Microstructure and domain engineering of lithium niobate crystal films for integrated photonic applications

Dehui Sun; Yunwu Zhang; Dongzhou Wang; Wei Song; Xiaoyan Liu; Jinbo Pang; Deqiang Geng; Yuanhua Sang; Hong Liu

doi:10.1038/s41377-020-00434-0

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Microstructure and domain engineering of lithium niobate crystal films for integrated photonic applications

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- Microstructure and domain engineering of lithium niobate crystal films for integrated photonic applications
- Light: Science & Applications Vol. 9, Issue 6, Pages: 1770-1787(2020)
- Affiliations：
  
  1.Collaborative Innovation Center of Technology and Equipment for Biological Diagnosis and Therapy in Universities of Shandong, Institute for Advanced Interdisciplinary Research (iAIR), University of Jinan, Jinan 250022, China
  2.Jinan Institute of Quantum Technology, Jinan 250101, China
  3.CETC Deqing Huaying Electronics Co., Ltd., Huzhou 313200, China
  4.Crystrong Photoelectric Technology Co., Ltd., Jinan 250100, China
  5.State Key Laboratory of Crystal Materials, Shandong University, Jinan 250100, China
- Author bio：
  
  Dehui Sun (ifc_sundh@ujn.edu.cn)
  Hong Liu (hongliu@sdu.edu.cn)
- Funds：
- DOI：10.1038/s41377-020-00434-0
  CLC：
- Published：2020，
  
  Published Online：10 December 2020，
  
  Received：10 May 2020，
  
  Revised：08 November 2020，
  
  Accepted：12 November 2020
- Accepted：
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Sun, D. H. et al. Microstructure and domain engineering of lithium niobate crystal films for integrated photonic applications. Light: Science & Applications, 9, 1770-1787 (2020).
DOI：

Sun, D. H. et al. Microstructure and domain engineering of lithium niobate crystal films for integrated photonic applications. Light: Science & Applications, 9, 1770-1787 (2020). DOI： 10.1038/s41377-020-00434-0.

摘要

Abstract

Recently

integrated photonics has attracted considerable interest owing to its wide application in optical communication and quantum technologies. Among the numerous photonic materials

lithium niobate film on insulator (LNOI) has become a promising photonic platform owing to its electro-optic and nonlinear optical properties along with ultralow-loss and high-confinement nanophotonic lithium niobate waveguides fabricated by the complementary metal-oxide-semiconductor (CMOS)-compatible microstructure engineering of LNOI. Furthermore

ferroelectric domain engineering in combination with nanophotonic waveguides on LNOI is gradually accelerating the development of integrated nonlinear photonics

which will play an important role in quantum technologies because of its ability to be integrated with the generation

processing

and auxiliary detection of the quantum states of light. Herein

we review the recent progress in CMOS-compatible microstructure engineering and domain engineering of LNOI for integrated lithium niobate photonics involving photonic modulation and nonlinear photonics. We believe that the great progress in integrated photonics on LNOI will lead to a new generation of techniques. Thus

there remains an urgent need for efficient methods for the preparation of LNOI that are suitable for large-scale and low-cost manufacturing of integrated photonic devices and systems.

关键词

Keywords

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