Gradient-graphene-enabled directional photothermal regulation for self-aligned laser transfer printing

Mengxin Gai; Jing Bian; Furong Chen; Lei Liu; Yu Luo; Yuxing Ma; Xincheng Huang; Hong Xiao; YongAn Huang

doi:10.1038/s41377-025-02170-9

Your Location：

Home >

Browse articles >

Gradient-graphene-enabled directional photothermal regulation for self-aligned laser transfer printing

Original Articles

- Gradient-graphene-enabled directional photothermal regulation for self-aligned laser transfer printing
- Gradient-graphene-enabled directional photothermal regulation for self-aligned laser transfer printing
- Light: Science & Applications 2026年15卷第3期页码：778-792
- Affiliations：
  
  1.State Key Laboratory of Intelligent Manufacturing Equipment and Technology, Huazhong University of Science and Technology, Wuhan, China
  2.Flexible Electronics Research Center, Huazhong University of Science and Technology, Wuhan, China
  3.School of Microelectronics (School of Integrated Circuits), Nanjing University of Science and Technology, Nanjing, China
- Author bio：
  
  Jing Bian (jsbianjing@njust.edu.cn)
  YongAn Huang (yahuang@hust.edu.cn)
- Funds：
- DOI：10.1038/s41377-025-02170-9
  中图分类号：
- 收稿：2025-03-26，
  
  修回：2025-12-10，
  
  录用：2025-12-12，
  
  网络首发：2026-01-12，
  
  纸质出版：2026-03-31
- Accepted：
Scan QR Code
Mengxin Gai, Jing Bian, Furong Chen, 等. Gradient-graphene-enabled directional photothermal regulation for self-aligned laser transfer printing[J]. Light: Science & Applications, 2026,15(3):778-792.

Gai, M. X. et al. Gradient-graphene-enabled directional photothermal regulation for self-aligned laser transfer printing. Light: Science & Applications, 15, 778-792 (2026).
Mengxin Gai, Jing Bian, Furong Chen, 等. Gradient-graphene-enabled directional photothermal regulation for self-aligned laser transfer printing[J]. Light: Science & Applications, 2026,15(3):778-792. DOI： 10.1038/s41377-025-02170-9.

Gai, M. X. et al. Gradient-graphene-enabled directional photothermal regulation for self-aligned laser transfer printing. Light: Science & Applications, 15, 778-792 (2026). DOI： 10.1038/s41377-025-02170-9.

摘要

Abstract

Laser-assisted transfer printing has gained attention for integrating microdevices on unusual substrates. However

conventional technologies exhibit limited fault tolerance during laser-matter interactions

reducing transfer accuracy due to unavoidable irradiation deviations. We report a self-aligned laser transfer (SALT) that enables high-precision

programmable assembly of microchips without precise laser-to-die alignment. A thermal conductivity gradient carbon (TCGC)

with an upper graphene layer and lower amorphous carbon layer

is embedded in the stamp via excimer laser self-limited carbonization of polyimide. The TCGC converts asymmetric light input into uniform heat output under non-uniform/misaligned infrared laser irradiation

whereas the upper graphene layer absorbs heat from the lower amorphous carbon and rapidly conducts heat laterally

ensuring uniform heat distribution of the underlying adhesive layer. This guarantees synchronous chip release at all adhesive sites

mitigating transfer deviations. Additionally

periodically arranged

grayscale-controlled TCGC can be fabricated by modulating excimer laser parameters during carbonization

thereby enabling selective microchip release without pre-planned scanning paths. SALT achieves excellent size compatibility (< 100 micrometers) and high tolerance for irradiation deviations (transfer accuracy < 5 micrometers). Demonstrations of RGB micro-LED display highlight its self-aligned and batch-selective capabilities.

关键词

Keywords

references

Lee, W. et al. Universal assembly of liquid metal particles in polymers enables elastic printed circuit board. Science 378 , 637–641 (2022)..

Shin, J. et al. Vertical full-colour micro-LEDs via 2D materials-based layer transfer. Nature 614 , 81–87 (2023)..

Yoon, J. et al. Heterogeneously integrated optoelectronic devices enabled by micro-t ransfer printing. Adv. Optical Mater. 3 , 1313–1335 (2015)..

Zhao, Z. J. et al. Highly sensitive narrowband photomultiplication-type organic photodetectors prepared by transfer-printed technology. Adv. Funct. Mater. 31 , 2106009 (2021)..

Shirzaei Sani, E. et al. A stretchable wireless wearable bioelectronic system for multiplexed monitoring and combination treatment of infected chronic wounds. Sci. Adv. 9 , eadf7388 (2023)..

Kang, T. H. et al. Hydrogel-templated transfer-printing of conductive nanonetworks for wearable sensors on topographic flexible substrates. Nano Lett. 19 , 3684–3691 (2019)..

Wu, G. B. et al. A universal metasurface antenna to manipulate all fundamental characteristics of electromagnetic waves. Nat. Commun. 14 , 5155 (2023)..

Chen, L. et al. Touch-Programmable Metasurface for Various Electromagnetic Manipulations and Encryptions. Small 18 , 2203871 (2022)..

Wang, C. J. et al. Programmable and scalable transfer printing with high reliability and efficiency for flexible inorganic electronics. Sci. Adv. 6 , eabb2393 (2020)..

Linghu, C. H. et al. Universal SMP gripper with massive and selective capabilities for multiscaled, arbitrarily shaped objects. Sci. Adv. 6 , eaay5120 (2020)..

Qian, C. et al. Deep-learning-enabled self-adaptive microwave cloak without human intervention. Nat. Photonics 14 , 383–390 (2020)..

Tan, T. et al. Biomimetic acoustic perception via chip-scale dual-soliton microcombs. eLight 5 , 22 (2025)..

Wang, Y. F. et al. Reconfigurable versatile integrated photonic computing chip. eLight 5 , 20 (2025)..

Wu, B. et al. Scaling up for end-to-end on-chip photonic neural network inference. Light Sci. Appl. 14 , 328 (2025)..

Chen, F. R. et al. Mass transfer techniques for large-scale and high-density microLED arrays. Int. J. Extrem. Manuf. 4 , 042005 (2022)..

Chen, F. R. et al. Laser-driven hierarchical "gas-needles" for programmable and high-precision proximity transfer printing of microchips. Sci. Adv. 9 , eadk0244 (2023)..

Meitl, M. A. et al. Transfer printing by kinetic control of adhesion to an elastomeric stamp. Nat. Mater. 5 , 33–38 (2006)..

Feng, X. et al. Competing fracture in kinetically controlled transfer printing. Langmuir 23 , 12555–12560 (2007)..

Park, S. H. et al. Universal selective transfer printing via micro-vacuum force. Nat. Commun. 14 , 7744 (2023)..

Kim, S. et al. Soft nanocomposite electroadhesives for digital micro-and nanotransfer printing. Sci. Adv. 5 , eaax4790 (2019)..

Biedermann, L. B. et al. Electrostatic transfer of patterned epitaxial graphene from SiC (0001) to glass. N. J. Phys. 12 , 125016 (2010)..

Chang, W. et al. Concurrent self-assembly of RGB microLEDs for next-generation displays. Nature 617 , 287–291 (2023)..

Lee, D. et al. Fluidic self- assembly for MicroLED displays by controlled viscosity. Nature 619 , 755–760 (2023)..

Hu, J. L. et al. Laser projection proximity transfer for deterministic assembly of microchip arrays at scale. Sci. China Technol. Sci. 65 , 2205–2214 (2022)..

Linghu, C. H. et al. Transfer printing techniques for flexible and stretchable inorganic electronics. npj Flex. Electron. 2 , 26 (2018)..

Bukhari, B. et al. Development of 4D printed smart fresnel lenses: dynamic photochromic and UV-blocking capabilities via vat photopolymerization. Light: Adv. Manuf. 6 , 92–107 (2025)..

Mattle, T. et al. Laser induced forward transfer aluminum layers: Process investigation by time resolved imaging. Appl. Surf. Sci. 258 , 9352–9354 (2012)..

Banks, D. P. et al. Triazene photopolymer dynamic release layer-assisted femtosecond laser-induced forward transfer with an active carrier substrate. Europhys. Lett. 83 , 38003 (2008)..

Marinov, V. R. et al. Laser-assisted ultrathin die packaging: Insights from a process study. Microelectron. Eng. 101 , 23–30 (2013)..

Fardel, R. et al. Laser-induced forward transfer of organic LED building blocks studied by time-resolved shadowgraphy. J. Phys. Chem. C. 114 , 5617–5636 (2010)..

Kim, D. et al. Dynamics of Blister Actuation in Laser-Induced Forward Transfer for Contactless Microchip Transfer. Nanomaterials 14 , 1926 (2024)..

Huang, Y. et al. Direct laser writing-based programmable transfer printing via bioinspired shape memory reversible adhesive. ACS Appl. Mater. Interfaces 8 , 35628–35633 (2016)..

Eisenhaure, J. & Kim, S. Laser-Driven Shape Memory Effect for Transfer Printing Combining Parallelism with Individual Object Control. Adv. Mater. Technol. 1 , 1600098 (2016)..

Saeidpourazar, R. et al. A prototype printer for laser driven micro-transfer printing. J. Manuf. Process. 14 , 416–424 (2012)..

Zhao, W. et al. Thermomechanical constitutive models of shape memory polymers and their composites. Appl. Mech. Rev. 75 , 020802 (2023)..

Luo, H. Y. et al. Laser-driven programmable non-contact transfer printing of objects onto arbitrary receivers via an active elastomeric microstructured stamp. Natl. Sci. Rev. 7 , 296–304 (2020)..

Luo, H. Y. et al. Thermal controlled tunable adhesive for deterministic assembly by transfer printing. Adv. Funct. Mater. 31 , 2010297 (2021)..

Luo, H. Y. et al. Switchable Adhesive Based on Shape Memory Polymer with Micropillars of Different Heights for Laser-Driven Noncontact Transfer Printing. ACS Appl. Mater. Interfaces 16 , 9443–9452 (2024)..

Zhang, S. et al. A thermal actuated switchable dry adhesive with high reversibility for transfer printing. Int. J. Extrem. Manuf. 3 , 035103 (2021)..

Shi, C. Q. et al. Precision-induced localized molten liquid metal stamps for damage-free transfer printing of ultrathin membranes and 3D objects. Nat. Commun. 15 , 8839 (2024)..

Li, C. L. et al. Laser-driven noncontact bubble transfer printing via a hydrogel composite stamp. Proc. Natl. Acad. Sci. USA 121 , e2318739121 (2024)..

Chang, B. et al. Laser-assisted mist capillary self-alignment. Micromachines 8 , 361 (2017)..

Yang, Z. W. et al. Laser-Induced Forward Transfer of SU-8 Microdisks as Carriers of Metallic Microdevices. J. Microelectromechanical Syst. 34 , 32–42 (2024)..

Kuran, E. E. & Tichem, M. Magnetic self-assembly with unique rotational alignment for thin chips. Microelectron. Eng. 141 , 228–233 (2015)..

Sun, W. G. et al. 20 µm Micro-LEDs mass transfer via laser-induced in situ nanoparticles resonance enhancement. Small 20 , 2309877 (2024)..

Song, W., Liu, Q. & Wang, W. Error analysis and compensation for Mini LED mass transfer visual positioning system. Measurement 234 , 114913 (2024)..

Li, Z. H. et al. A case study: dynamic behavior of a typical Micro-LED chips during laser induced forward transfer process. Opt. Laser Technol. 192 , 113411 (2025)..

Chen, Z. L. et al. Fabrication of customized microneedle with high 3D capability an d high structural precision. Addit. Manuf. 95 , 104509 (2024)..

Li, C. L. et al. Laser-induced adhesives with excellent adhesion enhancement and reduction capabilities for transfer printing of microchips. Sci. Adv. 10 , eads9226 (2024)..

Zhang, J. J. et al. Geometric distortion correction of oblique incidence laser interferometer system for helical surface topography measurement. Opt. Lasers Eng. 194 , 109175 (2025)..

Li, W. X.&Mitchell, L. D. Error analysis and improvements for using parallel-shift method to test a galvanometer-based laser scanning system. Proceedings of SPIE 2358, First International Conference on Vibration Measurements by Laser Techniques: Advances and Applications. Ancona, Italy: SPIE, 1994, 13-22.

Kang, S. M. et al. Graphene-enabled laser lift-off for ultrathin displays. Nat. Commun. 15 , 8288 (2024)..

Balandin, A. A. Thermal properties of graphene and nanostructured carbon materials. Nat. Mater. 10 , 569–581 (2011)..

Yu, H. Y. et al. Laser-guided, self-confined graphitization for high-conductivity embedded electr onics. Research 7 , 0305 (2024)..

Saeidpourazar, R. et al. Laser-driven micro transfer placement of prefabricated microstructures. J. Microelectromechanical Syst. 21 , 1049–1058 (2012)..

Huang, X. R. et al. High-Yield and High-Accuracy Mass Transfer of Full-Color Micro-LEDs Using a Blister-Type Dynamic Release Polymer. ACS Appl. Mater. Interfaces 17 , 28622–28631 (2025)..

Yu, H. Y. et al. Laser-induced direct graphene patterning: from formation mechanism to flexible applications. Soft Sci. 3 , 4 (2023)..

Yu, H. Y. et al. Ultrathin, Graphene-in-Polyimide Strain Sensor via Laser-Induced Interfacial Ablation of Polyimide. Adv. Electron. Mater. 9 , 2201086 (2023)..

Bian, J. et al. Experimental and modeling study of controllable laser lift-off via low-fluence multiscanning of polyimide-substrate interface. Int. J. Heat. Mass Transf. 188 , 122609 (2022)..

Kato, T. et al. Carbonization mechanisms of polyimide: Methodology to analyze carbon materials with nitrogen, oxygen, pentagons, and heptagons. Carbon 178 , 58–80 (2021)..

Cao, Y. X.&Zhang, Z. Noncontact selective laser transfer printing and assembly of micro-sized semiconductor devices. Proceedings of 2022 18th IEEE/ASME International Conference on Mechatronic and Embedded Systems and Applications (MESA). Taipei, China: IEEE, 2022, 1-6.

Overmeyer, L. et al. On-the-fly bare die bonding based on laser induced forward transfer (LIFT). CIRP Ann. 71 , 41–44 (2022)..

Miller, R. et al. Noncontact selective laser-assisted placement of thinned semiconductor dice. IEEE Trans. Compon., Packaging Manuf. Technol. 2 , 971–978 (2012)..

Chen, X. Y. et al. Wrap-like transfer printing for three-dimensional curvy electronics. Sci. Adv. 9 , eadi0357 (2023)..

Yoon, H. et al. A site-selective integration strategy for microdevices on conformable substrates. Nat. Electron. 7 , 383–395 (2024)..

Jang, S. H. et al. Investigation of the chemical structure of ultra-thin polyimide substrate for the xenon flash lamp lift-off technology. Polymers 13 , 546 (2021)..

Maugis, D. Contact, Adhesion and Rupture of Elastic Solids. (Berlin, Heidelberg: Springer, 2000).

Min, J. S. et al. Pitch conversion by photoresist expansion transfer for micro LED. J. Soc. Inf. Disp. 32 , 524–529 (2024)..

Yang, X. et al. Super retina TFT based full color microLED display via laser mass transfer. Sci. China Inf. Sci. 67 , 210401 (2024)..

Guo, L. J. Nanoimprint lithography: methods and material requirements. Adv. Mater. 19 , 495–513 (2007)..

Kim, J. et al. Shape memory polymer surfaces with controllable roughness for multiscale switchable dry adhesion. Nat. Commun. 16 , 4954 (2025)..

Li, Y. & Hong, M. H. Parallel laser micro/nano-processing for functional device fabrication. Laser Photonics Rev. 14 , 1900062 (2020)..

Garner, S. M., Lewis, S. C.&Chowdhury, D. Q. Flexible glass and its application for electronic devices. Proceedings of 2017 24th International Workshop on Active-Matrix Flatpanel Displays and Devices (AM-FPD). Kyoto, Japan: IEEE, 2017, 28-33.

浏览量

Downloads

CSCD

文章被引用时，请邮件提醒。

Submit

工具集

关联资源

暂无数据