A micromirror array with annular partitioning for high-speed random-access axial focusing

Nathan Tessema Ersumo; Cem Yalcin; Nick Antipa; Nicolas Pégard; Laura Waller; Daniel Lopez; Rikky Muller

doi:10.1038/s41377-020-00420-6

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A micromirror array with annular partitioning for high-speed random-access axial focusing

Original Articles

- A micromirror array with annular partitioning for high-speed random-access axial focusing
- Light: Science & Applications Vol. 9, Issue 6, Pages: 1917-1931(2020)
- Affiliations：
  
  1.The University of California, Berkeley and University of California, San Francisco Graduate Program in Bioengineering, Berkeley, CA 94720, USA
  2.Department of Electrical Engineering & Computer Sciences, University of California, Berkeley, CA 94720, USA
  3.Department of Applied Physical Sciences, University of North Carolina at Chapel Hill, Chapel Hill, NC 27514, USA
  4.Chan Zuckerberg Biohub, San Francisco, CA 94158, USA
  5.Physical Measurement Laboratory, National Institute of Standards and Technology, Gaithersburg, MD 20899, USA
- Author bio：
  
  Rikky Muller (rikky@berkeley.edu)
- Funds：
- DOI：10.1038/s41377-020-00420-6
  CLC：
- Published：2020，
  
  Published Online：29 October 2020，
  
  Received：13 June 2020，
  
  Revised：29 September 2020，
  
  Accepted：12 October 2020
- Accepted：
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Ersumo, N. T. et al. A micromirror array with annular partitioning for high-speed random-access axial focusing. Light: Science & Applications, 9, 1917-1931 (2020).
DOI：

Ersumo, N. T. et al. A micromirror array with annular partitioning for high-speed random-access axial focusing. Light: Science & Applications, 9, 1917-1931 (2020). DOI： 10.1038/s41377-020-00420-6.

摘要

Abstract

Dynamic axial focusing functionality has recently experienced widespread incorporation in microscopy

augmented/virtual reality (AR/VR)

adaptive optics and material processing. However

the limitations of existing varifocal tools continue to beset the performance capabilities and operating overhead of the optical systems that mobilize such functionality. The varifocal tools that are the least burdensome to operate (e.g. liquid crystal

elastomeric or optofluidic lenses) suffer from low (≈100 Hz) refresh rates. Conversely

the fastest devices sacrifice either critical capabilities such as their dwelling capacity (e.g. acoustic gradient lenses or monolithic micromechanical mirrors) or low operating overhead (e.g. deformable mirrors). Here

we present a general-purpose random-access axial focusing device that bridges these previously conflicting features of high speed

dwelling capacity and lightweight drive by employing low-rigidity micromirrors that exploit the robustness of defocusing phase profiles. Geometrically

the device consists of an 8.2 mm diameter array of piston-motion and 48-μm-pitch micromirror pixels that provide 2π phase shifting for wavelengths shorter than 1100 nm with 10–90% settling in 64.8 μs (i.e.

15.44 kHz refresh rate). The pixels are electrically partitioned into 32 rings for a driving scheme that enables phase-wrapped operation with circular symmetry and requires < 30 V per channel. Optical experiments demonstrated the array's wide focusing range with a measured ability to target 29 distinct resolvable depth planes. Overall

the features of the proposed array offer the potential for compact

straightforward methods of tackling bottlenecked applications

including high-throughput single-cell targeting in neurobiology and the delivery of dense 3D visual information in AR/VR.

关键词

Keywords

references

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