Low-loss metasurface optics down to the deep ultraviolet region

Cheng Zhang; Shawn Divitt; Qingbin Fan; Wenqi Zhu; Amit Agrawal; Yanqing Lu; Ting Xu; Henri J. Lezec

doi:10.1038/s41377-020-0287-y

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Low-loss metasurface optics down to the deep ultraviolet region

Original Articles

- Low-loss metasurface optics down to the deep ultraviolet region
- Light: Science & Applications Vol. 9, Issue 3, Pages: 574-583(2020)
- Affiliations：
  
  1.School of Optical and Electronic Information & Wuhan National Laboratory for Optoelectronics, Huazhong University of Science and Technology, 430074 Wuhan, China
  2.Physical Measurement Laboratory, National Institute of Standards and Technology, 20899 Gaithersburg, MD, USA
  3.Maryland Nanocenter, University of Maryland, College Park, MD 20742, USA
  4.National Laboratory of Solid State Microstructures, College of Engineering and Applied Sciences and Collaborative Innovation Center of Advanced Microstructures, Nanjing University, 210093 Nanjing, China
- Author bio：
  
  Cheng Zhang (cheng.zhang@hust.edu.cn)
  Ting Xu (xuting@nju.edu.cn)
  Henri J. Lezec (henri.lezec@nist.gov)
- Funds：
- DOI：10.1038/s41377-020-0287-y
  CLC：
- Published：2020，
  
  Published Online：09 April 2020，
  
  Received：01 December 2019，
  
  Revised：25 February 2020，
  
  Accepted：11 March 2020
- Accepted：
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Zhang, C. et al. Low-loss metasurface optics down to the deep ultraviolet region. Light: Science & Applications, 9, 574-583 (2020).
DOI：

Zhang, C. et al. Low-loss metasurface optics down to the deep ultraviolet region. Light: Science & Applications, 9, 574-583 (2020). DOI： 10.1038/s41377-020-0287-y.

摘要

Abstract

Shrinking conventional optical systems to chip-scale dimensions will benefit custom applications in imaging

displaying

sensing

spectroscopy

and metrology. Towards this goal

metasurfaces—planar arrays of subwavelength electromagnetic structures that collectively mimic the functionality of thicker conventional optical elements—have been exploited at frequencies ranging from the microwave range up to the visible range. Here

we demonstrate high-performance metasurface optical components that operate at ultraviolet wavelengths

including wavelengths down to the record-short deep ultraviolet range

and perform representative wavefront shaping functions

namely

high-numerical-aperture lensing

accelerating beam generation

and hologram projection. The constituent nanostructured elements of the metasurfaces are formed of hafnium oxide—a loss-less

high-refractive-index dielectric material deposited using low-temperature atomic layer deposition and patterned using high-aspect-ratio Damascene lithography. This study opens the way towards low-form factor

multifunctional ultraviolet nanophotonic platforms based on flat optical components

enabling diverse applications including lithography

imaging

spectroscopy

and quantum information processing.

关键词

Keywords

references

Yu, N. F.&Capasso, F. Flat optics with designer metasurfaces.Nat. Mater.13, 139–150 (2014)..

Hsiao, H. H., Chu, C. H.&Tsai, D. P. Fundamentals and applications of metasurfaces.Small Methods1, 1600064 (2017)..

Kildishev, A. V., Boltasseva, A.&Shalaev, V. M. Planar photonics with metasurfaces.Science339, 1232009 (2013)..

Ding, F., Pors, A.&Bozhevolnyi, S. I. Gradient metasurfaces: a review of fundamentals and applications.Rep. Prog. Phys.81, 026401 (2018)..

Chen,H. T., Taylor, A. J.&Yu, N. F. A review of metasurfaces: physics and applications.Rep. Prog. Phys.79, 076401 (2016)..

Kamali, S. M. et al. A review of dielectric optical metasurfaces for wavefront control.Nanophotonics7, 1041–1068 (2018)..

Zhang, L. et al. Advances in full control of electromagnetic waves with metasurfaces.Adv. Opt. Mater.4, 818–833 (2016)..

Sun, S. L. et al. Electromagnetic metasurfaces: physics and applications.Adv. Opt. Photonics11, 380–479 (2019)..

Luo, X. G. Subwavelength optical engineering with metasurface waves.Adv. Opt. Mater.6, 1701201 (2018)..

Arbabi, A. et al. Dielectric metasurfaces for complete control of phase and polarization with subwavelength spatial resolution and high transmission.Nat. Nanotechnol.10, 937–943 (2015)..

Lin, D. M. et al. Dielectric gradient metasurface optical elements.Science345, 298–302 (2014)..

Divitt, S. et al. Ultrafast optical pulse shaping using dielectric metasurfaces.Science364, 890–894 (2019)..

Khorasaninejad, M. et al. Metalenses at visible wavelengths: diffraction-limited focusing and subwavelength resolution imaging.Science352, 1190–1194 (2016)..

Chen, W. T. et al. A broadband achromatic metalens for focusing and imaging in the visible.Nat. Nanotechnol.13, 220–226 (2018)..

Wang, S. M. et al. A broadband achromatic metalens in the visible.Nat. Nanotechnol.13, 227–232 (2018)..

Ren, H. R. et al. Metasurface orbital angular momentum holography.Nat. Commun.10, 2986 (2019)..

Day, R. N.&Davidson, M. W. The fluorescent protein palette: tools for cellular imaging.Chem. Soc. Rev.38, 2887–2921 (2009)..

Greenfield, N. J. Using circular dichroism spectra to estimate protein secondary structure.Nat. Protoc.1, 2876–2890 (2006)..

Ludlow, A. D. et al. Optical atomic clocks.Rev. Mod. Phys.87, 637–701 (2015)..

Huang, K. et al. Ultraviolet metasurfaces of ≈80% efficiency with antiferromagnetic resonances for optical vectorial anti-counterfeiting.Laser Photonics Rev.13, 1800289 (2019)..

Deng, Y. et al. All-silicon broadband ultraviolet metasurfaces.Adv. Mater.30, 1802632 (2018)..

Robertson, J. High dielectric constant oxides.Eur. Phys. J. Appl. Phys.28, 265–291 (2004)..

Wilk, G. D., Wallace, R. M.&Anthony, J. M. High-κ gate dielectrics: current status and materials properties considerations.J. Appl. Phys.89, 5243–5275 (2001)..

Andricacos, P. C. et al. Damascene copper electroplating for chip interconnections.IBM J. Res. Dev.42, 567–574 (1998)..

Schmid, G. M. et al. Implementation of an imprint damascene process for interconnect fabrication.J. Vac. Sci. Technol. B24, 1283–1291 (2006)..

Devlin, R. C. et al. Broadband high-efficiency dielectric metasurfaces for the visible spectrum.Proc. Natl Acad. Sci. USA113, 10473–10478 (2016)..

Lowalekar, V.&Raghavan, S. Etching of zirconium oxide, hafnium oxide, and hafnium silicates in dilute hydrofluoric acid solutions.J. Mater. Res.19, 1149–1156 (2011)..

Liu, X. Y. et al. ALD of hafnium oxide thin films from tetrakis(ethylmethylamino)hafnium and ozone.J. Electrochem. Soc.152, G213–G219 (2005)..

Kukli, K. et al. Comparison of hafnium oxide films grown by atomic layer deposition from iodide and chloride precursors.Thin Solid Films416, 72–79 (2002)..

Hausmann, D. M. et al. Atomic layer deposition of hafnium and zirconium oxides using metal amide precursors.Chem. Mater.14, 4350–4358 (2002)..

Siviloglou, G. A. et al. Observation of accelerating airy beams.Phys. Rev. Lett.99, 213901 (2007)..

Siviloglou, G. A.&Christodoulides, D. N. Accelerating finite energy airy beams.Opt. Lett.32, 979–981 (2007)..

Henstridge, M. et al. Accelerating light with metasurfaces.Optica5, 678–681 (2018)..

Cottrell, D. M., Davis, J. A.&Hazard, T. M. Direct generation of accelerating airy beams using a 3/2 phase-only pattern.Opt. Lett.34, 2634–2636 (2009)..

Novotny, L.&Hecht, B.Principles of Nano-Optics. (Cambridge University Press, Cambridge, 2006).

Fan, Q. B. et al. Broadband generation of photonic spin-controlled arbitrary accelerating light beams in the visible.Nano Lett.19, 1158–1165 (2019)..

Wang, L. et al. Grayscale transparent metasurface holograms.Optica3, 1504–1505 (2016)..

Wang, B. et al. Polarization-controlled color-tunable holograms with dielectric metasurfaces.Optica4, 1368–1371 (2017)..

Yue, Z. et al. Nanometric holograms based on a topological insulator material.Nat. Commun.8, 15354 (2017)..

Huang, L. L., Zhang, S.&Zentgraf, T. Metasurface holography: from fundamentals to applications.Nanophotonics7, 1169–1190 (2018)..

Gerchberg, R. W.&Saxton, W. O. A practical algorithm for the determination of phase from image and diffraction plane pictures.Optik35, 237–246 (1972)..

Mueller, J. P. B. et al. Metasurface polarization optics: independent phase control of arbitrary orthogonal states of polarization.Phys. Rev. Lett.118, 113901 (2017)..

Wang, K. et al. Quantum metasurface for multiphoton interference and state reconstruction.Science361, 1104–1108 (2018)..

Kamali, S. M. et al. Angle-multiplexed metasurfaces: encoding independent wavefronts in a single metasurface under different illumination angles.Phys. Rev. X7, 041056 (2017)..

Phan, T. et al. High-efficiency, large-area, topology-optimized metasurfaces.Light: Sci. Appl.8, 48 (2019)..

Decker, M. et al. High-efficiency dielectric Huygens' surfaces.Adv. Opt. Mater.3, 813–820 (2015)..

Pfeiffer, C.&Grbic, A. Metamaterial Huygens' surfaces: tailoring wave fronts with reflectionless sheets.Phys. Rev. Lett.110, 197401 (2013)..

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