Fourier ptychographic coherence scanning interferometry for 3D morphology of high aspect ratio and composite micro-trenches

Yin Li; Qun Yuan; Xiao Huo; Shumin Wang; Hongtao He; Zhishan Gao

doi:10.1038/s41377-026-02189-6

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Fourier ptychographic coherence scanning interferometry for 3D morphology of high aspect ratio and composite micro-trenches

Original Articles

- Fourier ptychographic coherence scanning interferometry for 3D morphology of high aspect ratio and composite micro-trenches
- Fourier ptychographic coherence scanning interferometry for 3D morphology of high aspect ratio and composite micro-trenches
- Light: Science & Applications 2026年15卷第3期页码：1037-1050
- Affiliations：
  
  1.School of Electronic and Optical Engineering, Nanjing University of Science and Technology, Nanjing, Jiangsu Province 210094, China
  2.The 13th Research Institute of China Electronics Technology Group Corporation, Shijiazhuang, Hebei Province 050052, China
- Author bio：
  
  Qun Yuan (karmen86913@gmail.com)
  Zhishan Gao (zhishgao@njust.edu.cn)
- Funds：
- DOI：10.1038/s41377-026-02189-6
  中图分类号：
- 收稿：2025-09-23，
  
  修回：2026-01-01，
  
  录用：2026-01-09，
  
  网络首发：2026-01-29，
  
  纸质出版：2026-03-31
- Accepted：
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Yin Li, Qun Yuan, Xiao Huo, 等. Fourier ptychographic coherence scanning interferometry for 3D morphology of high aspect ratio and composite micro-trenches[J]. Light: Science & Applications, 2026,15(3):1037-1050.

Li, Y. et al. Fourier ptychographic coherence scanning interferometry for 3D morphology of high aspect ratio and composite micro-trenches. Light: Science & Applications, 15, 1037-1050 (2026).
Yin Li, Qun Yuan, Xiao Huo, 等. Fourier ptychographic coherence scanning interferometry for 3D morphology of high aspect ratio and composite micro-trenches[J]. Light: Science & Applications, 2026,15(3):1037-1050. DOI： 10.1038/s41377-026-02189-6.

Li, Y. et al. Fourier ptychographic coherence scanning interferometry for 3D morphology of high aspect ratio and composite micro-trenches. Light: Science & Applications, 15, 1037-1050 (2026). DOI： 10.1038/s41377-026-02189-6.

摘要

Abstract

Non-destructive and accurate characterization of high aspect ratio (HAR) and composite micro-trenches is critical for advanced microfabrication but remains a major challenge. Conventional coherence scanning interferometry (CSI)

while widely adopted

suffers from low signal-to-noise ratio (SNR) and limited lateral resolution when applied to HAR and composite microstructures. Here

we present Fourier ptychographic coherence scanning interferometry (FP-CSI)

the first transmissive CSI modality that integrates the aperture synthesis strategy of Fourier ptychographic microscopy with the quantitative phase-resolved capability of interferometry. FP-CSI enables robust three-dimensional morphology reconstruction with enhanced SNR and improved lateral resolution

without reliance on iterative phase retrieval. We demonstrate accurate measurements of a HAR micro-trench (300 μm depth

30:1 aspect ratio) and micro-electro-mechanical system (MEMS) devices (aspect ratios 6:1–20:1). FP-CSI achieves lateral resolution up to the incoherent diffraction limit and maintains this performance even at trench bottoms. Owing to its fidelity

robustness

and non-destructive operation

FP-CSI provides a powerful new metrology platform for next-generation semiconductor inspection

precision manufacturing

and emerging micro-optoelectronic systems.

关键词

Keywords

references

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