Fiber-tip polymer clamped-beam probe for high-sensitivity nanoforce measurements

Mengqiang Zou; Changrui Liao; Shen Liu; Cong Xiong; Cong Zhao; Jinlai Zhao; Zongsong Gan; Yanping Chen; Kaiming Yang; Dan Liu; Ying Wang; Yiping Wang

doi:10.1038/s41377-021-00611-9

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Fiber-tip polymer clamped-beam probe for high-sensitivity nanoforce measurements

Articles

- Fiber-tip polymer clamped-beam probe for high-sensitivity nanoforce measurements
- Light: Science & Applications Vol. 10, Issue 9, Pages: 1768-1779(2021)
- Affiliations：
  
  1.Key Laboratory of Optoelectronic Devices and Systems of Ministry of Education/GuangDong Province, College of Physics and Optoelectronic Engineering, Shenzhen University, Shenzhen, 518060, China
  2.Shenzhen Key Laboratory of Photonic Devices and Sensing Systems for Internet of Things, Guangdong and Hong Kong Joint Research Centre for Optical Fibre Sensors, Shenzhen University, Shenzhen, 518060, China
  3.College of Materials Science and Engineering, Shenzhen Key Laboratory of Polymer Science and Technology, Guangdong Research Center for Interfacial Engineering of Functional Materials, Shenzhen, 518060, China
  4.Wuhan National Laboratory for Optoelectronics (WNLO), Huazhong University of Science and Technology (HUST), Wuhan, 430074, China
  5.Shenzhen Huazhong University of Science and Technology Research Institute, Shenzhen, Guangdong, 518057, China
- Author bio：
  
  Changrui Liao(cliao@szu.edu.cn)
  Yiping Wang(ypwang@szu.edu.cn)
- Funds：
- DOI：10.1038/s41377-021-00611-9
  CLC：
- Published：30 September 2021，
  
  Published Online：27 August 2021，
  
  Received：14 April 2021，
  
  Revised：26 July 2021，
  
  Accepted：07 August 2021
- Accepted：
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Zou M. Q. et al. Fiber-tip polymer clamped-beam probe for high-sensitivity nanoforce measurements. Light: Science & Applications, 10, 1768-1779 (2021).
DOI：

Zou M. Q. et al. Fiber-tip polymer clamped-beam probe for high-sensitivity nanoforce measurements. Light: Science & Applications, 10, 1768-1779 (2021). DOI： 10.1038/s41377-021-00611-9.

摘要

Abstract

Micromanipulation and biological

material science

and medical applications often require to control or measure the forces asserted on small objects. Here

we demonstrate for the first time the micropri

nting of a novel fiber-tip-polymer clamped-beam probe micro-force sensor for the examination of biological samples. The proposed sensor consists of two bases

a clamped beam

and a force-sensing probe

which were developed using a femtosecond-laser-induced two-photon polymerization (TPP) technique. Based on the finite element method (FEM)

the static performance of the structure was simulated to provide the basis for the structural design. A miniature all-fiber micro-force sensor of this type exhibited an ultrahigh force sensitivity of 1.51 nm μN

−1

a detection limit of 54.9 nN

and an unambiguous sensor measurement range of ~2.9 mN. The Young's modulus of polydimethylsiloxane

a butterfly feeler

and human hair were successfully measured with the proposed sensor. To the best of our knowledge

this fiber sensor has the smallest force-detection limit in direct contact mode reported to date

comparable to that of an atomic force microscope (AFM). This approach opens new avenues towards the realization of small-footprint AFMs that could be easily adapted for use in outside specialized laboratories. As such

we believe that this device will be beneficial for high-precision biomedical and material science examination

and the proposed fabrication method provides a new route for the next generation of research on complex fiber-integrated polymer devices.

关键词

Keywords

references

Wei, Y. Z.&Xu, Q. S. An overview of micro-force sensing techniques.Sens. Actuators A Phys.234, 359–374 (2015)..

Conrad, H. et al. A small-gap electrostatic micro-actuator for large deflections.Nat. Commun.6, 10078 (2015)..

Xie, Y. et al. Development of a microforce sensor and its array platform for robotic cell microinjection force measurement.Sensors16, 483 (2016)..

Uhrig, K. et al. Optical force sensor array in a microfluidic device based on holographic optical tweezers.Lab Chip9, 661–668 (2009)..

Hu, Z. M. et al. Optocapillarity-driven assembly and reconfiguration of liquid crystal polymer actuators.Nat. Commun.11, 5780 (2020)..

Guo, H. C. et al. Artificially innervated self-healing foams as synthetic piezo-impedance sensor skins.Nat. Commun.11, 5747 (2020)..

Zhu, Q. D. et al. A double‐layer mechanochromic hydrogel with multidirectional force sensing and encryption capability.Adv. Funct. Mater.29, 1808191 (2019)..

Šiškins, M. et al. Sensitive capacitive pressure sensors based on graphene membrane arrays.Microsyst. Nanoeng.6, 102 (2020)..

Sun, T. et al. Decoding of facial strains via conformable piezoelectric interfaces.Nat. Biomed. Eng.4, 954–972 (2020)..

Han, X. G. et al. Novel resonant pressure sensor based on piezoresistive detection and symmetrical in-plane mode vibration.Microsyst. Nanoeng.6, 95 (2020)..

Pevec, S.&Donlagic, D. Miniature all-fiber force sensor.Opt. Lett.45, 5093–5096 (2020)..

Thompson, A. J., Power, M.&Yang, G. Z. Micro-scale fiber-optic force sensor fabricated using direct laser writing and calibrated using machine learning.Opt. Express26, 14186–14200 (2018)..

Li, M. et al. Ultracompact fiber sensor tip based on liquid polymer-filled Fabry-Perot cavity with high temperature sensitivity.Sens. Actuators B Chem.233, 496–501 (2016)..

Huang, J. Q. et al. Operando decoding of chemical and thermal events in commercial Na(Li)-ion cells via optical sensors.Nat. Energy5, 674–683 (2020)..

Wu, Y. et al. Highly sensitive force sensor based on balloon-like interferometer.Opt. Laser Technol.103, 17–21 (2018)..

Shen, C. Y. et al. Measurements of milli-Newton surface tension forces with tilted fiber Bragg gratings.Opt. Lett.43, 255–258 (2018)..

Jia, Y. P. et al. Complementary chiral metasurface with strong broadband optical activity and enhanced transmission.Appl. Phys. Lett.104, 011108 (2014)..

Farsari, M.&Chichkov, B. N. Two-photon fabrication.Nat. Photonics3, 450–452 (2009)..

Schaedler, T. A. et al. Ultralight metallicmicrolattices.Science334, 962–965 (2011)..

Kim, S. et al. A two-step fabrication method for 3D printed microactuators: characterization and actuated mechanisms.J. Microelectromech. Syst.29, 544–552 (2020)..

Cumpston, B. H. et al. Two-photon polymerization initiators for three-dimensional optical data storage and microfabrication.Nature398, 51–54 (1999)..

Power, M. et al. A monolithic force-sensitive 3D microgripper fabricated on the tip of an optical fiber using 2-photon polymerization.Small14, 1703964 (2018)..

Kelemen, L. et al. Direct writing of optical microresonators in a lab-on-a-chip for label-free biosensing.Lab a Chip19, 1985–1990 (2019)..

Xu, B. et al. High efficiency integration of three-dimensional functional microdevices inside a microfluidic chip by using femtosecond laser multifoci parallel microfabrication.Sci. Rep.6, 19989 (2016)..

Vanderpoorten, O. et al. Scalable integration of nano-, and microfluidics with hybrid two-photon lithography.Microsyst. Nanoeng.5, 40 (2019)..

Li, B. et al. A bio-inspired 3D micro-structure for graphene-based bacteria sensing.Biosens. Bioelectron.123, 77–84 (2019)..

Marino, A. et al. Biomimicry at the nanoscale: current research and perspectives of two-photon polymerization.Nanoscale7, 2841–2850 (2015)..

Hippler, M. et al. 3D scaffolds to study basic cell biology.Adv. Mater.31, 1808110 (2019)..

Villangca, M. J. et al. Light-driven micro-tool equipped with a syringe function.Light. Sci. Appl.5, e16148 (2016)..

Ma, Z. C. et al. Femtosecond laser programmed artificial musculoskeletal systems.Nat. Commun.11, 4536 (2020)..

Xiong, Z. et al. Magnetic-field-driven ultra-small 3D hydrogel microstructures: preparation of gel photoresist and two-photon polymerization microfabrication.Sens. Actuators B Chem.274, 541–550 (2018)..

Wang, W. K. et al. Magnetic nickel–phosphorus/polymer composite and remotely driven three-dimensional micromachine fabricated by nanoplating and two-photon polymerization.J. Phys. Chem. C.115, 11275–11281 (2011)..

Wang, H. et al. [INVITED]A miniaturized optical fiber microphone with concentric nanorings grating and microsprings structured diaphragm.Opt. Laser Technol.78, 110–115 (2016)..

Melissinaki, V., Farsari, M.&Pissadakis, S. A fiber-endface, fabry–perot vapor microsensor fabricated by multiphoton polymerization.IEEE J. Sel. Top. Quantum Electron.21, 5600110 (2015)..

Xiong, C. et al. Fiber-tip polymer microcantilever for fast and highly sensitive hydrogen measurement.ACS Appl. Mater. Interfaces12, 33163–33172 (2020)..

Sun, L. D. et al. 3D-printed cellular tips for tuning fork atomic force microscopy in shear mode.Nat. Commun.11, 5732 (2020)..

Palacio, M. L. B.&Bhushan, B. Depth-sensing indentation of nanomaterials and nanostructures.Mater. Charact.78, 1–20 (2013)..

Chavan, D. et al. Ferrule-top nanoindenter: an optomechanical fiber sensor for nanoindentation.Rev. Sci. Instrum.83, 115110 (2012)..

Li, C. et al. Femtosecond laser microprinting of a polymerfiber Bragg grating for high-sensitivity temperature measurements.Opt. Lett.43, 3409–3412 (2018)..

Hua, Z., Wu, S. S.&Shen, J. Polymer/silica nanocomposites: preparation, characterization, properties, and applications.Chem. Rev.39, 3893–3957 (2008)..

Liu, S. et al. High-sensitivity strain sensor based on in-fiber rectangular air bubble.Sci. Rep.5, 7624 (2015)..

Ding, W. Q., Guo, Z. Y.&Ruoff, R. S. Effect of cantilever nonlinearity in nanoscale tensile testing.J. Appl. Phys.101, 034316 (2007)..

Namjoshi, K. V.&Biringer, P. P. Low-frequency eddy-current loss estimation in long conductors by using the moment of inertia of cross sections.IEEE Trans. Magn.24, 2181–2185 (1988)..

Balaji, V.&Bhat, K. N. A comparison of burst strength and linearity of pressure sensors having thin diaphragms of different shapes.J. ISSS2, 18–26 (2012)..

Vangelatos, Z. et al. Investigating the mechanical response of microscale pantographic structures fabricated by multiphoton lithography.Extrem. Mech. Lett.43, 101202 (2021)..

White, I. M.&Fan, X. D. On the performance quantification of resonant refractive index sensors.Opt. Express16, 1020–1028 (2008)..

Seghir, R.&Arscott, S. Extended PDMS stiffness range for flexible systems.Sens. Actuators A Phys.230, 33–39 (2015)..

Chaudhury, M. K. et al. The influence of elastic modulus and thickness on the release of the soft-fouling green algaUlva linza(syn.Enteromorpha linza) from poly (dimethylsiloxane) (PDMS) model networks.Biofouling21, 41–48 (2005)..

Butt, H. J.&Jaschke, M. Calculation of thermal noise in atomic force microscopy.Nanotechnology6, 1 (1999)..

Galluzzi, M. et al. Space-resolved quantitative mechanical measurements of soft and supersoft materials by atomic force microscopy.NPG Asia Mater.8, e327 (2016)..

Sneddon, I. N. The relation between load and penetration in the axisymmetric boussinesq problem for a punch of arbitrary profile.Int. J. Eng. Sci.3, 47–57 (1965)..

Galluzzi, M. et al. Atomic force microscopy methodology and AFMech Suite software for nanomechanics on heterogeneous soft materials.Nat. Commun.9, 3584 (2018)..

Wei, G. H., Bhushan, B.&Torgerson, P. M. Nanomechanical characterization of human hair using nanoindentation and SEM.Ultramicroscopy105, 248–266 (2005)..

Liu, Q. et al. High-sensitivity photonic crystal fiber force sensor based on Sagnac interferometer for weighing.Opt. Laser Technol.123, 105939 (2020)..

Chung, K. M. Highly sensitive compact force sensor based on microfiber bragg grating.IEEE Photonics Technol. Lett.24, 700–702 (2012)..

Liu, Y. et al. A Fabry–Perot cuboid cavity across the fibre for high-sensitivity strain force sensing.J. Opt.16, 105401 (2014)..

Gong, Y. et al. Highly sensitive force sensor based on optical microfiber asymmetrical Fabry-Perot interferometer.Opt. Express22, 3578–3584 (2014)..

Liu, Y. et al. Strain force sensor with ultra-high sensitivity based on fiber inline Fabry-Perot micro-cavity plugged by cantilever taper.Opt. Express25, 7797–7806 (2017)..

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