Silicon microcavity arrays with open access and a finesse of half a million

Georg Wachter; Stefan Kuhn; Stefan Minniberger; Cameron Salter; Peter Asenbaum; James Millen; Michael Schneider; Johannes Schalko; Ulrich Schmid; André Felgner; Dorothee Hüser; Markus Arndt; Michael Trupke

doi:10.1038/s41377-019-0145-y

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Silicon microcavity arrays with open access and a finesse of half a million

Letter

- Silicon microcavity arrays with open access and a finesse of half a million
- Light: Science & Applications Vol. 8, Issue 3, Pages: 312-318(2019)
- Affiliations：
  
  1.Faculty of Physics, University of Vienna, VCQ, Boltzmanngasse 5, 1090, Vienna, Austria
  2.Institute for Atomic and Subatomic Physics, TU Wien, VCQ, Stadionallee 2, 1020, Vienna, Austria
  3.Institute for Sensor and Actuator Systems, TU Wien, 1040, Vienna, Austria
  4.Physikalisch-Technische Bundesanstalt, Bundesallee 100, D-38116, Braunschweig, Germany
  5.Present address: Department of Physics, King's College London, Strand, London WC2R 2LS, UK
- Author bio：
  
  Stefan Kuhn (stefan.kuhn@univie.ac.at)
  Michael Trupke (michael.trupke@univie.ac.at)
- Funds：
- DOI：10.1038/s41377-019-0145-y
  CLC：
- Published：2019，
  
  Published Online：10 April 2019，
  
  Received：11 October 2018，
  
  Revised：04 March 2019，
  
  Accepted：18 March 2019
- Accepted：
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Wachter, G. et al. Silicon microcavity arrays with open access and a finesse of half a million. Light: Science & Applications, 8, 312-318 (2019).
DOI：

Wachter, G. et al. Silicon microcavity arrays with open access and a finesse of half a million. Light: Science & Applications, 8, 312-318 (2019). DOI： 10.1038/s41377-019-0145-y.

摘要

Abstract

Optical resonators are essential for fundamental science

applications in sensing and metrology

particle cooling

and quantum information processing. Cavities can significantly enhance interactions between light and matter. For many applications they perform this task best if the mode confinement is tight and the photon lifetime is long. Free access to the mode center is important in the design to admit atoms

molecules

nanoparticles

or solids into the

light field. Here

we demonstrate how to machine microcavity arrays of extremely high quality in pristine silicon. Etched to an almost perfect parabolic shape with a surface roughness on the level of 2? and coated to a finesse exceeding

= 500

000

these new devices can have lengths below 17 μm

confining the photons to 5 μm waists in a mode volume of 88λ

. Extending the cavity length to 150 μm

on the order of the radius of curvature

in a symmetric mirror configuration yields a waist smaller than 7 μm

with photon lifetimes exceeding 64 ns. Parallelized cleanroom fabrication delivers an entire microcavity array in a single process. Photolithographic precision furthermore yields alignment structures that result in mechanically robust

pre-aligned

symmetric microcavity arrays

representing a light-matter interface with unprecedented performance.

关键词

Keywords

references

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