continuous resonance frequency tuning. Adv. Optical Mater. 6 , 1800570 (2018)..

Kindness, S. J. et al. A terahertz chiral metamaterial modulator. Adv. Optical Mater. 8 , 2000581 (2020)..

Zaman, A. M. et al. Terahertz metamaterial optoelectronic modulators with GHz reconfiguration speed. IEEE Trans. Terahertz Sci. Technol. 12 , 520–526 (2022)..

Novoselov, K. S. et al. Two-dimensional gas of massless Dirac fermions in graphene. Nature 438 , 197–200 (2005)..

Zhang, Y. X. et al. Gbps terahertz external modulator based on a composite metamaterial with a double-channel heterostructure. Nano Lett. 15 , 3501–3506 (2015)..

Zhang, Y. X. et al. Large phase modulation of THz wave via an enhanced resonant active HEMT metasurface. Nanophotonics 8 , 153–170 (2018)..

Di Gaspare, A. et al. Tunable, grating-gated, graphene-on-polyimide terahertz modulators. Adv. Funct. Mater. 31 , 2008039 (2021)..

Chen, Z. F. et al. Graphene controlled Brewster angle device for ultra broadband terahertz modulation. Nat. Commun. 9 , 4909 (2018)..

Sun, Y. W. et al. Graphene-loaded metal wire grating for deep and broadband THz modulation in total internal reflection geometry. Photonics Res. 6 , 1151–1157 (2018)..

Chen, H. T. et al. Experimental demonstration of frequency-agile terahertz metamaterials. Nat. Photonics 2 , 295–298 (2008)..

Ordal, M. A. et al. Optical properties of fourteen metals in the infrared and far infrared: Al, Co, Cu, Au, Fe, Pb, Mo, Ni, Pd, Pt, Ag, Ti, V, and W. Appl. Opt. 24 , 4493–4499 (1985)..

Xiao, S. Y. et al. Active modulation of electromagnetically induced transparency analogue in terahertz hybrid metal-graphene metamaterials. Carbon 126 , 271–278 (2018)..

Ordal, M. A. et al. Optical properties of Au, Ni, and Pb at submillimeter wavelengths. Appl. Opt. 26 , 744–752 (1987)..

Giubileo, F. & Di Bartolomeo, A. The role of contact resistance in graphene field-effect devices. Prog. Surf. Sci. 92 , 143–175 (2017)..

Zhao, X. H. et al. Micromachined subterahertz waveguide-integrated phase shifter utilizing supermode propagation. IEEE Trans. Microw. Theory Tech. 69 , 3219–3227 (2021)..

Chen, B. W. X. et al. Electrically addressable integrated intelligent terahertz metasurf ace. Sci. Adv. 8 , eadd1296 (2022)..

Li, W. L. et al. Modulo-addition operation enables terahertz programmable metasurface for high-resolution two-dimensional beam steering. Sci. Adv. 9 , eadi7565 (2023)..

Zhang, Y. X. et al. Ultrafast modulation of terahertz waves using on-chip dual-layer near-field coupling. Optica 9 , 1268–1275 (2022)..

Kröll, J., Darmo, J. & Unterrainer, K. Metallic wave-impedance matching layers for broadband terahertz optical systems. Opt. Express 15 , 6552–6560 (2007)..

Thoman, A. et al. Nanostructured gold films as broadband terahertz antireflection coatings. Phys. Rev. B 77 , 195405 (2008)..

Chen, H. T. et al. Electrically tunable THz metasurfaces enabling near-unity modulation depth. In 2023 48th International Conference on Infrared, Millimeter, and Terahertz Waves (IRMMW-THz) 1–2 (IEEE, 2023).

Zaman, A. M. et al. Ultrafast modulation of a THz metamaterial/graphene array integrated device. Appl. Phys. Lett. 121 , 091102 (2022)..

Simonyan, K. et al. Broadband THz metasurface bandpass filter/antireflection coating based on metalized Si cylindrical rings. Semiconductor Sci. Technol. 39 , 095012 (2024)..

Wu, T. et al. All dielectric metasurfaces for spin-dependent terahertz wavefront control. Photonics Res. 10 , 1695–1702 (2022)..

Smith, J. T. et al. Reducing contact resistance in graphene devices through contact area patterning. ACS Nano 7 , 3661–3667 (2013)..

Li, L. H. et al. Terahertz quantum cascade lasers with > 1 W output powers. Electron. Lett. 50 , 309–311 (2014)..

Almond, N. W. et al. External cavity terahertz quantum cascade laser with a metamaterial/graphene optoelectronic mirror. Appl. Phys. Lett. 117 , 041105 (2020)..

Burton, O. J. et al. The role and control of residual bulk oxygen in the cata lytic growth of 2D materials. J. Phys. Chem. C 123 , 16257–16267(2019)..

Burton, O. J. et al. Integrated wafer scale growth of single crystal metal films and high quality graphene. ACS Nano 14 , 13593–13601 (2020)..

Ro/nne, C. et al. Investigation of the temperature dependence of dielectric relaxation in liquid water by THz reflection spectroscopy and molecular dynamics simulation. J. Chem. Phys. 107 , 5319–5331 (1997)..

Edwards, D. F. & Ochoa, E. Infrared refractive index of silicon. Appl. Opt. 19 , 4130–4131 (1980)..

Li, J. S. & Li, J. R. Dielectric properties of silicon in terahertz wave region. Microw. Optical Technol. Lett. 50 , 1143–1146 (2008)..

Xia, R. et al. Research data supporting "Achieving 100% amplitude modulation depth in the terahertz range with graphene-based tuneable capacitance metamaterials. " Apollo - University of Cambridge Repository https://doi.org/10.17863/CAM.116475 https://doi.org/10.17863/CAM.116475 (2025).

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