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Hybrid multi-chip assembly of optical communication engines by in situ 3D nano-lithography
Original Articles
    • Hybrid multi-chip assembly of optical communication engines by in situ 3D nano-lithography

    • Light: Science & Applications   Vol. 9, Issue 3, Pages: 719-729(2020)
    • DOI:10.1038/s41377-020-0272-5    

      CLC:
    • Published:2020,

      Published Online:27 April 2020,

      Received:23 August 2019,

      Revised:09 February 2020,

      Accepted:23 February 2020

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  • Matthias, B. et al. Hybrid multi-chip assembly of optical communication engines by in situ 3D nanolithography. Light: Science & Applications, 9, 719-729 (2020). DOI: 10.1038/s41377-020-0272-5.

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