Direct laser writing of volumetric gradient index lenses and waveguides

Christian R. Ocier; Corey A. Richards; Daniel A. Bacon-Brown; Qing Ding; Raman Kumar; Tanner J. Garcia; Jorik van de Groep; Jung-Hwan Song; Austin J. Cyphersmith; Andrew Rhode; Andrea N. Perry; Alexander J. Littlefield; Jinlong Zhu; Dajie Xie; Haibo Gao; Jonah F. Messinger; Mark L. Brongersma; Kimani C. Toussaint Jr.; Lynford L. Goddard; Paul V. Braun

doi:10.1038/s41377-020-00431-3

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Direct laser writing of volumetric gradient index lenses and waveguides

Original Articles

- Direct laser writing of volumetric gradient index lenses and waveguides
- Light: Science & Applications Vol. 9, Issue 6, Pages: 1993-2006(2020)
- Affiliations：
  
  1.Department of Materials Science and Engineering, University of Illinois at Urbana-Champaign, Urbana, IL, USA
  2.Materials Research Laboratory, University of Illinois at Urbana-Champaign, Urbana, IL, USA
  3.Beckman Institute for Advanced Science and Technology, University of Illinois at Urbana-Champaign, Urbana, IL, USA
  4.Department of Electrical and Computer Engineering, University of Illinois at Urbana-Champaign, Urbana, IL, USA
  5.Department of Materials Science and Engineering, Stanford University, Stanford, CA, USA
  6.Carl R. Woese Institute for Genomic Biology, University of Illinois at UrbanaChampaign, Urbana, IL, USA
  7.Department of Mechanical Science and Engineering, University of Illinois at Urbana-Champaign, Urbana, IL, USA
- Author bio：
  
  Lynford L. Goddard (lgoddard@illinois.edu)
  Paul V. Braun (pbraun@illinois.edu)
- Funds：
- DOI：10.1038/s41377-020-00431-3
  CLC：
- Published：2020，
  
  Published Online：03 December 2020，
  
  Received：02 August 2020，
  
  Revised：27 October 2020，
  
  Accepted：10 November 2020
- Accepted：
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Ocier, C. R. et al. Direct laser writing of volumetric gradient index lenses and waveguides. Light: Science & Applications, 9, 1993-2006 (2020).
DOI：

Ocier, C. R. et al. Direct laser writing of volumetric gradient index lenses and waveguides. Light: Science & Applications, 9, 1993-2006 (2020). DOI： 10.1038/s41377-020-00431-3.

摘要

Abstract

Direct laser writing (DLW) has been shown to render 3D polymeric optical components

including lenses

beam expanders

and mirrors

with submicrometer precision. However

these printed structures are limited to the refractive index and dispersive properties of the photopolymer. Here

we present the subsurface controllable refractive index via beam exposure (SCRIBE) method

a lithographic approach that enables the tuning of the refractive index over a range of greater than 0.3 by performing DLW inside photoresist-filled nanoporous silicon and silica scaffolds. Adjusting the laser exposure during printing enables 3D submicron control of the polymer infilling and thus the refractive index and chromatic dispersion. Combining SCRIBE's unprecedented index range and 3D writing accuracy has realized the world's smallest (15 µm diameter) spherical Luneburg lens operating at visible wavelengths. SCRIBE's ability to tune the chromatic dispersion alongside the refractive index was leveraged to render achromatic doublets in a single printing step

eliminating the need for multiple photoresins and writing sequences. SCRIBE also has the potential to form multicomponent optics by cascading optical elements within a scaffold. As a demonstration

stacked focusing structures that generate photonic nanojets were fabricated inside porous silicon. Finally

an all-pass ring resonator was coupled to a subsurface 3D waveguide. The measured quality factor of 4600 at 1550 nm suggests the possibility of compact photonic systems with optical interconnects that traverse multiple planes. SCRIBE is uniquely suited for constructing such photonic integrated circuits due to its ability to integrate multiple optical components

including lenses and waveguides

without additional printed supports.

关键词

Keywords

references

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